TY - CHAP A1 - Szeremley, Daniel A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Eremin, Denis A1 - Mitschker, Felix A1 - Steves, Simon A1 - Awakowicz, Peter A1 - Kushner, Mark T1 - Numerical simulations of a microwave driven low pressure plasma T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534377 PB - IEEE CY - Piscataway, NJ ER -