TY - PAT A1 - Kurth, Eberhard A1 - Kunath, Christian A1 - Schenk, Harald T1 - Ion-sensitive structure and method of manufacturing the same Y1 - 2016 ER - TY - PAT A1 - Kurth, Eberhard A1 - Kunath, Christian A1 - Schenk, Harald T1 - Ion-sensitive structure and method for producing the same Y1 - 2023 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213 ER -