TY - CHAP A1 - Michling, Marcel A1 - Friedrich, Daniel A1 - Schmeißer, Dieter A1 - Koval, Yuri A1 - Müller, Paul T1 - Study of polyimide after graphitization with low-energy Ar+ Ion irradiation by NEXAFS T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44 N2 - In this contribution we report on investigations of the electronic structure of Ar+ irradiated polyimide samples by using NEXAFS. The NEXAFS measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin using TEY and TFY detection. Polyimide samples are prepared using low Ar+ dose while the temperature of the samples is varied between 300K and 700K. In the NEXAFS data at the Carbon K-edge we see substantial changes between different samples. The differences appear in particular in the more surface sensitive TEY-Signal. The NEXFS data are consistent with the graphitization of the surface upon Ar+ bombardment as we identify the characteristic absorption bands of graphitic carbon. Its relative content increases with increasing sample temperature. In contrast, in the more bulk sensitive TFY data, the emission characteristic of polyimide is maintained. The possibility to cover insulating polymers with a conducting layer is a great demand for many applications. Because of the relative low price of the basic materials, the irradiation with low-energy Ions will play an important roll in the microelectronic of the future. Y1 - 2009 UR - http://www.dpg-verhandlungen.de/year/2009/conference/dresden/part/df/session/15/contribution/5 SN - 0420-0195 SP - S. 147 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Friedrich, Daniel A1 - Michling, Marcel A1 - Schmeißer, Dieter A1 - Koval, Yuri A1 - Müller, Paul T1 - Characterization of ion beam modified polyimide layers T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45 N2 - Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar+ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He+ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films. Y1 - 2010 UR - http://www.dpg-verhandlungen.de/year/2010/conference/regensburg/part/ds/session/38/contribution/10 SN - 0420-0195 SP - S. 247 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Friedrich, Daniel A1 - Koval, Yuri A1 - Müller, Paul A1 - Schmeißer, Dieter T1 - Electronic structure of thin spin-coated polyimide layers T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46 N2 - The conductivity of polyimide layers can be modified by several orders of magnitude by ion beam radiation. In order to understand the electronic structure of the pure polyimide before ion beam modification we focus in our preliminary experiments on spectroscopic investigations of thin as prepared polyimide films. The films were made by spin coating from a PMDA/ODA solution with subsequent vacuum annealing at 350°C. The layer thickness can be controlled by changing the concentration of PMDA/ODA in the solution realizing a thickness down to 3.5nm. For the characterization of the as prepared thin polyimide films the techniques NEXAFS, ResPES, XPS and CIS were applied at the U49/2-PGM2 beam line of Bessy II, Berlin. Our data including the valence band, core levels and absorption spectrum were compared with theoretical LCAO calculations. Based on these results we are able to attribute all spectral features to the specific atomic bonds in the molecule. Y1 - 2011 UR - http://www.dpg-verhandlungen.de/year/2011/conference/dresden/part/ds/session/63/contribution/3 SN - 0420-0195 SP - S. 311 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -