TY - CHAP A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Lee, Hyunjoo J. A1 - Oralkan, Ă–mer A1 - Khuri-Yakub, Butrus T. T1 - Zero-bias resonant sensor with an oxide-nitride layer as charge trap T2 - 2010 IEEE sensors, Waikoloa, Hawaii, USA, 1 - 4 November 2010 Y1 - 2010 SN - 978-1-4244-8168-2 SP - 1024 EP - 1028 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Tsuji, Yukihide A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Low temperature process for CMUT fabrication with wafer bonding technique T2 - 2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010 Y1 - 2010 SN - 978-1-4577-0381-2 SP - 551 EP - 554 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Lee, Hyunjoo J. A1 - Khuri-Yakub, Butrus T. T1 - Modeling CMUT of multi-cell configuration T2 - IEEE Ultrasonics Symposium (IUS), 2010, 11 - 14 Oct. 2010, Town & Country Inn & Convention Center, San Diego Y1 - 2010 SN - 978-1-4577-0381-2 SP - 431 EP - 434 PB - IEEE CY - Piscataway, NJ ER -