TY - GEN A1 - Lee, Hyunjoo J. A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Oralkan, Ömer A1 - Khuri-Yakub, Butrus T. T1 - Chemical vapor detection using a capacitive micromachined ultrasonic transducer T2 - Analytical chemistry Y1 - 2011 U6 - https://doi.org/10.1021/ac201626b SN - 1520-6882 VL - 83 IS - 24 SP - 9314 EP - 9320 ER - TY - GEN A1 - Sarioglu, Ali Fatih A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon T2 - Journal of The Electrochemical Society Y1 - 2012 U6 - https://doi.org/10.1149/2.005202jes SN - 0013-4651 VL - 159 IS - 2 SP - 79 EP - 84 ER - TY - GEN A1 - Park, Kwan Kyu A1 - Lee, Hyunjoo J. A1 - Kupnik, Mario A1 - Oralkan, Ömer A1 - Ramseyer, Jean-Pierre A1 - Lang, Hans Peter A1 - Hegner, Martin A1 - Gerber, Christoph A1 - Khuri-Yakub, Butrus T. T1 - Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection T2 - Sensors and Actuators B: Chemical Y1 - 2011 U6 - https://doi.org/10.1016/j.snb.2011.09.036 SN - 0925-4005 VL - 160 IS - 1 SP - 1120 EP - 1127 ER - TY - GEN A1 - Park, Kwan Kyu A1 - Lee, Hyunjoo J. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding T2 - Journal of Microelectromechanical Systems Y1 - 2011 U6 - https://doi.org/10.1109/JMEMS.2010.2093567 SN - 1941-0158 VL - 20 IS - 1 SP - 95 EP - 103 ER - TY - CHAP A1 - Kupnik, Mario A1 - Ho, Min-Chieh A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - CMUTs for air coupled ultrasound with improved bandwidth T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 592 EP - 595 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Ho, Min-Chieh A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - Fabrication and model validation for CMUTs operated in permanent contact mode T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 1016 EP - 1019 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Apte, Nikhil A1 - Vaithilingam, Srikant A1 - Sarioglu, Ali Fatih A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Large area 1D CMUT phased arrays for multi-modality ultrasound imaging T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 612 EP - 615 PB - IEEE CY - Piscataway, NJ ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - High-temperature electrostatic transducers and fabrication method Y1 - 2010 UR - http://www.google.com.na/patents/US7843022 ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Monolithic integrated CMUTs fabricated by low temperature wafer bonding Y1 - 2010 UR - https://www.google.ch/patents/US20100225200?hl=de&cl=en ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Direct wafer-bonded 2D CMUT array Y1 - 2010 UR - https://www.google.com/patents/US7846102 ER -