TY - GEN A1 - Lee, Hyunjoo J. A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Oralkan, Ömer A1 - Khuri-Yakub, Butrus T. T1 - Chemical vapor detection using a capacitive micromachined ultrasonic transducer T2 - Analytical chemistry Y1 - 2011 U6 - https://doi.org/10.1021/ac201626b SN - 1520-6882 VL - 83 IS - 24 SP - 9314 EP - 9320 ER - TY - GEN A1 - Sarioglu, Ali Fatih A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon T2 - Journal of The Electrochemical Society Y1 - 2012 U6 - https://doi.org/10.1149/2.005202jes SN - 0013-4651 VL - 159 IS - 2 SP - 79 EP - 84 ER - TY - GEN A1 - Park, Kwan Kyu A1 - Lee, Hyunjoo J. A1 - Kupnik, Mario A1 - Oralkan, Ömer A1 - Ramseyer, Jean-Pierre A1 - Lang, Hans Peter A1 - Hegner, Martin A1 - Gerber, Christoph A1 - Khuri-Yakub, Butrus T. T1 - Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection T2 - Sensors and Actuators B: Chemical Y1 - 2011 U6 - https://doi.org/10.1016/j.snb.2011.09.036 SN - 0925-4005 VL - 160 IS - 1 SP - 1120 EP - 1127 ER - TY - GEN A1 - Park, Kwan Kyu A1 - Lee, Hyunjoo J. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding T2 - Journal of Microelectromechanical Systems Y1 - 2011 U6 - https://doi.org/10.1109/JMEMS.2010.2093567 SN - 1941-0158 VL - 20 IS - 1 SP - 95 EP - 103 ER - TY - CHAP A1 - Kupnik, Mario A1 - Ho, Min-Chieh A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - CMUTs for air coupled ultrasound with improved bandwidth T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 592 EP - 595 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Ho, Min-Chieh A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Khuri-Yakub, Butrus T. T1 - Fabrication and model validation for CMUTs operated in permanent contact mode T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 1016 EP - 1019 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Apte, Nikhil A1 - Vaithilingam, Srikant A1 - Sarioglu, Ali Fatih A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Large area 1D CMUT phased arrays for multi-modality ultrasound imaging T2 - IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011 Y1 - 2011 SN - 978-1-4577-1252-4 SN - 978-1-4577-1253-1 SP - 612 EP - 615 PB - IEEE CY - Piscataway, NJ ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - High-temperature electrostatic transducers and fabrication method Y1 - 2010 UR - http://www.google.com.na/patents/US7843022 ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Monolithic integrated CMUTs fabricated by low temperature wafer bonding Y1 - 2010 UR - https://www.google.ch/patents/US20100225200?hl=de&cl=en ER - TY - PAT A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Direct wafer-bonded 2D CMUT array Y1 - 2010 UR - https://www.google.com/patents/US7846102 ER - TY - GEN A1 - Lin, Der-Song A1 - Zhuang, Xuefeng A1 - Wong, Serena H. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer T2 - Journal of Microelectromechanical Systems Y1 - 2010 U6 - https://doi.org/10.1109/JMEMS.2010.2076786 SN - 1941-0158 VL - 19 IS - 6 SP - 1341 EP - 1351 ER - TY - GEN A1 - Wong, Serena H. A1 - Kupnik, Mario A1 - Watkins, Ronald D. A1 - Butts-Pauly, Kim A1 - Khuri-Yakub, Butrus T. T1 - Capacitive micromachined ultrasonic transducers for therapeutic ultrasound applications T2 - IEEE transactions on bio-medical electronics Y1 - 2010 SN - 0018-9294 VL - 57 IS - 1 SP - 114 EP - 123 ER - TY - CHAP A1 - Ho, Min-Chieh A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - FEA of CMUTs suitable for wide gas pressure range applications T2 - 2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010, vol. 2 Y1 - 2010 SP - 1234 EP - 1237 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Torashima, Kazutoshi A1 - Wygant, Ira O. A1 - Khuri-Yakub, Butrus T. T1 - CMUT fabrication based on a thick buried oxide layer T2 - IEEE International Ultrasonics Symposium proceedings Y1 - 2010 SN - 978-1-4577-0381-2 SP - 547 EP - 550 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Yoon, Hyo-Seon A1 - Ho, Min-Chieh A1 - Apte, Nikhil A1 - Cristman, Paul A1 - Vaithilingam, Srikant A1 - Kupnik, Mario A1 - Butts-Pauly, Kim A1 - Khuri-Yakub, Butrus T. T1 - Fabrication of CMUT cells with gold center mass for higher output pressure T2 - 10th International Symposium on Therapeutic Ultrasound, ISTU 2010, Tokyo, Japan, 9 - 12 June 2010 Y1 - 2010 SN - 978-0-7354-0917-0 SP - 183 EP - 188 PB - American Inst. of Physics CY - Melville, NY ER - TY - CHAP A1 - Lee, Hyunjoo J. A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Oralkan, Ömer A1 - Khuri-Yakub, Butrus T. T1 - Highly sensitive detection of DMMP using a CMUT chemical sensor T2 - 2010 IEEE sensors, Waikoloa, Hawaii, USA, 1 - 4 November 2010, the Ninth IEEE Sensors Conference 2010 Y1 - 2010 SN - 978-1-4244-8168-2 U6 - https://doi.org/10.1109/ICSENS.2010.5690493 SP - 2122 EP - 2126 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Bäck, David A1 - Oralkan, Ömer A1 - Kupnik, Mario A1 - Willatzen, Morten A1 - Khuri-Yakub, Butrus T. A1 - Jensen, Jorgen Arendt T1 - Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II T2 - IEEE Ultrasonics Symposium, San Diego, California, 2010 Y1 - 2010 SN - 978-1-4577-0381-2 SP - 439 EP - 442 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Lin, Der-Song A1 - Zhuang, Xuefeng A1 - Wodnicki, Robert A1 - Woychik, Charles. G. A1 - Oralkan, Ömer A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Packaging of large and low-pitch size 2D ultrasonic transducer arrays T2 - IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010 Y1 - 2010 SN - 978-1-424-45761-8 SN - 978-1-4244-5763-2 SP - 508 EP - 511 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Wygant, Ira O. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Deriving a simulation model of a single 40-kHz CMUT cell from impedance and interferometer measurements Y1 - 2010 ER - TY - CHAP A1 - Tsuji, Yukihide A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Low temperature process for CMUT fabrication with wafer bonding technique T2 - 2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010 Y1 - 2010 SN - 978-1-4577-0381-2 SP - 551 EP - 554 PB - IEEE CY - Piscataway, NJ ER -