TY - GEN A1 - Kapuścik, Paulina A1 - Wojcieszak, Damian A1 - Pokora, Patrycja A1 - Mańkowska, Ewa A1 - Domaradzki, Jarosław A1 - Mazur, Michał A1 - Mazur, Piotr A1 - Kosto, Yuliia A1 - Morales, Carlos A1 - Kot, Małgorzata A1 - Flege, Jan Ingo T1 - Low temperature hydrogen sensor with high sensitivity based on CeOx thin film T2 - Sensors and Actuators B: Chemical N2 - In this work, a 500 nm-thick cerium oxide thin film was prepared by electron beam evaporation. It was found that the deposition of 7 nm thick Pd catalyst was required for obtaining a sensor response to hydrogen. The Pd/CeOx sensing structure has a high response of 5000 towards 25 ppm H2 at a working temperature of 200 °C and exhibits a sensor response of 1.3 at temperatures near ambient. Furthermore, the sensing structure exhibited excellent response/recovery kinetics. The results confirm that the CeOx-based materials are a promising material for the fabrication of room-temperature hydrogen sensors. KW - Cerium oxide KW - Thin film KW - Hydrogen sensing KW - Low operating temperature Y1 - 2024 U6 - https://doi.org/10.1016/j.snb.2024.136148 SN - 0925-4005 VL - 417 PB - Elsevier BV ER -