TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms10078 SN - 2041-1723 IS - 6 SP - 10078 ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - GEN A1 - Kolkovsky, Vladimir A1 - Stübner, R. A1 - Langa, Sergiu A1 - Wende, U. A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique T2 - Solid-State Electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.sse.2016.06.005 SN - 0038-1101 VL - 123 SP - 89 EP - 95 ER - TY - GEN A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - A novel electrostatic actuator class T2 - Procedia Engineering Y1 - 2016 U6 - https://doi.org/10.1016/j.proeng.2016.11.454 SN - 1877-7058 VL - 168 SP - 1533 EP - 1536 ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A novel electrostatic micro-actuator class and its application potential for optical MEMS T2 - 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings Y1 - 2016 SN - 978-1-5090-1036-3 U6 - https://doi.org/10.1109/OMN.2016.7565867 SP - Tu 3.11-1 EP - Tu 3.11-2 PB - IEEE CY - Piscataway, NJ ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Langa, Sergiu A1 - Kaiser, Bert T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T2 - MEMS transducer for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2015 ER - TY - CHAP A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Stolz, Michael A1 - Arscott, S. A1 - Conrad, Holger A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatic bending actuators with liquid filled nanometer scale gap T2 - MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017 Y1 - 2017 UR - http://ieeexplore.ieee.org/document/7863369/ SN - 978-1-5090-5078-9 SN - 978-1-5090-5079-6 SP - 175 EP - 178 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A contribution to the expansion of the applicability of electrostatic forces in micro transducers T2 - MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States Y1 - 2017 SN - 978-1-5106-0674-6 SN - 978-1-5106-0673-9 U6 - https://doi.org/10.1117/12.2249575 PB - SPIE CY - Bellingham, Washington, USA ER - TY - GEN A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive T2 - Microsystem Technologies Y1 - 2017 U6 - https://doi.org/10.1007/s00542-017-3360-6 SN - 1432-1858 VL - 23 IS - 1 SP - 5697 EP - 5708 ER - TY - GEN A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically driven in-plane silicon micropump for modular configuration T2 - Micromachines N2 - In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina. KW - micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS Y1 - 2018 U6 - https://doi.org/10.3390/mi9040190 SN - 2072-666X VL - 9 IS - 4 ER - TY - CHAP A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schenk, Harald T1 - CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators T2 - MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017 Y1 - 2017 SN - 978-3-8007-4491-6 SP - 219 EP - 222 PB - VDE-Verlag CY - Berlin [u.a.] ER -