TY - THES A1 - Kahle, Olaf T1 - Einsatzmöglichkeiten und Grenzen der temperaturvariablen Ellipsometrie zur thermophysikalischen Charakterisierung polymerer Schichten KW - Temperaturvariable Ellipsometrie KW - dünne Schichten KW - Methodenentwicklung KW - Polymere Y1 - 2002 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-000000266 PB - Brandenburgische Techn. Univ. CY - Cottbus ER - TY - CHAP A1 - Kahle, Olaf A1 - Uhlig, C. A1 - Bauer, Monika T1 - VTE - A new Method for Characterisation of Thin Film Properties T2 - Proceedings presented at POLYTRONIC 2001, Potsdam, Germany, October 21 - 24, 2001 Y1 - 2001 SN - 0-7803-7220-4 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - CHAP A1 - Uhlig, C. A1 - Kahle, Olaf A1 - Wieneke, B. A1 - Bauer, Monika A1 - Keller, Jürgen T1 - Optical Crack Tracing : a New Method for the Automatic Determination of Fracture Toughness for Crack Initiation and Propagation T2 - Proceedings, MICROMAT 2000, April 17-19, 2000, Berlin, Germany Y1 - 2001 SN - 3-932434-15-3 SP - 618 EP - 629 PB - ddp goldenbogen CY - Dresden ER - TY - JOUR A1 - Schulze, Knut A1 - Schuldt, U. A1 - Kahle, Olaf A1 - Schulz, Stefan E. A1 - Uhlig, M. T1 - Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization Y1 - 2005 U6 - https://doi.org/10.1016/j.mee.2005.07.016 ER - TY - GEN A1 - Uhlig, C. A1 - Kahle, Olaf A1 - Bauer, Monika T1 - Toughening of Reactive Resins by Phase Separation and by Particles and Measuring Fracture Toughness by Optical Crack Tracing T2 - Micromaterials and Nanomaterials Y1 - 2005 SN - 1619-2486 IS - 4 ER - TY - CHAP A1 - Bauer, Monika A1 - Dreyer, Christian A1 - Kahle, Olaf A1 - Schuldt, U. A1 - Uhlig, C. A1 - Schulze, K. A1 - Schulz, Stefan E. A1 - Uhlig, M. A1 - Geßner, Thomas T1 - Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization Y1 - 2006 ER - TY - JOUR A1 - Kahle, Olaf A1 - Bauer, Monika T1 - Von der Ellipsometrie zur Nano-TMA/TGA/DVS: Methode und Anwendungen Y1 - 2007 UR - http://www.leibniz-institut.de/cms/pdf_pub/kahle_bauer_27_09_07.pdf ER - TY - JOUR A1 - Kahle, Olaf A1 - Uhlig, C. A1 - Bauer, Monika T1 - Thermophysical Characterisation of Sub-%B5m Polymer Layers by Nano-TMA/TGA/DVS Y1 - 2007 ER - TY - JOUR A1 - Kahle, Olaf A1 - Uhlig, C. A1 - Bauer, Monika T1 - The Advancement of Ellipsometry to the Nano-TMA/TGA/DVS - Method and Applications Y1 - 2007 ER - TY - CHAP A1 - Kahle, Olaf A1 - Uhlig, C. A1 - Bauer, Monika T1 - Die Weiterentwicklung der Ellipsometrie zur Nano-TMA/TGA/DVS - Methode und Anwendungen T2 - NanoScience 2007, Lichtenwalde, 18.-20.10.2007 Y1 - 2007 PB - Fraunhofer-Inst. IZM, Micro Materials Center [u.a.] CY - Berlin ER - TY - GEN A1 - Uhlig, C. A1 - Bauer, Jakob A1 - Bauer, Monika A1 - Kahle, Olaf T1 - Influence of Conversion on Fracture Behavior and Thermophysical Properties of Model Networks and some Aspects of Toughening Thermosetting Resins Y1 - 2009 ER - TY - CHAP A1 - Kahle, Olaf A1 - Bauer, Monika T1 - The Calcium-Test - Some New Insights Concerning the Measured Permeation Values T2 - Thermosets 2009, Program and Additional Abstracts Y1 - 2009 SP - 25 EP - 26 ER - TY - CHAP A1 - Uhlig, C. A1 - Kahle, Olaf A1 - Bauer, Monika A1 - Keller, Jürgen T1 - Optical Crack Tracing (OCT) - An Efficient Tool both for Elastic and Elastic-Plastic Fracture Mechanical Testing T2 - Thermosets 2009, Program and Additional Abstracts Y1 - 2009 SP - 21 EP - 23 ER - TY - CHAP A1 - Kahle, Olaf A1 - Bauer, Monika T1 - The Ca-Test Revisited Y1 - 2010 ER -