TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Das, Chittaranjan A1 - Brizzi, Simone A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Schmeißer, Dieter T1 - Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition T2 - Surface and Coatings Technology N2 - A comparative study of thin titanium oxynitride (TiOxNy) films prepared by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium (TDMAT) and N2 plasma as well as titanium(IV)isopropoxide and NH3 plasma is reported. The comparison is based on the combination of Ti2p core level and valence band spectroscopy and current-voltage measurements. The TDMAT/N2 process delivers generally higher fractions of TiN and TiON within the Ti2p spectra of the films and stronger photoemissions within the bandgap as resolved in detail by high energy resolution synchrotron-based spectroscopy. In particular, it is shown that higher TiN contributions and in-gap emission intensities correlate strongly with increased leakage currents within the films and might be modified by the process parameters and precursor selection. KW - Titanium oxynitride KW - Plasma enhanced atomic layer deposition (PEALD) KW - ALD process parameters KW - Ti-N contributions KW - In-gap defect states KW - Leakage current Y1 - 2017 U6 - https://doi.org/10.1016/j.surfcoat.2016.11.094 SN - 0257-8972 SN - 1879-3347 VL - 324 SP - 586 EP - 593 ER -