TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER -