TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Eremin, Denis A1 - Brinkmann, Ralf Peter A1 - Schulze, Julian A1 - Schuengel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Peter A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas T2 - Physics of Plasmas Y1 - 2016 U6 - https://doi.org/10.1063/1.4953432 SN - 1070-664X SN - 1089-7674 VL - 23 IS - 6 SP - 063514 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Schulze, Julian A1 - Brinkmann, Ralf Peter A1 - Donkó, Zoltan A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Electron dynamics in low pressure capacitively coupled radio frequency discharges T2 - Journal of Applied Physics Y1 - 2020 U6 - https://doi.org/10.1063/5.0003114.1 VL - 127 IS - 18 ER - TY - GEN A1 - Schmidt, Frederik A1 - Trieschmann, Jan A1 - Gergs, Tobias A1 - Mussenbrock, Thomas T1 - A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits T2 - Journal of Applied Physics Y1 - 2019 U6 - https://doi.org/10.1063/1.5091965 SN - 1089-7550 SN - 0021-8979 VL - 125 IS - 17 SP - 173106 ER - TY - GEN A1 - Krüger, Florian A1 - Gergs, Tobias A1 - Trieschmann, Jan T1 - Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations T2 - Plasma Sources Science and Technology Y1 - 2019 U6 - https://doi.org/10.1088/1361-6595/ab0246 SN - 1361-6595 SN - 0963-0252 VL - 28 IS - 3 ER - TY - GEN A1 - Schmidt, Frederik A1 - Schulze, Julian A1 - Johnson, Erik A1 - Booth, Jean-Paul A1 - Keil, Douglas A1 - French, David M. A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Multi Frequency Matching for Voltage Waveform Tailoring T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aad2cd SN - 0963-0252 SN - 1361-6595 VL - 27 IS - 9 ER -