TY - GEN A1 - Kirchheim, Dennis A1 - Wilski, Stefan A1 - Jaritz, Montgomery A1 - Mitschker, Felix A1 - Oberberg, Moritz A1 - Trieschmann, Jan A1 - Banko, Lars A1 - Brochhagen, Markus A1 - Schreckenberg, Rabea A1 - Hopmann, Christian A1 - Böke, Marc A1 - Benedikt, Jan A1 - Arcos, Teresa de los A1 - Grundmeier, Guido A1 - Grochla, Dario A1 - Ludwig, Alfred A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Awakowicz, Peter A1 - Dahlmann, Rainer T1 - Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD T2 - Journal of Coatings Technology and Research Y1 - 2018 U6 - https://doi.org/10.1007/s11998-018-0138-4 SN - 1547-0091 SN - 1935-3804 VL - 16 IS - 2 SP - 573 EP - 583 ER - TY - GEN A1 - Trieschmann, Jan T1 - Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering T2 - Contributions to Plasma Physics Y1 - 2018 U6 - https://doi.org/10.1002/ctpp.201700062 SN - 1521-3986 VL - 58 IS - 5 SP - 394 EP - 403 ER - TY - GEN A1 - Krüger, Dennis A1 - Trieschmann, Jan A1 - Brinkmann, Ralf Peter T1 - Scattering of magnetized electrons at the boundary of low temperature plasmas T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aaaa85 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 2 SP - ID 025011 ER - TY - GEN A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Bibinov, Nikita A1 - Awakowicz, Peter A1 - Mráz, Stanislav A1 - Schneider, Jochen M. A1 - Mussenbrock, Thomas T1 - Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aac23e VL - 27 IS - 5 ER - TY - GEN A1 - Schmidt, Frederik A1 - Mussenbrock, Thomas A1 - Trieschmann, Jan T1 - Consistent Simulation of Capacitive Radio-Frequency Discharges and External Matching Networks T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aae429 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 10 ER - TY - GEN A1 - Schmidt, Frederik A1 - Schulze, Julian A1 - Johnson, Erik A1 - Booth, Jean-Paul A1 - Keil, Douglas A1 - French, David M. A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Multi Frequency Matching for Voltage Waveform Tailoring T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aad2cd SN - 0963-0252 SN - 1361-6595 VL - 27 IS - 9 ER - TY - GEN A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Bandgap Analysis of Plasma Photonic Crystals T2 - Journal of Applied Physics Y1 - 2018 U6 - https://doi.org/10.1063/1.5055282 SN - 0021-8979 SN - 1089-7550 VL - 124 IS - 17 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Donko, Zoltan A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Disparity between current and voltage driven capacitively coupled radio frequency discharges T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aae5c1 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 12 ER -