TY - GEN A1 - Kirchheim, Dennis A1 - Wilski, Stefan A1 - Jaritz, Montgomery A1 - Mitschker, Felix A1 - Oberberg, Moritz A1 - Trieschmann, Jan A1 - Banko, Lars A1 - Brochhagen, Markus A1 - Schreckenberg, Rabea A1 - Hopmann, Christian A1 - Böke, Marc A1 - Benedikt, Jan A1 - Arcos, Teresa de los A1 - Grundmeier, Guido A1 - Grochla, Dario A1 - Ludwig, Alfred A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Awakowicz, Peter A1 - Dahlmann, Rainer T1 - Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD T2 - Journal of Coatings Technology and Research Y1 - 2018 U6 - https://doi.org/10.1007/s11998-018-0138-4 SN - 1547-0091 SN - 1935-3804 VL - 16 IS - 2 SP - 573 EP - 583 ER - TY - GEN A1 - Trieschmann, Jan A1 - Schmidt, Frederik A1 - Mussenbrock, Thomas T1 - Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges T2 - Plasma Processes and Polymers Y1 - 2017 U6 - https://doi.org/10.1002/ppap.201600140 SN - 1612-8869 VL - 14 IS - 1-2 SP - 1600140 ER - TY - GEN A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas T2 - Plasma Sources Science and Technolgy Y1 - 2017 U6 - https://doi.org/10.1088/1361-6595/aa51f2 SN - 1361-6595 SN - 0963-0252 VL - 26 IS - 2 SP - 024004 ER - TY - GEN A1 - Eremin, Denis A1 - Bienholz, Stefan A1 - Szeremley, Daniel A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Awakowicz, Peter A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter T1 - On the Physics of a Large CCP Discharge T2 - Plasma Sources Science and Technology Y1 - 2016 U6 - https://doi.org/10.1088/0963-0252/25/2/025020 SN - 1361-6595 SN - 0963-0252 VL - 25 IS - 2 SP - 025020 ER - TY - GEN A1 - Dirkmann, Sven A1 - Ziegler, Martin A1 - Hansen, Mirko A1 - Kohlstedt, Hermann A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4936107 SN - 1089-7550 SN - 0021-8979 VL - 118 IS - 21 SP - 214501 ER - TY - GEN A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Transport of Sputtered Particles in Capacitive Sputter Sources T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4926878 SN - 1089-7550 SN - 0021-8979 VL - 118 IS - 3 SP - 033302 ER - TY - GEN A1 - Gallian, Sara A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Hitchon, William N. G. T1 - Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4905943 SN - 1089-7550 SN - 0021-8979 VL - 117 IS - 2 SP - 023305 ER - TY - CHAP A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Brinkmann, Ralf Peter A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Confinement of highly energetic electron beams in low pressure capacitive discharges T2 - Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey Y1 - 2015 SN - 978-1-4799-6974-6 U6 - https://doi.org/10.1109/PLASMA.2015.7179545 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Paul A1 - Donkó, Zoltán T1 - Hysteresis effects and confinement of beam electrons in capacitive discharges T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534342 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Daksha, Manaswi A1 - Derzsi, Aranka A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Donkó, Zoltán A1 - Schulze, Julian T1 - The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs T2 - Plasma Sources Science and Technology Y1 - 2017 U6 - https://doi.org/10.1088/1361-6595/aa7c88 SN - 1361-6595 SN - 0963-0252 VL - 26 IS - 8 SP - 085006 ER - TY - GEN A1 - Layes, Vincent A1 - Monje, Sascha A1 - Corbella, Carles A1 - Trieschmann, Jan A1 - Arcos, Teresa de los A1 - Keudell, Achim von T1 - Species transport on the target during high power impulse magnetron sputtering T2 - Applied Physics Letters Y1 - 2017 U6 - https://doi.org/10.1063/1.4976999 SN - 1077-3118 VL - 110 IS - 8 ER - TY - GEN A1 - Trieschmann, Jan A1 - Hegemann, Dirk T1 - Plasma polymerization at different positions in an asymmetric ethylene discharge T2 - Journal of Physics : D, Applied physics Y1 - 2011 U6 - https://doi.org/10.1088/0022-3727/44/47/475201 SN - 0022-3727 VL - 44 ER - TY - GEN A1 - Trieschmann, Jan A1 - Xiao, Shumin A1 - Prokopeva, Ludmila J. A1 - Drachev, Vladimir P. A1 - Kildishev, Alexander V. T1 - Experimental retrieval of the kinetic parameters of a dye in a solid film T2 - Optics Express Y1 - 2011 U6 - https://doi.org/10.1364/OE.19.018253 SN - 1094-4087 VL - 19 IS - 19 SP - 18253 EP - 18259 ER - TY - GEN A1 - Schmidt, Frederik A1 - Trieschmann, Jan A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Nonlinear interaction of capacitive discharges and power matching networks T2 - Bulletin of the American Physical Society Y1 - 2017 SN - 0003-0503 N1 - 70th Annual Gaseous Electronics Conference, Monday–Friday, November 6–10, 2017, Pittsburgh, Pennsylvania VL - 62 IS - 10 ER - TY - GEN A1 - Krüger, Dennis A1 - Trieschmann, Jan A1 - Brinkmann, Ralf Peter T1 - Scattering of magnetized electrons at the boundary of low temperature plasmas T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aaaa85 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 2 SP - ID 025011 ER - TY - GEN A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Bibinov, Nikita A1 - Awakowicz, Peter A1 - Mráz, Stanislav A1 - Schneider, Jochen M. A1 - Mussenbrock, Thomas T1 - Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aac23e VL - 27 IS - 5 ER - TY - GEN A1 - Trieschmann, Jan T1 - Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering T2 - Contributions to Plasma Physics Y1 - 2018 U6 - https://doi.org/10.1002/ctpp.201700062 SN - 1521-3986 VL - 58 IS - 5 SP - 394 EP - 403 ER - TY - GEN A1 - Schmidt, Frederik A1 - Mussenbrock, Thomas A1 - Trieschmann, Jan T1 - Consistent Simulation of Capacitive Radio-Frequency Discharges and External Matching Networks T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aae429 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 10 ER - TY - GEN A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Bandgap Analysis of Plasma Photonic Crystals T2 - Journal of Applied Physics Y1 - 2018 U6 - https://doi.org/10.1063/1.5055282 SN - 0021-8979 SN - 1089-7550 VL - 124 IS - 17 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Donko, Zoltan A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Disparity between current and voltage driven capacitively coupled radio frequency discharges T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aae5c1 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 12 ER - TY - GEN A1 - Zahari, Finn A1 - Schlichting, Felix A1 - Strobel, Julian A1 - Dirkmann, Sven A1 - Cipo, Julia A1 - Gauter, Sven A1 - Trieschmann, Jan A1 - Marquardt, Richard A1 - Haberfehlner, Georg A1 - Kothleitner, Gerald A1 - Kienle, Lorenz A1 - Mussenbrock, Thomas A1 - Ziegler, Martin A1 - Kersten, Holger A1 - Kohlstedt, Hermann T1 - Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices T2 - Journal of Vacuum Science & Technology Y1 - 2019 U6 - https://doi.org/10.1116/1.5119984 SN - 1520-8559 VL - 37 IS - 6 SP - 061203 ER - TY - GEN A1 - Wright Larsen, Axel A1 - Korsholm, Søren Bang A1 - Gonçalves, B. A1 - Gutierrez, H. E. A1 - Henriques, E. A1 - Infante, V. A1 - Jensen, T. A1 - Jessen, M. A1 - Klinkby, E. B. A1 - Nonbøl, E. A1 - Luis, R. A1 - Vale, A. A1 - Lopes, A. A1 - Naulin, V. A1 - Nielsen, S. K. A1 - Salewski, M. A1 - Rasmussen, J. A1 - Taormina, A. A1 - Møllsøe, C. A1 - Mussenbrock, Thomas A1 - Trieschmann, Jan T1 - Mitigation of EC breakdown in the gyrotron transmission line of the ITER Collective Thomson Scattering diagnostic via a Split Biased Waveguide T2 - Journal of Instrumentation Y1 - 2019 U6 - https://doi.org/10.1088/1748-0221/14/11/C11009 SN - 1748-0221 VL - 14 ER - TY - GEN A1 - Klich, Maximilian A1 - Wilczek, Sebastian A1 - Janssen, Jesper Frederikus Jacobus A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas A1 - Trieschmann, Jan T1 - Ion dynamics in capacitively coupled argon–xenon discharges T2 - Plasma Sources Science and Technology Y1 - 2021 U6 - https://doi.org/10.1088/1361-6595/ac02b0 SN - 1361-6595 VL - 30 IS - 6 ER - TY - GEN A1 - Liu, Yue A1 - Korolov, Ihor A1 - Trieschmann, Jan A1 - Steuer, David A1 - Schulz-von der Gathen, Volker A1 - Böke, Marc A1 - Bischoff, Lena A1 - Hübner, Gerrit A1 - Schulze, Julian A1 - Mussenbrock, Thomas T1 - Micro Atmospheric Pressure Plasma Jets Excited in He/O2 by Voltage Waveform Tailoring: A Study Based on a Numerical Hybrid Model and Experiments T2 - Plasma Sources Science and Technology Y1 - 2021 U6 - https://doi.org/10.1088/1361-6595/abd0e0 SN - 1361-6595 VL - 30 IS - 6 SP - 1 EP - 30 ER - TY - GEN A1 - Liu, Yue A1 - Trieschmann, Jan A1 - Berger, Birk A1 - Schulze, Julian A1 - Mussenbrock, Thomas T1 - Non-Linear Effects and Electron Heating Dynamics in Radio-Frequency Capacitively Coupled Plasmas with a Non-Uniform Transverse Magnetic Field T2 - Physics of Plasmas Y1 - 2021 U6 - https://doi.org/10.1063/5.0045947 SN - 1089-7674 VL - 28 IS - 5 ER - TY - GEN A1 - Trieschmann, Jan A1 - Wright Larsen, Axel A1 - Mussenbrock, Thomas A1 - Korsholm, Søren Bang T1 - Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic T2 - Physics of Plasmas Y1 - 2021 U6 - https://doi.org/10.1063/5.0055461 SN - 1089-7674 VL - 28 IS - 8 ER - TY - GEN A1 - Gergs, Tobias A1 - Borislavov, Borislav A1 - Trieschmann, Jan T1 - Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks T2 - Journal of Vacuum Science & Technology. B N2 - Simulations of thin film sputter deposition require the separation of the plasma and material transport in the gas phase from the growth/sputtering processes at the bounding surfaces (e.g., substrate and target). Interface models based on analytic expressions or look-up tables inherently restrict this complex interaction to a bare minimum. A machine learning model has recently been shown to overcome this remedy for Ar ions bombarding a Ti-Al composite target. However, the chosen network structure (i.e., a multilayer perceptron, MLP) provides approximately 4×106 degrees of freedom, which bears the risk of overfitting the relevant dynamics and complicating the model to an unreliable extent. This work proposes a conceptually more sophisticated but parameterwise simplified regression artificial neural network for an extended scenario, considering a variable instead of a single fixed Ti-Al stoichiometry. A convolutional 𝛽-variational autoencoder is trained to reduce the high-dimensional energy-angular distribution of sputtered particles to a low-dimensional latent representation with only two components. In addition to a primary decoder that is trained to reconstruct the input energy-angular distribution, a secondary decoder is employed to reconstruct the mean energy of incident Ar ions as well as the present Ti-Al composition. The mutual latent space is hence conditioned on these quantities. The trained primary decoder of the variational autoencoder network is subsequently transferred to a regression network, for which only the mapping to the particular low-dimensional space has to be learned. While obtaining a competitive performance, the number of degrees of freedom is drastically reduced to 15 111 (0.378% of the MLP) and 486 (0.012% of the MLP) parameters for the primary decoder and the remaining regression network, respectively. The underlying methodology is very general and can easily be extended to more complex physical descriptions (e.g., taking into account dynamical surface properties) with a minimal amount of data required. Y1 - 2022 U6 - https://doi.org/10.1116/6.0001485 SN - 2166-2754 VL - 40 IS - 1 SP - 012802-1 EP - 012802-15 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Brinkmann, Ralf Peter A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges T2 - Plasma Sources Science and Technology Y1 - 2015 U6 - https://doi.org/10.1088/0963-0252/24/2/024002 SN - 0963-0252 SN - 1361-6595 VL - 24 IS - 2 SP - 024002 ER - TY - CHAP A1 - Gallian, Sara A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Hitchon, William N. G. A1 - Brinkmann, Ralf Peter T1 - Analytic model of the energy distribution for energetic electrons in HiPIMS T2 - 2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey Y1 - 2015 SN - 978-1-4799-6974-6 U6 - https://doi.org/10.1109/PLASMA.2015.7179892 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Bobzin, Kirsten A1 - Bagcivan, Nazlim A1 - Theiß, Sebastian A1 - Trieschmann, Jan A1 - Brugnara, Ricardo Henrique A1 - Preissing, Sven A1 - Hecimovic, Ante T1 - Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties T2 - Journal of Vacuum Science & Technology A Y1 - 2014 U6 - https://doi.org/10.1116/1.4865917 SN - 1520-8559 VL - 32 IS - 2 SP - 021513 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Eremin, Denis A1 - Brinkmann, Ralf Peter A1 - Schulze, Julian A1 - Schuengel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Peter A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas T2 - Physics of Plasmas Y1 - 2016 U6 - https://doi.org/10.1063/1.4953432 SN - 1070-664X SN - 1089-7674 VL - 23 IS - 6 SP - 063514 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Schulze, Julian A1 - Brinkmann, Ralf Peter A1 - Donkó, Zoltan A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Electron dynamics in low pressure capacitively coupled radio frequency discharges T2 - Journal of Applied Physics Y1 - 2020 U6 - https://doi.org/10.1063/5.0003114.1 VL - 127 IS - 18 ER - TY - GEN A1 - Schmidt, Frederik A1 - Trieschmann, Jan A1 - Gergs, Tobias A1 - Mussenbrock, Thomas T1 - A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits T2 - Journal of Applied Physics Y1 - 2019 U6 - https://doi.org/10.1063/1.5091965 SN - 1089-7550 SN - 0021-8979 VL - 125 IS - 17 SP - 173106 ER - TY - GEN A1 - Krüger, Florian A1 - Gergs, Tobias A1 - Trieschmann, Jan T1 - Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations T2 - Plasma Sources Science and Technology Y1 - 2019 U6 - https://doi.org/10.1088/1361-6595/ab0246 SN - 1361-6595 SN - 0963-0252 VL - 28 IS - 3 ER - TY - GEN A1 - Schmidt, Frederik A1 - Schulze, Julian A1 - Johnson, Erik A1 - Booth, Jean-Paul A1 - Keil, Douglas A1 - French, David M. A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Multi Frequency Matching for Voltage Waveform Tailoring T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aad2cd SN - 0963-0252 SN - 1361-6595 VL - 27 IS - 9 ER -