TY - CHAP A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Torashima, Kazutoshi A1 - Wygant, Ira O. A1 - Khuri-Yakub, Butrus T. T1 - CMUT fabrication based on a thick buried oxide layer T2 - IEEE International Ultrasonics Symposium proceedings Y1 - 2010 SN - 978-1-4577-0381-2 SP - 547 EP - 550 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Wygant, Ira O. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Design, Fabrication, and Design Verification of 50-kHz CMUTs for High-Intensity Airborne Ultrasound T2 - 20th International Congress on Acoustics 2010 (ICA 2010), Sydney, Australia, 23 - 27 August 2010, Vol. 2 Y1 - 2010 PB - Curran CY - Red Hook, NY ER - TY - CHAP A1 - Wygant, Ira O. A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - Deriving a simulation model of a single 40-kHz CMUT cell from impedance and interferometer measurements Y1 - 2010 ER -