TY - CHAP A1 - Schenk, Harald A1 - Hornbeck, L. J. ED - Waser, Rainer T1 - Micro Mirrors T2 - Nanoelectronics and information technology : advanced electronic materials and novel devices Y1 - 2012 SN - 978-3-527-40927-3 SP - 985 EP - 999 PB - Wiley-VCH-Verlag CY - Weinheim ER -