TY - GEN A1 - Müller, Klaus A1 - Bär, Werner A1 - Henkel, Karsten A1 - Jahnke, Agnes A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Organische Feldeffekttransistoren als Transducer in der Biosensorik T1 - Organic Field Effect Transistors as Biosensors T2 - Technisches Messen N2 - In diesem Beitrag wird der Einsatz neuartiger Sensortypen für die medizinische Diagnostik beschrieben. Diese Sensoren sollen komplett organisch sein und auf dem Prinzip des Feldeffekttransistors basieren. Als Modellsystem für die Anwendung in der Biosensorik soll die Einsatzmöglichkeit dieser Sensoren in der nicht-invasiven Diagnostik der Helicobacter-pylori-Infektion überprüft werden. N2 - In this contribution we describe the investigation of new types of sensors in medical diagnosis. These sensors are completely organic and are based on the principle of organic field effect transistors. As model system for application in medical diagnosis we test the usability of this sensors for the diagnosis of helicobacter pylori. KW - Feldeffekttransistor KW - Biosensorik KW - Helicobacter pylori KW - Field effect transistors KW - biosensors KW - helicobacter pylori Y1 - 2003 U6 - https://doi.org/10.1524/teme.70.12.565.20261 SN - 0171-8096 VL - 70 IS - 12 SP - 565 EP - 568 ER - TY - GEN A1 - Kot, Małgorzata A1 - Łobaza, Justyna A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study T2 - Journal of Vacuum Science and Technology A N2 - The surface oxidation of a titanium oxynitride (TiOxNy) film after long-time storage of 25 month in ambient conditions is investigated. The TiOxNy film is prepared by plasma-enhanced atomic layer deposition using etrakis(dimethylamino)titanium and nitrogen plasma, and the film is characterized by Ar+ ion sputtering of the film surface in combination with x-ray photoelectron spectroscopy (XPS) as well as by angle-resolved XPS. The total thickness of an oxygen-enriched layer at the surface of the TiOxNy films is found to be about 0.7 nm and it consists of a sequence of a 0.4 nm thick TiON/TiO2 enriched layer followed by a 0.3 nm thick TiO2 enriched layer underneath compared to the bulk composition of the film which shows constant values of 29% TiN, 29% TiO2, and 42% TiON. The results suggest that the TiON enrichment takes place initially at the surface followed by a surface and subsurface oxidation. KW - atomic layer deposition (ALD) KW - surface oxidation KW - X-Ray photoelectron spectroscopy (XPS) KW - titanium oxynitride Y1 - 2018 U6 - https://doi.org/10.1116/1.5003356 SN - 0734-2101 SN - 1520-8559 VL - 36 IS - 1 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten T1 - Intrinsic defects and multiple-atom processes in the oxidic semiconductor Ga₂O₃ T2 - Journal of Applied Physics N2 - We report on the electronic structure of gallium oxide (Ga₂O₃) single crystals as studied by resonant photoelectron spectroscopy (resPES). We identify intrinsic electronic defects that are formed by mixed-atomic valence states. We differentiate three coexisting defect states that differ in their electronic correlation energy and their spatial localization lengths. Their relative abundance is described by a fractional ionicity with covalent and ionic bonding contributions. For Ga₂O₃, our analyses of the resPES data enable us to derive two main aspects: first, experimental access is given to determine the ionicity based on the original concepts of Pauling and Phillips. Second, we report on multi-atomic energy loss processes in the Ga2p core level and X-ray absorption data. The two experimental findings can be explained consistently in the same context of mixed-atomic valence states and intrinsic electronic defects. KW - resonat photoelectron spectroscopy (resPES) KW - X-Ray absorption KW - gallium oxide (Ga₂O₃) KW - intrinsic electronic defects KW - band scheme Y1 - 2018 U6 - https://doi.org/10.1063/1.5010740 SN - 0021-8979 SN - 1089-7550 VL - 123 IS - 16 SP - 161596-1 EP - 161596-9 ER - TY - CHAP A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Schmeißer, Dieter T1 - One-Pot Synthesis of Copper Oxide Nanowires and PVDF/CuO Composite Films for Piezoelectric Energy Harvesting Application T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Band 53,3 N2 - Copper oxide (CuO) is an attractive p-type oxide semiconductor with narrow band gap that has intriguing properties such as non-toxicity, chemical stability, electrocatalytic activity, abundant availability and low production cost. Polymeric materials have attracted great interest owing to their high flexibility, light weight, low cost production and high resistance against corrosion. Poly(vinylidene fluoride) (PVDF) is a commonly used piezoelectric polymer due to its excellent flexibility and piezoelectric properties. In this work, we adopted a one-pot synthesis of CuO nanowires by facile and selective chemical etching process of Cu substrate. XPS, XRD, SEM data ascribed the formation of polycrystalline CuO nanowires over the entire Cu surface. It has been observed that the uniformity, shape and size of the nanowires could be conveniently controlled by etching time and etchant concentration. We have also prepared piezoelectric nanogenerator based on the flexible PVDF/CuO composite film, where the traditional electrical poling treatment was avoided. In addition, dielectric properties have been studied to demonstrate the role of interfacial polarization. KW - PVDF KW - electroactive phase KW - nanogenerators KW - energy storage Y1 - 2018 UR - https://www.dpg-verhandlungen.de/year/2018/conference/berlin/part/cpp/session/20/contribution/21 SN - 0420-0195 SP - S. 135 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Kot, Małgorzata A1 - Naumann, Franziska A1 - Garain, Samiran A1 - Poźarowska, Emilia A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Aluminum nitride films prepared by plasma atomic layer deposition using different plasma sources T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Band 53,3 N2 - Aluminum nitride (AlN) thin films are promising for versatile applications in optoelectronics, electronics, piezoelectrics, and acoustics due to their remarkable properties such as wide band gap, high dielectric constant, low electrical conductivity, good piezoelectric coefficient and high ultrasonic velocity. We present a comparative study of AlN films grown by plasma-enhanced atomic layer deposition at 350°C silicon wafers in the SENTECH SI ALD LL system using TMA and NH3 where either a capacitively coupled plasma (CCP) or a direct PTSA (planar triple spiral antenna) source was applied. The films were characterized by ellipsometry, XPS and electrical measurements. The layer properties are discussed concerning the varied ALD process parameters. In general, the process using the direct PTSA source delivered films with higher refractive index and better homogeneity over the wafer achieving also higher growth rates per cycle (GPC) in reduced total cycle durations. Films with refractive index in the range of 2.05 and permittivity around 8 could be realized with a GPC of 1.54 Å/cycle. KW - Aluminium nitride KW - plasma-enhanced atomic layer deposition (PEALD) KW - ellispsometry KW - field emission scanning electron microscopy KW - atomic force microscopy KW - X-ray photoelectron spectroscopy KW - electrical characterization Y1 - 2018 SN - 0420-0195 SP - S. 170 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Garain, Samiran A1 - Sen, Shrabanee A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Enhancement of Electroactive β-phase and Superior Dielectric Properties in Cerium Based Poly(vinylidene fluoride) Composite Films T2 - Materials Today: proceedings N2 - In this work we report on the preparation of poly(vinylidene fluoride) (PVDF) films with various mass fractions (wt%) of hydrated rare earth metal salt [(NH4)4Ce(SO4)4.2H2O] (CAS) and its electroactive phase (β- and γ-phase) formation. It was found that CAS can yield high amount of electroactive phases in PVDF. Compared to the neat PVDF film, a significantly increment of dielectric constant (ε ∼ 41) and a low loss factor (tan δ ∼ 0.8) were observed in the PVDF-CAS composite films. Thus the PVDF-CAS composite films with high electroactive phase and superior dielectric properties may meet the requirements of next generation electronic components. KW - PVDF KW - High amount of electroactive phase KW - Superior dielectric properties Y1 - 2018 U6 - https://doi.org/10.1016/j.matpr.2017.11.003 SN - 2214-7853 VL - 5 IS - 3 part 3 SP - 10084 EP - 10090 ER - TY - CHAP A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Richter, Matthias A1 - Tallarida, Massimo A1 - Schmeißer, Dieter ED - Wandelt, Klaus T1 - An (In Situ)² Approach: ALD and resPES Applied to Al₂O₃, HfO₂, and TiO₂ Ultrathin Films T2 - Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry, Vol. 3.1 N2 - Oxide surface coatings are of importance in tailoring interface properties with respect to surface passivation, adjustment of surface potentials, or providing active centers for surface reactions. In this contribution, we report about surface coatings prepared by the atomic layer deposition (ALD) method. ALD is known for its conformal growth of ultrathin, dense films which exhibit a low concentration of pinholes. KW - Atomic layer deposition (ALD) KW - Resonant photoelectron spectroscopy (resPES) KW - Band scheme KW - Partial density of states (pDOS) KW - Intrinsic charges KW - Intrinsic defects KW - Aluminum oxide (Al₂O₃) KW - Hafnium oxide (HfO₂) KW - Titanium oxide(TiO₂) Y1 - 2018 SN - 978-0-12-809739-7 SN - 978-0-12-809894-3 U6 - https://doi.org/10.1016/B978-0-12-409547-2.13852-1 SP - 18 EP - 26 PB - Elsevier CY - Oxford ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Kot, Małgorzata A1 - Corrêa, Silma Alberton A1 - Das, Chittaranjan A1 - Henkel, Karsten ED - Wandelt, Klaus T1 - Interface Potentials, Intrinsic Defects, and Passivation Mechanisms in Al₂O₃, HfO₂, and TiO₂ Ultrathin Films T2 - Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry, vol. 3.1 N2 - We study the electronic structure of ultrathin Al₂O₃, HfO₂, and TiO₂ ALD films by resonant photoelectron spectroscopy. We identify intrinsic defects which are responsible for the active sites in interface reactions, for the incorporation of intrinsic charges, and for the formation of local dipole momenta. All of these features determine the surface potentials and the reactivity of the surface of the atomic layer deposition coated systems. We give examples of charges and dipoles in Al₂O₃, on a study of the surface potentials in HfO₂, and relate the intrinsic defects in TiO₂ to their electrochemical relevance. KW - Atomic layer deposition (ALD) KW - Resonant photoelectron spectroscopy (resPES) KW - Band scheme KW - Interface potential KW - Intrinsic charges KW - Intrinsic defects KW - Partial density of states (pDOS) KW - Exciton KW - Polaron KW - Ligand-to-metal charge transfer KW - Aluminium oxide (Al₂O₃) KW - Hafnium oxide (HfO₂) KW - Titanium Oxide (TiO₂) Y1 - 2018 SN - 978-0-12-809739-7 SN - 978-0-12-814984-3 U6 - https://doi.org/10.1016/B978-0-12-409547-2.14119-8 SP - 162 EP - 171 PB - Elsevier CY - Oxford ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Janowitz, Christoph T1 - Ionicity of ZnO - a key system for transparent conductive oxides T2 - epl : a letters journal exploring the frontiers of physics N2 - The electronic structure of ZnO is dominated by coexisting electron and ionic states/bonds caused by charge polarization and self-trapping phenomena of the valence charges. Their interplay manifests itself in intrinsic electronic defects which have different degree of spatial localization and electronic correlation. The relative abundance of intrinsic defects can be determined by the ionicity factor fi and its value can be derived from three independent experimental procedures in a consistent way. This approach also explains the complex satellite features in the XPS and XAS data. Ionicity and satellite formation are two experimental findings which can be explained consistently in the same context of mixed-atomic valence states and intrinsic electronic defects. KW - Ionicity KW - zinc oxide (ZnO) KW - resonant photoelectron spectroscopy KW - defect states KW - transparent conductive oxide (TCO) Y1 - 2018 U6 - https://doi.org/10.1209/0295-5075/123/27003 SN - 1286-4854 SN - 0295-5075 VL - 123 IS - 2 SP - 27003-p1 EP - 27003-p7 ER - TY - CHAP A1 - Henkel, Karsten A1 - Haeberle, Jörg A1 - Müller, Klaus A1 - Janowitz, Christoph A1 - Schmeißer, Dieter ED - Fornari, Robert T1 - Preparation, properties and electronic structure of SnO₂ T2 - Single Crystals of Electronic Materials N2 - This chapter reports about tin oxide (SnO₂), a material which belongs to the transparent conducting oxide family and is best characterized by its high conductivity, high carrier mobility, and the ability to form p-type conductivity. We correlate these properties in terms of localized intrinsic electronic defect states which are resolved by resonant photoelectron spectroscopy measurements. We describe SnO₂ in terms of an inhomogeneous, mixed-ionic-covalent semiconductor in which these intrinsic electronic defects state are stabilized. KW - electronic structure KW - tin oxide (SnO₂) KW - resonant photoelectron spectroscopy KW - intrinsic defect states Y1 - 2018 SN - 978-0-08-102096-8 SN - 978-0-08-102097-5 SP - 547 EP - 572 PB - Elsevier, Woodhead Publishing CY - Duxford ER - TY - GEN A1 - Maity, Kuntal A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Natural Sugar-Assisted, Chemically Reinforced, Highly Durable Piezoorganic Nanogenerator with Superior Power Density for Self-Powered Wearable Electronics T2 - ACS Applied Materials & Interfaces N2 - Natural piezoelectric materials are of increasing interest, particularly for applications in biocompatible, implantable, and flexible electronic devices. In this paper, we introduce a cost-effective, easily available natural piezoelectric material, that is, sugar in the field of wearable piezoelectric nanogenerators (PNGs) where low electrical output, biocompatibility, and performance durability are still critical issues. We report on a high-performance piezoorganic nanogenerator (PONG) based on the hybridization of sugar-encapsulated polyvinylidenefluoride (PVDF) nanofiber webs (SGNFW). We explore the crucial role of single-crystal sugar having a fascinating structure along with the synergistic enhancement of piezoelectricity during nanoconfinement of sugar-interfaced macromolecular PVDF chains. As a consequence, the SGNFW-based PONG exhibits outstanding electricity generation capability (e.g.,∼100 V under 10 kPa human finger impact and maximum power density of 33 mW/m2) in combination with sensitivity to abundantly available different mechanical sources (such as wind flow, vibration, personal electronics, and acoustic vibration). Consequently, it opens up suitability in multifunctional self-powered wearable sensor designs for realistic implementation. In addition, commercially available capacitors are charged up effectively by the PONG because of its rapid energy storage capability. The high performance of the PONG not only offers“battery-free”energy generation (several portable units of light-emitting diodes and a liquid crystal display screen are powered up without using external storage) but also promises its use in wireless signal transmitting systems, which widens the potential in personal health care monitoring. Furthermore, owing to the geometrical stress confinement effect, the PONG is proven to be a highly durable power-generating device validated by stability test over 10 weeks. Therefore, the organic nanogenerator would be a convenient solution for portable personal electronic devices that are expected to operate in a self-powered manner. KW - natural piezoelectric material KW - sugar KW - PVDF KW - organic piezoelectric nanogenerator KW - high performance and durability KW - self-powered electronics Y1 - 2018 U6 - https://doi.org/10.1021/acsami.8b15320 SN - 1944-8244 SN - 1944-8252 VL - 10 SP - 44018 EP - 44032 ER - TY - GEN A1 - Biswas, Anirban A1 - Garain, Samiran A1 - Maity, Kuntal A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Influence of In situ Synthesized Bismuth Oxide Nanostructures in Self-poled PVDF-based Nanogenerator for Mechanical Energy Harvesting Application T2 - Polymer Composites N2 - A self-poled piezoelectric nanogenerator (NG) based on bismuth oxide (Bi2O3) nanostructures (BNS)-doped poly(vinylidene fluoride) (PVDF) is demonstrated. The in-situ formation of BNS incorporated in the PVDF matrix is realized through a simple solution casting technique that favors the nucleation and stabilization of 99.6% of the electroactive phase in PVDF (i.e., beta/gamma-phases). The enhancement of the output voltage (3.6 V) and current (2.4mA) of the NG based on a nonelectrically poled BNS containing PVDF composite film is achieved and demonstrated by simple repeated human finger imparting. The improvement of the output performance is influenced by the generation of the electroactive polar beta-phase in PVDF, due to the electrostatic interactions between the –CH2–/–CF2– dipoles of PVDF and the surface charge of the BNS. The NGs are able to charge up capacitors demonstrating that the power generation from such a hybrid device structure can be utilized for powering various portable devices. KW - Nanogenerators KW - energy harvesting KW - PVDF KW - bismuth oxide KW - Field-emission scanning electron microscopy (FESEM) KW - X-ray photoelectron spectroscopy (XPS) KW - X-ray diffraction (XRD) KW - Fourier Transform Infrared Spectroscopy (FTIR) Y1 - 2019 U6 - https://doi.org/10.1002/pc.24628 SN - 0272-8397 SN - 1548-0569 VL - 40 IS - S1 SP - E265 EP - E274 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Tarnawska, Lidia Lupina A1 - Wilker, Viola A1 - Kus, Peter A1 - Pożarowska, Emilia A1 - Garain, Samiran A1 - Rouissi, Zied A1 - Schmeißer, Dieter T1 - Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources T2 - Journal of Vacuum Science and Technology A N2 - A comparative study of thin aluminum nitride (AlN) films deposited by plasma-enhanced atomic layer deposition in the SENTECH SI ALD LL system applying either a direct inductively coupled plasma (ICP) or an indirect capacitively coupled plasma (CCP) source is presented. The films prepared with the ICP source (based on a planar triple spiral antenna) exhibit improved properties concerning the growth rate per cycle, total cycle duration, homogeneity, refractive index, fixed and mobile electrical charges, and residual oxygen content compared to the CCP source, where the comparison is based on the applied plasma power of 200 W. The increase of the plasma power to 600 W in the ICP process significantly reduces the residual oxygen content and enhances the electrical breakdown field. The AlN layers grown under these conditions, with a growth rate per cycle of 1.54 Å/cycle, contain residual oxygen and carbon concentrations of about 10% and 4%, respectively, and possess a refractive index of 2.07 (at 632.8 nm). KW - Plamsa-enhanced atomic layer deposition (PEALD) KW - inductively coupled KW - capacitively coupled KW - plamsa source KW - ellipsometry KW - X-ray photoelectron spectroscopy (XPS) KW - X-ray diffraction (XRD) KW - Field emission scanning electron microscopy (FESEM) KW - capacitance-voltage (CV) KW - atomic force microscopy Y1 - 2019 U6 - https://doi.org/10.1116/1.5079628 SN - 0734-2101 SN - 1520-8559 VL - 37 IS - 2 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Pożarowska, Emilia A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Flege, Jan Ingo T1 - Depth profiling of PEALD-AlN films based on Al2p XPS peak decomposition T2 - Verhandlungen der DPG N2 - AlN has remarkable properties (wide band gap, low electrical and thermal conductivity, high dielectric constant, piezoelectricity) and is attractive for (opto)electronic and sensor applications. However, high oxygen content within nitride films is always a critical issue due to the thermodynamically favorable oxidation against nitridation resulting in deteriorated materials properties. In order to clarify whether the oxidation is a surface-limited or a bulk process elemental depth profiling is essential. In this work XPS in combination with Ar+ sputtering is applied to carry out depth profiling of AlN films prepared by plasma-enhanced atomic layer deposition using different parameters (plasma source, power and pulse duration). Particularly, the Al2p core levels are analyzed where the signals are decomposed into four components, representing weaker contributions of pure AlN and aluminum oxide phases as well as stronger signals of mixed oxygen-rich and nitrogen-rich phases. After sputtering (providing access to the deeper part of the film) the pure AlN phase content increases while the pure aluminum oxide content stays relatively constant. These issues are discussed with regard to the preparation parameters employed and accompanying XRD and electrical measurements. KW - X-Ray photoelectron spectroscopy (XPS) KW - peak decomposition KW - plasma enhanced atomic layer deposition (PEALD) KW - aluminium nitride (AlN) Y1 - 2019 UR - https://www.dpg-verhandlungen.de/year/2019/conference/regensburg/part/ds/session/14/contribution/25 SN - 0420-0195 SP - 157 EP - 157 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Roy, Krittish A1 - Ghosh, Sujoy Kumar A1 - Sultana, Ayesha A1 - Garain, Samiran A1 - Xie, Mengying A1 - Bowen, Christopher Rhys A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - A Self-Powered Wearable Pressure Sensor and Pyroelectric Breathing Sensor Based on GO Interfaced PVDF Nanofibers T2 - ACS Applied Nano Materials N2 - This paper reports a self-powered,flexible, piezo- and pyro-electric hybrid nanogenerator (NG) device that can be fixed on different locations of human skin for detecting static and dynamic pressure variations and can also monitor temperature fluctuations during the respiration process. An efficient and cost-effective fabrication strategy has been developed to create electrospun poly(vinylidene fluoride) (PVDF)/graphene oxide (GO) nanofibers, which are used to create a highly sensitive wearable pressure sensor and pyroelectric breathing sensor. The sensor can accurately and rapidly detect pressures as low as 10 Pa with a high sensitivity (4.3 V/kPa), a key performance indicator for wearable sensors. Importantly, the sensor exhibits a high sensitivity to bending and stretching by finger, wrist, and elbow. The pressure sensor is also highly sensitive to vocal vibrations when attached to the human throat. The device can generate a maximum output power density of∼6.2 mW/m2 when subjected to a compressive stress, which enhances its range of applications. Moreover, it is demonstrated that doping with GO improves the pyroelectric energy harvesting and sensing performance of the device under repeated temperature fluctuations. The PVDF/GO-based nanogenerator has a maximum pyroelectric output power density of∼1.2 nW/m2 and can sense temperature changes during respiration, which makes it promising as a pyroelectric breathing sensor. It is demonstrated that processing of the PVDF-GO self-powered multifunctional pressure and pyroelectric breathing sensor can be up-scaled for fabricating compact and high-performance electronic skins for application in health monitoring, motion detection, and portable electronics. KW - piezo- and pyro-electric hybrid nanogenerator KW - poly(vinylidenefluoride) (PVDF)/graphene oxide (GO) nanofibers KW - wearable pressure sensor KW - breathing sensor Y1 - 2019 U6 - https://doi.org/10.1021/acsanm.9b00033 SN - 2574-0970 VL - 2 IS - 4 SP - 2013 EP - 2025 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Pożarowska, Emilia A1 - Kegelmann, Lukas A1 - Tsud, Nataliya A1 - Kot, Małgorzata T1 - Point Defect-Mediated Interface Formation and Appearance of a Cooper Minimum for AlOₓ Atomic-Layer-Deposited Films on CH₃NH₃PbI₃ T2 - The Journal of Physical Chemistry. C N2 - We report on the interaction of CH₃NH₃PbI₃ substrates with AlOx films prepared by atomic layer deposition at room temperature. We use synchrotron radiation-based photoemission spectroscopy and study the Pb 4f, I 3d, and Al 2p core levels as well as the corresponding valence band states (Pb 5d and O 2p). A Cooper minimum is observed for both the Pb 5d and O 2p states, and it indicates that the bonding at the interface must be covalent. We focus on the electronic properties of the substrate and its interface and identify a delicate charge balance between polaronic and excitonic states in MAPI and AlOₓ. The perovskite vacancy sites, identified by changes in the core-level intensities, mediate the charge balance and covalent interaction. KW - Resonant photoelectron spectroscopy KW - Al₂O₃-CH₃NH₃PbI₃ interaction KW - Cooper minimum KW - point defects in CH₃NH₃PbI₃ KW - electronic structure of CH₃NH₃PbI₃ Y1 - 2019 U6 - https://doi.org/10.1021/acs.jpcc.9b05282 SN - 1932-7447 SN - 1932-7455 VL - 123 IS - 38 SP - 23352 EP - 23360 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Kegelmann, Lukas A1 - Albrecht, Steve A1 - Tsud, Nataliya A1 - Kús, Peter A1 - Matolinová, Iva A1 - Schmeißer, Dieter T1 - Al2O3-Atomic Layer Deposited Films on CH3NH3PbI3 : Intrinsic Defects and Passivation Mechanisms T2 - Energy Technology , The Journal of Physical Chemistry C N2 - The initial interaction of atomic layer deposited films of Al2O3 at room temperature on CH3NH3PbI3 (MAPI) films is studied. Synchrotron radiation–based photoelectron spectroscopy is applied to analyze the initial changes in the Al-derived features by comparing samples with different Al2O3 film thicknesses. It is found that polarons and excitons, both intrinsic defects of Al2O3, play a key role in the interface formation. The polaronic states uptake a charge from the MAPI substrate. This charge is transferred to and stabilized in the excitonic state of Al2O3 which is assigned to predominately tetrahedral coordinated Al sites. This charge transfer is initiated by vacancies present in the MAPI substrate and stabilizes a covalent bonding at the Al2O3–MAPI interface but also causes a roughening of the interface which may lead to the formation of grain boundaries. On top of the rough interface, 2D Al2O3 clusters with an increasing number of octahedrally coordinated Al—O bonds grow, and with increasing Al2O3 coverage, they introduce self-healing of the structural defects. KW - charge donation and transfer cycles KW - covalent interfaces KW - defect monitoring KW - model of Al2O3–CH3NH3PbI3 interactions KW - resonant photoelectron spectroscopy Y1 - 2019 U6 - https://doi.org/10.1002/ente.201900975 SN - 2194-4288 SN - 2194-4296 VL - 7 IS - 11 ER - TY - GEN A1 - Naumann, Franziska A1 - Reck, Johanna A1 - Gargouri, Hassan A1 - Gruska, Bernd A1 - Blümich, Adrian A1 - Mahmoodinezhad, Ali A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - In situ real-time and ex situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition T2 - Journal of Vacuum Science and Technology B N2 - In situ real-time ellipsometry (irtE) with a very high time resolution of 24 ms was applied to monitor the inductively coupled plasma enhanced atomic layer deposition (ALD) process of Al₂O₃ thin films to precisely resolve each step of the ALD process and its complete cycle. The influence of plasma power, plasma pulse duration, and deposition temperature on the film growth characteristics was investigated. Ex situ ellipsometry [UV-VIS-NIR-SE (ultraviolet-visible-nearinfrared-spectroscopic ellipsometry) and IR-SE (infrared spectroscopic ellipsometry)] and x-ray photoelectron spectroscopy revealed the bulk properties (thickness, refractive index, chemical composition, and carbon incorporation) of the films, which together with the in situ results are compared to those of the films prepared by thermal ALD (T-ALD). The ICPEALD (inductively coupled plasma enhanced ALD) films were deposited at substrate temperatures between 80 and 250 °C and the role of plasma power (50–300 W) and its pulse duration (1–20 s) was investigated at 250 °C. The reference T-ALD layers were prepared at 200 °C. The ICPEALD process of Al₂O₃ shows an increased growth rate, and the produced films exhibit higher carbon contaminations than the T-ALD Al₂O₃ films. Plasma pulse times of up to 15 s further increase the content of carbon and CH species; at the same time, the refractive index decreases. The optical properties of ICPEALD deposited Al₂O₃ films are comparable with those of the T-ALD films for low plasma power and short plasma pulse durations. For the ICPEALD films, UV absorption is found and it is dependent on the deposition parameters. irtE resolves process effects that correlate with the bulk properties of Al₂O₃, such as impurities and oxygen deficiencies. KW - Plamsa enhanced atomic layer deposition (PEALD) KW - spectroscopic ellipsometry KW - X-ray photoelectron spectroscopy KW - real-time monitoring KW - aluminum oxide (Al₂O₃) Y1 - 2020 U6 - https://doi.org/10.1116/1.5122797 SN - 0734-211X SN - 1071-1023 SN - 2166-2746 SN - 2166-2754 VL - 38 IS - 1 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Janowitz, Christoph A1 - Naumann, Franziska A1 - Plate, Paul A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Flege, Jan Ingo T1 - Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition T2 - Journal of Vacuum Science and Technology A N2 - Gallium oxide (Ga2O3) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) applying a capacitively coupled plasma source where trimethylgallium (TMGa) as the gallium precursor and oxygen (O2) plasma were used in a substrate temperature (Ts)in the range of 80–200 °C. TMGa exhibits high vapor pressure and therefore facilitates deposition at lower substrate temperatures. The Ga2O3 films were characterized by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), and capacitance-voltage (C-V) measurements. The SE data show linear thickness evolution with a growth rate of ∼0.66 Å per cycle and inhomogeneity of ≤2% for all samples. The refractive index of the Ga2O3 thin films is 1.86 ± 0.01 (at 632.8 nm) and independent of temperature, whereas the bandgap slightly decreases from 4.68 eV at Ts of 80 °C to 4.57 eV at 200 °C. XPS analysis revealed ideal stoichiometric gallium to oxygen ratios of 2:3 for the Ga2O3 layers with the lowest carbon contribution of ∼10% for the sample prepared at 150 °C. The permittivity of the layers is 9.7 ± 0.2 (at 10 kHz). In addition, fixed and mobile oxide charge densities of 2–4E12 and 1–2E12 cm−2, respectively, were observed in the C-V characteristics. Moreover, the Ga2O3 films show breakdown fields in the range of 2.2–2.7 MV/cm. Excellent optical and electrical material properties are maintained even at low substrate temperatures as low as 80 °C. Hence, the TMGa/O2 PEALD process is suitable for electronic and optoelectronic applications where low-temperature growth is required. KW - Plamsa enhanced atomic layer deposition (PEALD) KW - low-temperature growth KW - gallium oxide (Ga2O3) KW - x-ray photoelectron spectroscopy KW - spectroscopic ellipsometry KW - capacitance voltage measurements Y1 - 2020 U6 - https://doi.org/10.1116/1.5134800 SN - 0734-2101 SN - 1520-8559 VL - 38 IS - 2 ER - TY - GEN A1 - Maity, Kuntal A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Self-Powered Human-Health Monitoring through Aligned PVDFNanofibers Interfaced Skin-Interactive Piezoelectric Sensor T2 - ACS Applied Polymer Materials N2 - Flexible and wearable e-skin sensors are attracting a great interest for their smart sensing applications in next-generation electronics. However, implant ability, sensitivity, and biosignal detection capability in a self-powered manner are the prime concerns in embedded devices. In particular, electrode compatibility and imperishability have become challenging issues in wearable sensors due to the poor compatibility and fragileness of metal electrodes. In this context, we report on a skin-interactive metal-free spongy electrode in a piezoelectric sensor where highly aligned poly(vinylidenefluoride) (PVDF) nanofibers (NFs) arrays are introduced as the piezoelectric active component and conducting polyaniline- (PANI-) coated PVDF (PANI−PVDF) NFs mats served as flexible electrodes. Notably, a 99% yield of piezoelectric phases of the aligned PVDF arrays is the key factor to exhibit promising mechano-sensitivity (0.8 V/kPa) performance that in turn helps in human-health monitoring. The sensor shows excellent mechanical to electrical energy conversion that enable to sense human finger touch (10 V under 10 kPa) with energy conversion efficiency of 53%. Most importantly, due to the compatible electrodes excellent mechanical stability has been found showing negligible degradation over 12,000 periodic cycles. Furthermore, under mechanical stimuli, it is also possible to charge up a capacitor (1μF) to 4 V within 60 s confirming the possibility to use the device as a self-powered piezo-organic-e-skin sensor (POESS). This type of structural design enables to trace elusive movement of muscles and the operation in several conditions such as bending, compression and stretching. We demonstrated various human gestures monitoring, such as wrist bending, neck stretching, and arm compressions, throat movements during drinking water, coughing actions, and swallowing. In addition, diverse specific phonation recognition, heart-pulse measurement and its respective short-time Fourier transform (STFT) analysis indicate an efficient and convenient way of monitoring human-health status particularly in hospital-free mode. KW - e-skin sensor KW - piezoelectric nanofibers KW - PVDF KW - flexible electrode KW - health-care monitoring KW - self-powered electronics Y1 - 2020 U6 - https://doi.org/10.1021/acsapm.9b00846 SN - 2637-6105 VL - 2 IS - 2 SP - 862 EP - 878 ER - TY - GEN A1 - Ghosh, Sujoy Kumar A1 - Sinha, Tridib Kumar A1 - Xie, Mengying A1 - Bowen, Christopher Rhys A1 - Garain, Samiran A1 - Mahanty, Biswajit A1 - Roy, Krittish A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Kim, Jin Kuk A1 - Mandal, Dipankar T1 - Temperature–Pressure Hybrid Sensing All-Organic Stretchable Energy Harvester T2 - ACS Applied Electronic Materials N2 - The design and development of intrinsically stretchable all-organic self-powered sensors concurrently perceiving temperature and pressure remain a challenge but deliver an exciting platform to realize environmentally friendly wearable electronics. In this approach, a biomimetic all-organic stretchable energy harvester is designed by a xylitol-added poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS/Xyl) film as a compatible overlay electrode with polyaniline-reinforced one-dimensional aligned poly(vinylidene fluoride) hybrid electroactive soft nanowires. The gradient of elastic modulus between the electrode and the active nanowire component enables the all-organic device to manifest excellent power-generating performance under external temperature fluctuation (∼3 μW/m2 under ΔT ∼ 92 K) and mechanical force (∼31 μW/cm2 at 30 N). Importantly, the device renders simultaneous energy scavenging of temperature and pressure changes under pressing and stretching conditions (∼20%). The excellent mechanosensitivity (∼100 mV/N), fast response time (∼1 ms), outstanding mechanical and thermal stability, and good temperature resolution <10 K enable the harvester to act as an epidermal sensor, which simultaneously detects and discriminates both subtle pressure and thermal deviations exposed to an epidermis surface. The real-time recording and wireless transferring of physiological signals to a smartphone indicate an effective way to realize remote healthcare monitoring for early intervention. KW - all-organic KW - piezoelectric KW - pyroelectric KW - energy harvester KW - sensor KW - healthcare monitoring Y1 - 2021 U6 - https://doi.org/10.1021/acsaelm.0c00816 SN - 2637-6113 VL - 3 IS - 1 SP - 248 EP - 259 ER -