TY - CHAP A1 - Seime, Bernd A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Buffer layer investigation of MFIS stacks with an organic ferroelectric layer T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 42 N2 - Ferroelectric field effect transistors are considered as future non volatile and non destructive readout memory cells. Conventional Perowskite-type ferroelectric materials are shown to work but they need expensive high temperature and high partial pressure processing steps inducing also unintentional and undefined interfacial layers.A possible low cost solution is the use of poly[vinylidene fluoride trifluoroethylene (P[VDF/TrFE]). This is a ferroelectric polymer which can be spin coated at room temperature onto silicon suited with well defined buffer layers. Using P[VDF/TrFE] we focus on metal ferroelectric insulator semi-conductor (MFIS) structures. In MFIS structure a part of the programming voltage drops over the buffering insulator. We report on attempts to minimize this fraction by optimizing the voltage divider over the buffer and the ferroelectric layers. CV measurements for different thickness of the buffer (10-235nm) and the ferroelectric layer(100nm-1μm) and for different permittivity values of the buffer layer(SiO2, Al2O3, HfO2) will be presented. This work is supported by Deutsche Forschungsgemeinschaft within priority program 1157 (DSCH 745/11-1). Y1 - 2007 UR - http://www.dpg-verhandlungen.de/year/2007/conference/regensburg/part/df/session/11/contribution/1 SN - 0420-0195 SP - S. 216 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Mandal, Dipankar A1 - Müller, Klaus A1 - Seifarth, Olaf A1 - Hoffman, Patrick A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Study of reactions at the interface P(VDF/TrFE)/Al and P(VDF/TrFE)/PEDOT:PSS T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 42 N2 - Due to potential use in non volatile memory application, Poly(vinylidene fluoride/trifluoroethylene) (P(VDF-TrFE)) is a great deal of interest, especially to produce organic field effect transistors (OFET). Right now it was found that Aluminum is one of the cost-effective inorganic electrode candidate. On the other hand, poly(3,4 ethylenedioxythiophene):poly(4-styrenesulfonate)(PEDOT:PSS) shows promising behavior for the application as organic electrode. In part of our investigations we have systematically studied surface interactions of organic ferroelectric thin films (P(VDF-TrFE))with inorganic (Al) and organic layers (PEDOT:PSS). By X-ray photoelectron spectroscopy (XPS) is has been found that there is a interfacial reaction with Al and the copolymer. In contrast, for electrodes, made of PEDOT: PSS, we found not such kind of behavior. In this case, we found no evidence for any surface reaction. Furthermore, we present our results concerning the orientation of permanent dipoles in the co-polymer (formed between hydrogen and fluorine atom). Here, we use Near-edge X-ray absorption fine structure (NEXAFS) analysis at the U 49/2 - PGM2 beam line of the BESSY-II Synchrotron. This work is supported by Deutsche Forschungsgemeinschaft (DFG) within priority program 1157 (DSCH 745/11-1). Y1 - 2007 UR - http://www.dpg-verhandlungen.de/year/2007/conference/regensburg/part/syoe/session/8/contribution/18 SN - 0420-0195 SP - S. 797 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - PrOx/AlON stacks as a high-k candidate on SiC T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 42 N2 - We study the chemical stability and electrical properties of Pr-oxides-SiC MIS stacks. In MISFET devices for high power applications the electric field scaling at the interface between semiconductor and insulator is determined by the ratio of their permittivity values. A high-k material can be used to optimize the performance of such devices. In previous studies we had to understand that the chemical reactivity of the PrOx/SiC interface causes a destructive interaction yielding silicate and graphite formation as well as poor electrical performance after direct deposition of PrOx onto SiC. Therefore we introduced an additional chemically inert layer and in this contribution we focus on PrOx/AlON as a suitable insulator stack. In our spectroscopic investigations we recognized a stable AlON/3C-SiC interface even for annealing steps up to 900∘C. First electrical characterizations are performed on Si substrates and we find a strong improvement in the leakage current by several orders of magnitude down to values of 10−7 A/cm2 at an EOT of 4nm and interface state densities of mean values of 5*1011/eVcm2. We also report on our ongoing electrical characterization of such stacks on SiC substrates. This work is supported by Deutsche Forschungsgemeinschaft within priority program 1157 (DSCH 745/9-2). Y1 - 2007 UR - http://www.dpg-verhandlungen.de/year/2007/conference/regensburg/part/df/session/10/contribution/8 SN - 0420-0195 SP - S. 215 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Burkov, Yevgen A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - X-ray photoemission spectroscopy of Aluminium Oxynitride on Si(001) and the rise as buffer layers T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43 N2 - Praseodymium oxide (PrxOy) is one of the candidate as high-k transistor gate dielectrics, but aluminium oxynitride (AlxONy) as buffer layer is needed to prevent diffusions from the silicon into PrxOy and to hinder charge injection from the semiconductor into the insulator. The thermal stability and thickness dependence of aluminum oxynitride (AlxONy) has been investigated by synchrotron radiation photoemission spectroscopy (SR-PES). AlxONy layers were prepared by low energy ion-beam assisted deposition (LE-IBAD) at room temperature on a silicon substrate cleaned with HF-acid. Aluminium oxynitride is stable till 800∘C. From photoemission spectra we can assess that silicon oxynitride is built as first and then the growth of AlxONy follows. Resonant inelastic X-ray scattering measurements with synchrotron radiation have been performed. The combination of X-ray absorption spectroscopy (XAS) and RIXS make possible to determinate the band gap of AlxONy. Y1 - 2008 UR - http://www.dpg-verhandlungen.de/year/2008/conference/berlin/part/ds/session/23/contribution/5 SN - 0420-0195 SP - S. 243 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - C(V) and C(t) measurements on MFIS structures consisting P[VDF/TrFE] as ferroelectric layer T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43 N2 - Ferroelectric Field Effect Transistors (FeFETs) are considered as a candidate for future non volatile and non destructive readout memory cells. A possible low cost solution is the use of poly[vinylidene fluoride trifluoroethylene (P[VDF/TrFE]). Using P[VDF/TrFE] we focus on metal ferroelectric insulator semiconductor (MFIS) capacitor structures. In this contribution we will summarize our investigations related to capacitance measurements in dependence of applied bias (C(V)) and time (C(t)). The thickness of the ferroelectric layer as well as the thickness and the material of the buffer layer have been investigated for optimization of the write voltage. CV measurements at higher temperatures deliver decreased flatband voltage shifts within one CV loop resulting in lower memory windows. At temperatures around 100∘C the hysteresis totally vanished, pointing out the ferroelectric behavior of the system. C(t) measurements at a constant bias have been performed for retention analysis of the MFIS stack. After applying a writing pulse we could distinguish between a higher and a lower capacitance state for more than 5 days. This work is supported by Deutsche Forschungsgemeinschaft within priority program 1157 (SCHM 745/11-2). Y1 - 2008 UR - http://www.dpg-verhandlungen.de/year/2008/conference/berlin/part/sysa/session/4/contribution/7 SN - 0420-0195 SP - S. 828 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Interface reactions of ferroelectric copolymer layers with different electrode materials T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43 N2 - The ferroelectric copolymer poly(vinylidene fluoride trifluoroethylene) (P(VDF-TrFE)) is a possible material for low cost applications as organic nonvolatile memory element. We present an XPS interface investigation of the copolymer/electrode interface. Below 100nm film thickness, interface phenomena becomes important. Possible interface reactions could lead to a reduction of the ferroelectric functionality.We present a comparative study of the two interfaces Al/P(VDF-TrFE) and PEDOT:PSS/P(VDF-TrFE). The result is a clear indication of a surface reaction in between the Aluminum-electrodes. In contrast, for PEDOT:PSS the measurements shows a layer by layer formation of the interface PEDOT:PSS/PVDF without any reaction. Second, we present a study of remanent polarization of ultrathin spincoated films of the copolymer, in a thickness range from 5 to 100mn, with organic electrodes like PEDOT:PSS. The measurements are carried out by using the flatband shift of a capacitance-voltage (CV) characteristic. This shift of flatband voltage is used as value for the electric polarization of the polymer. Y1 - 2008 UR - http://www.dpg-verhandlungen.de/year/2008/conference/berlin/part/sysa/session/5/contribution/16 SN - 0420-0195 SP - S. 830 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Paloumpa, Ioanna A1 - Sohal, Rakesh A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Inorganic and organic layers for high-k and organic memory applications T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41 N2 - We report about organic and inorganic MIS stacks for new possibilities for high frequency and high power applications as well as for non volatile memory cell. The organic stack contains a ferroelectric polymer as the functional layer. Poly[vinylidene fluoride trifluoroethylene] (P[VDF/TrFE]) is spin coated from a solution onto oxidised silicon substrates. We report on the polarisation induced flatband voltage shifts. For the inorganic stack our attempt is to combine higk-k dielectrics with high band gap semiconductors (SiC). Praseodymium oxide layers are prepared by electron beam evaporation from Pr6O11 powder and in situ controlling of interface and volume composition (XPS). Praseodymium silicate layers were prepared either by metal evaporation onto a thin ox- ide on top of the semiconductor and following annealing steps or by a wet chemical process out of aqueous Pr(NO3)3 solutions. Using spectro-scopic characterisation we investigate the stability of the various inter-faces within the stacks as well as the reactivity of the metal electrodes on thin Pr2O3. We report the results of electrical characterisation consisting of permittivity values, leakage current and density of interface states. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/df/session/1/contribution/4 SN - 0420-0195 SP - S. 127 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - P(VDF/TrFE) as ferroelectric insulation layer for organic field effect transistors T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41 N2 - The ferroelectric polymer poly(vinylidene fluoride trifluoroethylene)(P(VDF-TrFE)) is used as insulating material for organic field effect tran-sistors (OFET) and metal-insulator-semiconductor (MIS)-structures. For the MIS-structures, we find the typical hysteresis in the CV charac-teristic upon increasing the voltage scan window. Based on these results, we fabricate OFET with regioregular poly(3-hexlythiophene)(P3HT) as organic semiconductor. The transistors are constructed in bottom gate architecture with thin layers of spincoated P(VDF-TrFE) as gate insulation (100nm). The drain-source current of the OFET is reversible affected by the polarized gate, which gives opportunities for organic nonvolatile memory elements. We present characteristic features like the hysteretic drain current response or the data retention. Furthermore, we present measurements with Kelvin probe force microscopy, a method which gives informations on the lateral distributions of the surface potential. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/cpp/session/23/contribution/28 SN - 0420-0195 SP - S. 101 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Richter, Matthias A1 - Müller, Klaus A1 - Philip, Shine A1 - Paloumpa, Ioanna A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Temperature dependence of organic solar cell parameters T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44 N2 - The influence of an annealing step on the parameters of bulk heterojunction organic solar cells is investigated. In order to fabricate the solar cells we use glass coated with ITO (Indiumtinoxide) as a substrate on which the active layer consisting of P3HT and PCBM is spincoated. Al-electrodes are evaporated on top of the active layer. We use PEDOT:PSS as buffer layer. Each sample is annealed at different temperatures for a short time. Between every temperature step the I-V characteristic of the cell is measured. The following parameters are derived afterwards: FF, Isc (density), Voc. Also the efficiency is estimated. The results show a maximum cell efficiency for drying at 100°C for 20sec. A further important step for preparation is the drying procedure of the PEDOT:PSS layer. Here an improvement of about 50% in cell efficiency is measured after drying at 50°C for 5 days under inert gas atmosphere. Y1 - 2009 UR - http://www.dpg-verhandlungen.de/year/2009/conference/dresden/part/syop/session/4/contribution/2 SN - 0420-0195 SP - S. 671 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Hoffmannbeck, David A1 - Richter, Matthias A1 - Städter, Matthias A1 - Paloumpa, Ioanna A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Spectroscopic and microscopic characterization of potential catalysts for the hydrogenation of CO2 T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46 N2 - The reduction of CO2 emissions is a general demand of the society in order to avoid irreversible climate changes. We are investigating potential catalysts for the hydrogenation of CO2 in particular for its application in the so called oxyfuel combustion process. In order to understand the catalytic behavior of the investigated materials we use the techniques X-Ray Photoemission (XPS) and -absorption (XAS) Spectroscopy as well as X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The prospective of our work is to figure out the electronic and structural properties of the material and to optimize proper catalysts or design new ones for best catalytic activity. Beside the spectro-microscopic investigations the catalysts are tested under Sabatier reaction conditions in terms of activity, stability and sensitivity against poisoning. In our preliminary work we constructed a Sabatier reactor system with analytical parts based on infrared absorption and mass spectroscopy modules. First spectroscopic and catalytic results achieved on a commercially available Ru/Al2O3 catalyst will be presented. Y1 - 2011 UR - http://www.dpg-verhandlungen.de/year/2011/conference/dresden/part/o/session/60/contribution/123 SN - 0420-0195 SP - S. 483 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Mbua, Roy A1 - Müller, Klaus A1 - Richter, Matthias A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter A1 - Kramm, Ulricke T1 - Investigation of new Catalysts for PEM Fuel Cells T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46 N2 - Increasing green house emissions amplify global warming concerns worldwide. Fuel cells, based on polymer electrolyte membranes (PEM) are part of the solution to this issue. We aim at developing and testing new catalysts for fuel cells. Platinum catalysts perform best in PEM fuel cells to date but they are very expensive. For fuel cells to be perfectly applicable and economically affordable, an alternative catalyst with similar or even greater efficiency should be developed. Metal phthalocyanines are known to be good oxygen reduction catalysts and are associated with high electron transfer properties. We investigated Cobalt Phthalocyanine in its pure state mixed with Carbon Black (CoPc:Carbon Black=1:9) untreated and also after a treatment in N2 at several temperatures, up to 1000°C for 30 minutes. Results of XPS and EDX analyses reveal that the treatment at higher temperatures causes a rearrangement in the chemical states of Co, N and C atoms. Furthermore, results of cycling voltammetry (CV) analysis reveal that CoPc treated in N2 at 800°C exhibited a higher current density, in conclusion, a higher catalytic activity than the untreated CoPc. Y1 - 2011 UR - http://www.dpg-verhandlungen.de/year/2011/conference/dresden/part/o/session/60/contribution/119 SN - 0420-0195 SP - S. 483 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Das, Chittaranjan A1 - Sowinska, Małgorzata A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Gargouri, Hassan A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Gruska, Bernd A1 - Arens, Michael ED - Glück, B. K. ED - Schmidt, S. ED - Stein, E. ED - Raschke, Jörg-Uwe ED - Richter, H. T1 - Charakterisierung von TiO2-ALD-Schichten und deren Nutzung für die Passivierung von Si-Photokathoden T2 - Tagungsband Photovoltaik-Meeting: Anwendungen-Qualität-Perspektiven, Senftenberg, 15.04.2015 N2 - Wir berichten zunächst über den Einfluss der Methode der Atomlagenabscheidung auf die TiO2-Schichteigenschaften. Insbesondere wird der Zusammenhang zwischen Ti3+- sowie Interbandzuständen mit elektrischen Kennlinien und deren Einfluss auf funktionale Schichteigenschaften diskutiert. Anschließend werden Mikrostrukturierung, Grenzflächen-Engineering und konforme Abscheidung einer TiO2-ALD-Schutzschicht effektiv zur Performance-Steigerung von p-Si-Photokathoden angewendet. KW - TiO2 KW - Korrosion KW - Atomlagenabscheidung KW - Silizium KW - Photokathoden KW - Linear Scan Voltametry KW - Photoelektronenspektroskopie Y1 - 2015 SP - 3 EP - 8 PB - BTU Cottbus-Senftenberg CY - Senftenberg ER - TY - GEN A1 - Tamang, Abiral A1 - Ghosh, Sujoy Kumar A1 - Garain, Samiran A1 - Alam, Md. Mehebub A1 - Haeberle, Jörg A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - DNA-Assisted β‑phase Nucleation and Alignment of Molecular Dipoles in PVDF Film: A Realization of Self-Poled Bioinspired Flexible Polymer Nanogenerator for Portable Electronic Devices T2 - ACS Applied Materials & Interfaces N2 - A flexible nanogenerator (NG) is fabricated with a poly(vinylidene fluoride) (PVDF)film, where deoxyribonu-cleic acid (DNA) is the agent for the electroactive β-phase nucleation. Denatured DNA is co-operating to align the molecular−CH2/−CF2 dipoles of PVDF causing piezo- electricity without electrical poling. The NG is capable of harvesting energy from a variety of easily accessible mechanical stress such as human touch, machine vibration, football juggling, and walking. The NG exhibits high piezoelectric energy conversion efficiency facilitating the instant turn-on of several green or blue light-emitting diodes. The generated energy can be used to charge capacitors providing a wide scope for the design of self-powered portable devices. KW - PVDF KW - β-phase KW - DNA KW - self-poling KW - piezoelectric flexible nanogenerator Y1 - 2015 U6 - https://doi.org/10.1021/acsami.5b04161 SN - 1944-8244 SN - 1944-8252 IS - 7 SP - 16143 EP - 16147 ER - TY - GEN A1 - Sowińska, Małgorzata A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Gargouri, Hassan T1 - Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study T2 - Journal of Vacuum Science and Technology A N2 - The process parameters’ impact of the plasma-enhanced atomic layer deposition (PE-ALD) method on the oxygen to nitrogen (O/N) ratio in titanium oxynitride (TiOxNy) films was studied. Titanium(IV)isopropoxide in combination with NH3 plasma and tetrakis(dimethylamino) titanium by applying N2 plasma processes were investigated. Samples were characterized by the in situ spectroscopic ellipsometry, x-ray photoelectron spectroscopy, and electrical characterization (current–voltage: I-V and capacitance–voltage: C-V) methods. The O/N ratio in the TiOxNy films is found to be very sensitive for their electric properties such as conductivity, dielectric breakdown, and permittivity. Our results indicate that these PE-ALD film properties can be tuned, via the O/N ratio, by the selection of the process parameters and precursor/coreactant combination. KW - plasma enhanced atomic layer deposition KW - titanium oxynitride KW - X-ray photoelectron spectroscopy KW - ellipsometry KW - current-voltage KW - capacitance-voltage Y1 - 2016 U6 - https://doi.org/10.1116/1.4936227 SN - 0734-2101 SN - 1520-8559 IS - 34 SP - 01A127-1 EP - 01A127-9 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Haeberle, Jörg A1 - Gruska, Bernd A1 - Arens, Matthias A1 - Schmeißer, Dieter T1 - New opportunities with Plasma enhanced atomic layer deposition (PE-ALD) of oxides T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Thermal Atomic layer deposition (T-ALD) of oxides is obtained by the pulsed alternation of a metal precursor and an oxygen source, typically H2O or O3, and the reactions leading to ALD are thermally activated. With plasma enhanced ALD (PE-ALD), instead, the oxygen source is represented by an oxygen-containing plasma. The higher reactivity of the plasma-generated species extend the capabilities of ALD: improved film quality and increased flexibility in process conditions, such as growth at low temperature, are typical advantages of PE-ALD over T-ALD. We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using T-ALD and PE-ALD in the SENTECH SI ALD LL system. Films were deposited in the temperature range between room temperature (RT) and 200∘C. We characterized the films with spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4" wafers and with X-ray photoelectron spectroscopy. All films resulted in a high degree of homogeneity, independent of the deposition temperature. Investigations with capacitance-voltage and conductance-voltage measurements showed a very low interface states density for the PE-ALD films. KW - Atomic layer deposition KW - Plasma enhanced atomic layer deposition KW - X-ray photoelectron spectroscopy KW - spectroscopic ellipsometry KW - dielectric properties KW - Al2O3 Y1 - 2014 UR - http://www.dpg-verhandlungen.de/year/2014/conference/dresden/part/ds/session/49/contribution/3?lang=en SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - A polymer nanogenerator based on silver nanoparticles doped electrospun P(VDF-HFP) nanofibers T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - The rising energy demand within the increasing mobility of human society has driven the development of new alternative power sources for portable devices with ultra-low electric power consumption. Based on its piezoelectric properties poly-vinylidene fluoride (PVDF) is a good candidate for mechanical energy harvesting for such devices. Moreover the copolymer poly(vinylidene fluoride-hexafluoropropylene) [P(VDF-HFP)] offers better film flexibility and cost-effectiveness than pure PVDF. We report on a polymer nanogenerator (PNG) based on electrospun P(VDF-HFP) nanofibers doped with silver nanoparticles (Ag-NPs). The electrospun fibers were characterized by FTIR, XPS, SEM and pressure imparting probe. It has been found that the yield of the piezoelectric phase is increased by the addition of Ag-NPs due to an interaction between surface charges of Ag-NPs and the molecular dipoles. Furthermore, defects in the P(VDF-HFP) electrospun fibers are removed. Accordingly, a significant enhancement in the output power of the PNG was found. Similar trends were also observed with Pd-NPs. KW - nanogenerator KW - PVDF KW - nanoparticles Y1 - 2015 UR - http://www.dpg-verhandlungen.de/year/2015/conference/berlin/part/ds/session/36/contribution/34?lang=en SN - 0420-0195 SP - S. 208 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Sowinska, Małgorzata A1 - Brizzi, Simone A1 - Das, Chittaranjan A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Analysis of nitrogen species in titanium oxynitride ALD films T2 - Applied Surface Science N2 - Titanium oxynitride films are prepared by plasma enhanced atomic layer deposition method using two different precursors and nitrogen sources. Synchrotron radiation-based X-ray photoelectron spectroscopy and X-ray absorption spectroscopy are used to characterize the nitrogen species incorporated within these films depending on the deposition parameters. It is found that nitrogen atoms in these films are differently bonded. In particular, it can be distinguished between Ti-ON and Ti-N bonding configurations and molecular nitrogen species caused by precursor fragments. KW - titanium oxynitride KW - X-ray photoelectron spectroscopy KW - X-ray absorption spectroscopy KW - ALD process parameters Y1 - 2016 U6 - https://doi.org/10.1016/j.apsusc.2016.02.096 SN - 0169-4332 SN - 1873-5584 VL - 381 SP - 42 EP - 47 ER - TY - GEN A1 - Das, Chittaranjan A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Engineering of Sub-Nanometer SiOₓ Thickness in Si Photocathodes for Optimized Open Circuit Potential T2 - ChemSusChem N2 - Silicon is one of the most promising materials to be used for tandem-cell water-splitting devices. However, the electrochemical instability of bare Si makes it difficult to be used for stable devices. Besides that, the photovoltage loss in Si, caused by several factors (e.g., metal oxide protection layer and/or SiO₂/Si or catalyst/Si interface), limits its use in these devices. In this work, we present that an optimized open circuit potential (OCP) of Si can be obtained by controlling the SiOₓ thickness in sub-nanometer range. It can be done by means of a simple and cost-effective way using the combination of a wet chemical etching and the low temperature atomic layer deposition (ALD) of TiO₂. We have found that a certain thickness of the native SiOₓ is necessary to prevent further oxidation of the Si photocathode during the ALD growth of TiO₂. Moreover, covering the Si photocathode with an ALD TiO₂ layer enhances its stability. KW - atomic layer deposition KW - open circuit potential KW - Si photocathodes KW - silica KW - stability Y1 - 2016 U6 - https://doi.org/10.1002/cssc.201600777 SN - 1864-5631 SN - 1864-564X VL - 9 IS - 17 SP - 2332 EP - 2336 ER - TY - GEN A1 - Garain, Samiran A1 - Barman, Koushik A1 - Sinha, Tridib Kumar A1 - Jasimuddin, Sk A1 - Haeberle, Jörg A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Cerium(III) Complex Modified Gold Electrode: An Efficient Electrocatalyst for the Oxygen Evolution Reaction T2 - ACS Applied Materials and Interfaces N2 - Exploring efficient and inexpensive electrocatalysts for the oxidation of water is of great importance for various electrochemical energy storage and conversion technologies. In the present study, a new water-soluble [Ce III(DMF) (HSO4)3] complex was synthesized and characterized by UV−vis, photoluminescence, and high-resolution X-ray photoelectron spectroscopy techniques. Owing to classic 5d →4f transitions, an intense photoluminescence in the UV region was observed from the water-soluble [CeIII(DMF (HSO4)3] complex. A stacking electrode was designed where self-assembled L-cysteine monolayer modified gold was immobilized with the synthesized cerium complex and was characterized by scanning electron microscopy, electrochemical impedance spectroscopy, and cyclic voltam-metry. The resulting electrode, i.e., [CeIII(DMF)(HSO4)3]−L-cysteine-Au stacks shows high electrocatalytic water oxidation behavior at an overpotential of η ≈0.34 V under neutral pH conditions. We also demonstrated a way where the overpotential is possible to decrease upon irradiation of UV light. KW - water oxidation KW - electrocatalyst KW - photoelectrocatalyst KW - photoluminescence KW - Ce(III)-complex KW - L-cysteine KW - gold electrode Y1 - 2016 U6 - https://doi.org/10.1021/acsami.6b05236 SN - 1944-8244 SN - 1944-8252 VL - 8 IS - 33 SP - 21294 EP - 21301 ER - TY - CHAP A1 - Rouissi, Zied A1 - Henkel, Karsten A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - ALD growth of Al2O3 on Stepped Surface of HOPG and Ag-HOPG T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Atomic Layer Deposition (ALD) is an excellent deposition technique to grow thin film with high homogeneity coverage on ideal surfaces. Here we are interested in the growth properties on non-ideal (stepped, inert) surfaces. Using STM we studied the growth of Al2O3 by ALD on stepped surface of HOPG and silver covered HOPG (Ag-HOPG). The HOPG sample was cleaved to and then cleaned by N2 in vacuum. We obtain regular steps with terrace widths of 50nm - 500nm. Ag was deposited by thermal deposition on the HOPG. The Al2O3 growth at RT was studies after the first, third, and fifth cycle. Silver evaporation leads to step decoration with island of 1nm-7nm. On the terraces we find the formation of 2D domain of Ag chains. The features caused by the individual ALD cycles of Al2O3 depend on the terrace widths of the HOPG substrate. For small terraces (<100nm) we obtain a growth of 2D domains ( 20nm-25nm) on the edge steps and in the middle of the terrace. For large terraces (>100nm) we find agglomeration of the precursors on individual nucleation sites. Here 3D islands are formed with a height of up to 5nm in the fifth ALD cycle. KW - atomic layer deposition KW - Scanning tunneling microscopy (STM) KW - Al2O3 KW - HOPG Y1 - 2016 UR - http://www.dpg-verhandlungen.de/year/2016/conference/regensburg/part/o/session/89/contribution/12?lang=en SP - S. 419 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Sohal, Rakesh A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Growth and Characterization of 3C-SiC thin films on Si substrates T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - This work reports on the growth and characterization of cubic silicon carbide thin films. A cold wall low pressure chemical vapour deposition (LPCVD) system has been used to grow the cubic silicon carbide. The two step method, carbonization and subsequent growth, has been used to grow good quality 3C-SiC thin films. The composition and structure of deposited thin films have been analysed by Fourier Transform Infrared Spectroscopy (FTIR), XPS and X-Ray Diffractometry (XRD). The structural quality of the films has been optimized as a function of substrate temperature during carbonization and growth. X-rays diffraction measurements shows that the grown layers are highly oriented crystalline cubic silicon carbide. KW - low pressure chemical vapor deposition (LPCVD) KW - 3C-SiC KW - X-ray photoelectron spectroscopy (XPS) KW - Fourier Transform Infrared Spectroscopy (FTIR) KW - X-Ray diffraction Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/hl/session/58/contribution/50?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Torche, Mohamed A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Lupina, Grzegorz A1 - Goryako, Andrey A1 - Wollweber, Jürgen A1 - Schmeißer, Dieter T1 - Investigations of 3C-SiC growth on Si (001) T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Carbide was grown on Si (001) - substrates with supply of C2H2. Investigation of the interface Si/SiC (buffer layer) is essential for optimized preparation conditions, leading to a high quality of the growing SiC crystal. In addition to the lattice mismatch of 20 per cent between Si and SiC, which causes defects like dislocations or stacking faults, the chemical homogeneity of this layer is important. XPS was used to characterize the first state of SiC crystal growth on the Si substrate. Carbonizing with C2H2 leads to surface reactions which build up the buffer layer. By using electron spectroscopy, it was possible to characterize the SiC/Si (001) buffer layer, depending on the following reaction parameters: Tsubstrate , PC2H2 , PH2 , the ratio of pressures and the reaction time. The measurements were performed in terms of the content of carbide, oxide and roughness/etching-efficiency (Profilometer) for the reaction parameters above. We found, that the most critical parameter is the temperature of the substrate (Tsubstrate). KW - 3C-SiC KW - chemical vapor deposition (CVD) KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2004 UR - http://www.dpg-verhandlungen.de/year/2004/conference/regensburg/part/hl/session/44/contribution/42?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - P(VDF/TrFE) as a ferroelectric dielectric for Organic Field effect Transistors in MFIS structure T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - MFIS structures consisting of metal, ferroelectric poly[vinylidene fluoride trifluoroethylene](P[VDF/TrFE]), insulator, semiconductor (Si) are fabricated and the influence of the polarization of the P(VDF/TrFE) on the CV characteristics of these structures is investigated. We find a characteristic ferroelectric hysteresis in the CV curves upon increasing the voltage scan window (e.g.-U...U,U=6...30V, |UP(VDF/TrFE)|≤15V, dP(VDF/TrFE)=300 nm). A writing process with adequate electric fields causes large shifts in the flatband voltage ( Δ UFB>4V for the quoted example before) which are stable over days. We report on our investigations which focus on the switching behavior by varying the parameters like polymer thickness, writing field strength and time, long time stability, reversing voltage and insulating material (SiO2, PMMA (Polymethylmetacrylate)). This material combination is favorable for transfer into our full organic concept of field effect transistors for application as a nondestructive readout memory (NDRO) cell. KW - P(VDF/TrFE) KW - Organic ferroelectric field effect transistor KW - capacitance voltage measurements Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/syoo/session/6/contribution/39?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Organic Field Effect Transistors with polymer high-k dielectric insulator T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Organic field effect transistors consisting of the copolymer poly(vinylidene fluoridetrifluoroethylene) (P(VDF-TrFE)) and P3HT (poly(3-hexlythiophene)) as active layer have been fabricated. The influence of P(VDF-TrFE) on the transconductance of organic field effect transistors was investigated and enhanced gate effects are observed compared to similar transistors with PMMA (Polymethylmetacrylate) as gate dielectric. Due to the high dielectric constant of P(VDF-TrFE) (DK=12) an operation voltage smaller than for a conventional organic dielectric like PMMA (DK=3.3) was observed. The thickness of the spincoated dielectric layers is in the range of 2microns and in consequence, no significant hysteresis was found, a prerequisite for transistor operation. KW - organic field effect transistor KW - P(VDF/TrFE) KW - high-k organic Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/syoo/session/6/contribution/30?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Ghosh, Sujoy Kumar A1 - Biswas, Anirban A1 - Sen, Shrabanee A1 - Das, Chittaranjan A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Yb3+ Assisted Self-Polarized PVDF Based Ferroelectretic Nanogenerator: A Facile Strategy of Highly Efficient Mechanical Energy Harvester Fabrication T2 - Nano Energy N2 - Ytterbium (Yb3+) assisted porous poly(vinylidene fluoride) (PVDF) composite film comprising flexible ferroelectretic nanogenerator (FTNG) is highlighted where traditional poling treatment is completely avoided. The piezoelectric output of FTNG is realized by the co-operative activity of self-polarized -CH2/-CF2 dipoles with porous electret-like structure in the composite film. Owing to extraordinary ferroelectric and dielectric properties, FTNG is acting as a highly efficient mechanical energy harvester. It is capable to capture several forms of abundant mechanical energy arising from humanfinger movements, machine vibrations and sound waves. As a proof of concept, under compressive deformation, FTNG is enable to instantly powers up several consumer electronics and thus provides a promising strategy for achieving self-powered electronic devices. KW - PVDF KW - Yb 3+ KW - Porous ferroelectret material KW - Self-polarization KW - Ferroelectretic nanogenerator KW - Mechanical energy harvester KW - Self-powered electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.nanoen.2016.10.042 SN - 2211-2855 VL - 2016 IS - 30 SP - 621 EP - 629 ER - TY - GEN A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Schmeißer, Dieter T1 - Localized defect states and charge trapping in atomic layer deposited-Al₂O₃ films T2 - Journal of Vacuum Science and Technology, A : Vacuum, Surfaces, and Films N2 - In this study, the authors compared different Al₂O₃ films grown by atomic layer deposition (ALD) with the same aluminum precursor but on different substrates. The authors employed different process parameters such as thermal-ALD and plasma-enhanced-ALD using different substrate temperatures ranging from 280 °C down to room temperature. They characterized these films by resonant photoelectron spectroscopy and by electrical measurements. They established that generally the ALD-Al₂O₃ films show characteristic features of bulk Al₂O₃. For all films investigated, the authors found intrinsic defect states within the electronic band gap and identified excitonic, polaronic, and charge-transfer defect states. The authors gave an atomistic model to explain these intrinsic defects and found that their relative abundance is subject of the choice of ALD parameters and of the substrate used. They were able to relate the spectroscopic assigned in-gap defect states with the electronic charges as determined in our electrical measurements. KW - defect states KW - resonant photoelectron spectroscopy (resPES) KW - Al₂O₃ KW - atomic layer deposition (ALD) KW - excitons KW - polarons Y1 - 2017 U6 - https://doi.org/10.1116/1.4971991 SN - 0734-2101 SN - 1520-8559 VL - 35 IS - 1 SP - 01B125-1 EP - 01B125-18 ER - TY - GEN A1 - Kot, Małgorzata A1 - Das, Chittaranjan A1 - Wang, Zhiping A1 - Henkel, Karsten A1 - Rouissi, Zied A1 - Wojciechowski, Konrad A1 - Snaith, Henry J. A1 - Schmeißer, Dieter T1 - Room-Temperature Atomic Layer Deposition of Al₂O₃: Impact on Efficiency, Stability and Surface Properties in Perovskite Solar Cells T2 - ChemSusChem N2 - In this work, solar cells with a freshly made CH₃NH₃PbI₃ perovskite film showed a power conversion efficiency (PCE) of 15.4 % whereas the one with 50 days aged perovskite film only 6.1 %. However, when the aged perovskite was covered with a layer of Al₂O₃ deposited by atomic layer deposition (ALD) at room temperature (RT), the PCE value was clearly enhanced. X-ray photoelectron spectroscopy study showed that the ALD precursors are chemically active only at the perovskite surface and passivate it. Moreover, the RT-ALD-Al2O3-covered perovskite films showed enhanced ambient air stability. KW - Al₂O₃ KW - atomic layer deposition (ALD) KW - perovskite KW - solar cells KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2016 U6 - https://doi.org/10.1002/cssc.201601186 SN - 1864-5631 SN - 1864-564X VL - 9 IS - 24 SP - 3401 EP - 3406 ER - TY - GEN A1 - Henkel, Karsten A1 - Das, Chittaranjan A1 - Kot, Małgorzata A1 - Schmeißer, Dieter A1 - Naumann, Franziska A1 - Kärkkänen, Irina A1 - Gargouri, Hassan T1 - In-gap states in titanium dioxide and oxynitride atomic layer deposited films T2 - Journal of Vacuum Science and Technology: A N2 - Valence band (VB) spectra of titanium dioxide (TiO2) and oxynitride (TiOxNy) films prepared by different atomic layer deposition (ALD) processes are compared and related to electrical characterization [current–voltage (JV) and capacitance–voltage (CV)] results. By increasing the nitrogen amount in the TiO2 film, band-gap narrowing is observed. The band-gap decrease is related to the contribution of the nitrogen density of states, which induces defects within the band-gap and thus reduces its optical band-gap. In-gap states are found in the VB spectra at 1 eV below the Fermi energy in all investigated ALD samples, i.e., in TiO2 as well as in TiOxNy films. An exponential correlation between leakage current density and in-gap state intensity is derived by the combination of JV measurements and VB spectra, whereas the in-gap states seem to have no influence on hysteresis and fixed oxide charges found in the CV data. It is argued that the in-gap states in TiO2 and TiOxNy have an excitonic or polaronic origin. Both, band-gap narrowing and in-gap state intensity can be tuned by the ALD process selection and the variation of its parameters. KW - Titanium dioxide (TiO2) KW - Titanium oxynitrdie (TiON) KW - valence band spectra KW - in-gap states KW - band-gap narrowing KW - electrical characterization Y1 - 2017 U6 - https://doi.org/10.1116/1.4972247 SN - 0734-2101 SN - 1520-8559 VL - 35 IS - 1 SP - 01B135-1 EP - 01B135-8 ER - TY - CHAP A1 - Garain, Samiran A1 - Adhikary, Prakriti A1 - Mandal, Dipankar A1 - Sen, Shrabanee A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Electro-active β-Phase Formation in Poly(vinylidene fluoride) Films by Hydrated Rare earth Metal Salt T2 - Proceeding of the International Conference on Nanotechnology 2013 (ICNT 2013) N2 - Polyvinylidene fluoride (PVDF) is a typical fluoro-polymer with complicated polymorphisms due to the semi-crystalline nature. Generally, four crystalline phases, α, β, γ and δ may exist in PVDF crystals. The nonpolar α- and δ-phase has a monoclinic lattice with trans-gauche conformation (TGTG⁄), which is thermodynamically most stable for PVDF. The polar β phase with all-trans (TTTT) planar zigzag conformation is attractive for its piezo-, pyro-, and ferroelectric properties. The polar β-Phase and also semi-polar γ-phase (TTTGTTTG⁄) have obtained wide device applications such as acoustic transducers, piezoelectric sensors, energy harvesting generators, pyroelectric sensors, non-volatile memories and energy storage capacitors. In this work, we explore the possibility to nucleate β-phase in PVDF hydrated salt composite films by addition of the hydrated Rare earth metal salt, (NH4)4 Ce (SO4)4, 2H2O) for the piezo- ferro and high dielectric based device applications. It has been found that the water molecules in (NH4)4 Ce (SO4)4, 2H2O could form hydrogen bonds with PVDF during the crystallization process and the hydrogen bonds promoted the electro-active crystalline β- phase in PVDF with all -trans conformations. In addition, the DMF (solvent used for films preparation) can also assist the rare-earth based nanoparticle preparation, as a result the electrostatic interaction of the surface charge of the nanoparticles and molecular dipoles in PVDF can resist the electroactive β- phase in PVDF. KW - PVDF KW - β-Phase KW - piezoelectric Y1 - 2013 SN - 978-81-927756-0-9 SP - S. 127 PB - Institute of Technology, Haldia, WB, India CY - Haldia ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Müller, Sebastian A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Wehner, Stefan T1 - In-situ analysis of moving reaction fronts for the bistable CO oxidation reaction on noble metal catalyst T2 - Extended Abstracts Book of First International Conference on Materials for Energy N2 - Experimental data on the reaction kinetics of catalytic processes are prerequisite for modeling of such reactions and their output. We investigate the CO oxidation on some noble metal catalysts, like Iridium(111) and Palladium(111) which is a bistable surface reaction. In a specific range of CO content in the feed gas islands of one or the other adsorbate nucleate and grow, which is recorded with photo electron emission microscopy (PEEM). During these transients the coverage on the surface changes from predominantly oxygen covered to predominantly CO covered resp. vice versa. But the resolution of PEEM and especially its unknown and nonlinear dependence of coverage of the two adsorbates (oxygen and CO) and image intensity make it impossible to extract the changes in coverage. On the other hand the reaction diffusion model based on the Langmuir-Hinshelwood-mechanism delivers the coverage of oxygen and carbon monoxide. The shapeand wall velocity of those islands has been connected perfectly to each other [CPL 423 (2006) 39], but not the absolute coverage and their variation during the reaction. Since the domain wall velocity is small on Iridium(111), this has opened the possibility for a detailed analysis of the changing coverage inside this domain wallutilizing synchrotron radiation and photo electron spectroscopy at BESSY II. The coverage profile of oxygen and CO inside a moving domain wall was measured for both cases using XPS spectra at O1s, C1s and the valence band during thereaction. Comparison with the reaction-diffusion-model and other catalytic surfaces, like Palladium(111) are done. KW - CO oxidation KW - Ir KW - Pd KW - photo electron emission microscopy (PEEM) Y1 - 2010 SN - 978-3-89746-117-8 SP - S. 932 PB - Dechema e.V. CY - Frankfurt ER - TY - CHAP A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Schmeißer, Dieter T1 - Localized defect states and charge trapping in Al₂O₃ films prepared by atomic layer deposition T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - The evaluation of the electronic structure and intrinsic defect mechanisms in Al₂O₃ thin films is essential for their effective use in applications with desired functionality such as surface passivation schemes for solar cells [1]. We present a comparative study of different Al₂O₃ films grown by atomic layer deposition (ALD) [2]. The layers were deposited on different substrates using the same aluminum precursor (TMA, trimethylalumium) and employing different process parameters (thermal-ALD, plasma-enhanced-ALD, substrate temperature). These films were characterized by resonant photoelectron spectroscopy and by electrical measurements (capacitance-voltage). For all films investigated intrinsic defect states within the electronic band gap were observed including excitonic, polaronic, and charge-transfer defect states, where their relative abundance is subject of the choice of ALD parameters and of the used substrate. The spectroscopic assigned in-gap defect states are related with electronic charges as determined in the electrical measurements. [1] G. Dingemans and W.M.M. Kessels, J. Vac. Sci. Technol. A 30, 040802 (2012). [2] K. Henkel, M. Kot, D. Schmeißer, J. Vac. Sci. Technol. A 35, (2017), accepted. KW - defect states KW - Al₂O₃ KW - resonant photoelectron spectroscopy KW - X-Ray absorption spectroscopy KW - capacitance-voltage measurements Y1 - 2017 UR - http://www.dpg-verhandlungen.de/year/2017/conference/dresden/part/ds/session/32/contribution/4 SN - 0420-0195 SP - S. 205 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Das, Chittaranjan A1 - Kot, Małgorzata A1 - Rouissi, Zied A1 - Kędzierski, Kamil A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Selective Deposition of an ultrathin Pt Layer on a Au-Nanoisland-Modified Si Photocathode for Hydrogen Generation T2 - ACS Omega N2 - Platinum, being the most efficient and stable catalyst, is used in photoelectrochemical (PEC) devices. However, a minimal amount of Pt with maximum catalytic activity is required to be used to minimize the cost of production. In this work, we use an environmentally friendly, ost-effective, and less Pt-consuming method to prepare PEC devices for the hydrogen evolution reaction (HER). The Pt monolayer catalyst is selectively deposited on a Au-nanoisland-supported boron-doped p-type Si (100) photocathode. The PEC device based on the Si photocathode with an ultralow loading of the Pt catalyst exhibits a comparable performance for the HER to that of devices with a thick Pt layer. In addition, we demonstrate that by using a thin TiO2 layer deposited by atomic layer deposition photo-oxidation of the Si photocathode can be blocked resulting in a stable PEC performance. KW - water splitting KW - hydrogen evolution reaction (HER) KW - Si photocathode KW - gold nanoislands KW - nanostructured platinum Y1 - 2017 U6 - https://doi.org/10.1021/acsomega.6b00374 SN - 2470-1343 VL - 2 IS - 4 SP - 1360 EP - 1366 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Das, Chittaranjan A1 - Brizzi, Simone A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Schmeißer, Dieter T1 - Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition T2 - Surface and Coatings Technology N2 - A comparative study of thin titanium oxynitride (TiOxNy) films prepared by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium (TDMAT) and N2 plasma as well as titanium(IV)isopropoxide and NH3 plasma is reported. The comparison is based on the combination of Ti2p core level and valence band spectroscopy and current-voltage measurements. The TDMAT/N2 process delivers generally higher fractions of TiN and TiON within the Ti2p spectra of the films and stronger photoemissions within the bandgap as resolved in detail by high energy resolution synchrotron-based spectroscopy. In particular, it is shown that higher TiN contributions and in-gap emission intensities correlate strongly with increased leakage currents within the films and might be modified by the process parameters and precursor selection. KW - Titanium oxynitride KW - Plasma enhanced atomic layer deposition (PEALD) KW - ALD process parameters KW - Ti-N contributions KW - In-gap defect states KW - Leakage current Y1 - 2017 U6 - https://doi.org/10.1016/j.surfcoat.2016.11.094 SN - 0257-8972 SN - 1879-3347 VL - 324 SP - 586 EP - 593 ER - TY - GEN A1 - Biswas, Anirban A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Comparison of the thermal stability of the α, β and γ phases in poly(vinylidene fluoride) based on in situ thermal Fourier transform infrared spectroscopy T2 - Phase Transitions N2 - The electroactive β phase of poly(vinylidenefluoride) (PVDF) is induced due to the aging time of PVDF solutions. The feasibility of the combination of the three crystalline polymorphs (α, β and γ) is demonstrated where their relative proportion within the PVDF film can be tailored by the simple monitoring of the preparation conditions. To identify all these phases, Fourier transform infrared (FT-IR) spectroscopy is carried out and it is spotlighted that the vibrational bands at 510 and 841 cm-1 are not sufficient to state the formation of the β phase. The main aim of this work is devoted to develop a better understanding on the thermal stability of these several phases of PVDF, which has a longstanding ambiguity persisting in this area. It has been found that the in situ thermal FT-IR spectroscopy is one of the best alternatives to understand this important issue. It is ascertained that the β phase is the least thermally stable phase among α, β and γ phases, whereas the γ phase is the most thermally stable phase. KW - PVDF KW - thermal stability KW - β-phase KW - infrared spectroscopy KW - in situ thermal FT-IR study Y1 - 2017 U6 - https://doi.org/10.1080/01411594.2017.1337902 SN - 0141-1594 SN - 1029-0338 VL - 90 IS - 12 SP - 1205 EP - 1213 ER - TY - GEN A1 - Kot, Małgorzata A1 - Das, Chittaranjan A1 - Henkel, Karsten A1 - Wojciechowski, Konrad A1 - Snaith, Henry J. A1 - Schmeißer, Dieter T1 - Room temperature atomic layer deposited Al₂O₃ on CH₃NH₃PbI₃ characterized by synchrotron-based X-ray photoelectron spectroscopy T2 - Nuclear Instruments and Methods in Physics Research B N2 - An ultrathin Al₂O₃ film deposited on methylammonium lead triiodide (CH₃NH₃PbI₃) perovskite has the capability to suppress the carrier recombination process and improve the perovskite solar cells efficiency and stability. However, annealing at temperatures higher than 85°C degrades the CH₃NH₃PbI₃ perovskite film. The X-ray photoelectron spectroscopy study performed in this work indicates that it is possible to grow Al₂O₃ by atomic layer deposition on the perovskite at room temperature, however, besides pure Al₂O₃ some OH groups are found and the creation of lead and iodine oxides at the Al₂O₃/CH₃NH₃PbI₃ interface takes place. KW - Synchrotron-based X-ray photoelectron spectroscopy KW - Perovskite solar cells KW - Atomic layer deposition KW - Al₂O₃ Y1 - 2017 U6 - https://doi.org/10.1016/j.nimb.2017.01.082 SN - 0168-583X SN - 1872-9584 VL - 411 SP - 49 EP - 52 ER - TY - GEN A1 - Müller, Klaus A1 - Bär, Werner A1 - Henkel, Karsten A1 - Jahnke, Agnes A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Organische Feldeffekttransistoren als Transducer in der Biosensorik T1 - Organic Field Effect Transistors as Biosensors T2 - Technisches Messen N2 - In diesem Beitrag wird der Einsatz neuartiger Sensortypen für die medizinische Diagnostik beschrieben. Diese Sensoren sollen komplett organisch sein und auf dem Prinzip des Feldeffekttransistors basieren. Als Modellsystem für die Anwendung in der Biosensorik soll die Einsatzmöglichkeit dieser Sensoren in der nicht-invasiven Diagnostik der Helicobacter-pylori-Infektion überprüft werden. N2 - In this contribution we describe the investigation of new types of sensors in medical diagnosis. These sensors are completely organic and are based on the principle of organic field effect transistors. As model system for application in medical diagnosis we test the usability of this sensors for the diagnosis of helicobacter pylori. KW - Feldeffekttransistor KW - Biosensorik KW - Helicobacter pylori KW - Field effect transistors KW - biosensors KW - helicobacter pylori Y1 - 2003 U6 - https://doi.org/10.1524/teme.70.12.565.20261 SN - 0171-8096 VL - 70 IS - 12 SP - 565 EP - 568 ER - TY - GEN A1 - Kot, Małgorzata A1 - Łobaza, Justyna A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study T2 - Journal of Vacuum Science and Technology A N2 - The surface oxidation of a titanium oxynitride (TiOxNy) film after long-time storage of 25 month in ambient conditions is investigated. The TiOxNy film is prepared by plasma-enhanced atomic layer deposition using etrakis(dimethylamino)titanium and nitrogen plasma, and the film is characterized by Ar+ ion sputtering of the film surface in combination with x-ray photoelectron spectroscopy (XPS) as well as by angle-resolved XPS. The total thickness of an oxygen-enriched layer at the surface of the TiOxNy films is found to be about 0.7 nm and it consists of a sequence of a 0.4 nm thick TiON/TiO2 enriched layer followed by a 0.3 nm thick TiO2 enriched layer underneath compared to the bulk composition of the film which shows constant values of 29% TiN, 29% TiO2, and 42% TiON. The results suggest that the TiON enrichment takes place initially at the surface followed by a surface and subsurface oxidation. KW - atomic layer deposition (ALD) KW - surface oxidation KW - X-Ray photoelectron spectroscopy (XPS) KW - titanium oxynitride Y1 - 2018 U6 - https://doi.org/10.1116/1.5003356 SN - 0734-2101 SN - 1520-8559 VL - 36 IS - 1 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten T1 - Intrinsic defects and multiple-atom processes in the oxidic semiconductor Ga₂O₃ T2 - Journal of Applied Physics N2 - We report on the electronic structure of gallium oxide (Ga₂O₃) single crystals as studied by resonant photoelectron spectroscopy (resPES). We identify intrinsic electronic defects that are formed by mixed-atomic valence states. We differentiate three coexisting defect states that differ in their electronic correlation energy and their spatial localization lengths. Their relative abundance is described by a fractional ionicity with covalent and ionic bonding contributions. For Ga₂O₃, our analyses of the resPES data enable us to derive two main aspects: first, experimental access is given to determine the ionicity based on the original concepts of Pauling and Phillips. Second, we report on multi-atomic energy loss processes in the Ga2p core level and X-ray absorption data. The two experimental findings can be explained consistently in the same context of mixed-atomic valence states and intrinsic electronic defects. KW - resonat photoelectron spectroscopy (resPES) KW - X-Ray absorption KW - gallium oxide (Ga₂O₃) KW - intrinsic electronic defects KW - band scheme Y1 - 2018 U6 - https://doi.org/10.1063/1.5010740 SN - 0021-8979 SN - 1089-7550 VL - 123 IS - 16 SP - 161596-1 EP - 161596-9 ER - TY - CHAP A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Schmeißer, Dieter T1 - One-Pot Synthesis of Copper Oxide Nanowires and PVDF/CuO Composite Films for Piezoelectric Energy Harvesting Application T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Band 53,3 N2 - Copper oxide (CuO) is an attractive p-type oxide semiconductor with narrow band gap that has intriguing properties such as non-toxicity, chemical stability, electrocatalytic activity, abundant availability and low production cost. Polymeric materials have attracted great interest owing to their high flexibility, light weight, low cost production and high resistance against corrosion. Poly(vinylidene fluoride) (PVDF) is a commonly used piezoelectric polymer due to its excellent flexibility and piezoelectric properties. In this work, we adopted a one-pot synthesis of CuO nanowires by facile and selective chemical etching process of Cu substrate. XPS, XRD, SEM data ascribed the formation of polycrystalline CuO nanowires over the entire Cu surface. It has been observed that the uniformity, shape and size of the nanowires could be conveniently controlled by etching time and etchant concentration. We have also prepared piezoelectric nanogenerator based on the flexible PVDF/CuO composite film, where the traditional electrical poling treatment was avoided. In addition, dielectric properties have been studied to demonstrate the role of interfacial polarization. KW - PVDF KW - electroactive phase KW - nanogenerators KW - energy storage Y1 - 2018 UR - https://www.dpg-verhandlungen.de/year/2018/conference/berlin/part/cpp/session/20/contribution/21 SN - 0420-0195 SP - S. 135 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Kot, Małgorzata A1 - Naumann, Franziska A1 - Garain, Samiran A1 - Poźarowska, Emilia A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Aluminum nitride films prepared by plasma atomic layer deposition using different plasma sources T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Band 53,3 N2 - Aluminum nitride (AlN) thin films are promising for versatile applications in optoelectronics, electronics, piezoelectrics, and acoustics due to their remarkable properties such as wide band gap, high dielectric constant, low electrical conductivity, good piezoelectric coefficient and high ultrasonic velocity. We present a comparative study of AlN films grown by plasma-enhanced atomic layer deposition at 350°C silicon wafers in the SENTECH SI ALD LL system using TMA and NH3 where either a capacitively coupled plasma (CCP) or a direct PTSA (planar triple spiral antenna) source was applied. The films were characterized by ellipsometry, XPS and electrical measurements. The layer properties are discussed concerning the varied ALD process parameters. In general, the process using the direct PTSA source delivered films with higher refractive index and better homogeneity over the wafer achieving also higher growth rates per cycle (GPC) in reduced total cycle durations. Films with refractive index in the range of 2.05 and permittivity around 8 could be realized with a GPC of 1.54 Å/cycle. KW - Aluminium nitride KW - plasma-enhanced atomic layer deposition (PEALD) KW - ellispsometry KW - field emission scanning electron microscopy KW - atomic force microscopy KW - X-ray photoelectron spectroscopy KW - electrical characterization Y1 - 2018 SN - 0420-0195 SP - S. 170 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Garain, Samiran A1 - Sen, Shrabanee A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Enhancement of Electroactive β-phase and Superior Dielectric Properties in Cerium Based Poly(vinylidene fluoride) Composite Films T2 - Materials Today: proceedings N2 - In this work we report on the preparation of poly(vinylidene fluoride) (PVDF) films with various mass fractions (wt%) of hydrated rare earth metal salt [(NH4)4Ce(SO4)4.2H2O] (CAS) and its electroactive phase (β- and γ-phase) formation. It was found that CAS can yield high amount of electroactive phases in PVDF. Compared to the neat PVDF film, a significantly increment of dielectric constant (ε ∼ 41) and a low loss factor (tan δ ∼ 0.8) were observed in the PVDF-CAS composite films. Thus the PVDF-CAS composite films with high electroactive phase and superior dielectric properties may meet the requirements of next generation electronic components. KW - PVDF KW - High amount of electroactive phase KW - Superior dielectric properties Y1 - 2018 U6 - https://doi.org/10.1016/j.matpr.2017.11.003 SN - 2214-7853 VL - 5 IS - 3 part 3 SP - 10084 EP - 10090 ER - TY - CHAP A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Richter, Matthias A1 - Tallarida, Massimo A1 - Schmeißer, Dieter ED - Wandelt, Klaus T1 - An (In Situ)² Approach: ALD and resPES Applied to Al₂O₃, HfO₂, and TiO₂ Ultrathin Films T2 - Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry, Vol. 3.1 N2 - Oxide surface coatings are of importance in tailoring interface properties with respect to surface passivation, adjustment of surface potentials, or providing active centers for surface reactions. In this contribution, we report about surface coatings prepared by the atomic layer deposition (ALD) method. ALD is known for its conformal growth of ultrathin, dense films which exhibit a low concentration of pinholes. KW - Atomic layer deposition (ALD) KW - Resonant photoelectron spectroscopy (resPES) KW - Band scheme KW - Partial density of states (pDOS) KW - Intrinsic charges KW - Intrinsic defects KW - Aluminum oxide (Al₂O₃) KW - Hafnium oxide (HfO₂) KW - Titanium oxide(TiO₂) Y1 - 2018 SN - 978-0-12-809739-7 SN - 978-0-12-809894-3 U6 - https://doi.org/10.1016/B978-0-12-409547-2.13852-1 SP - 18 EP - 26 PB - Elsevier CY - Oxford ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Kot, Małgorzata A1 - Corrêa, Silma Alberton A1 - Das, Chittaranjan A1 - Henkel, Karsten ED - Wandelt, Klaus T1 - Interface Potentials, Intrinsic Defects, and Passivation Mechanisms in Al₂O₃, HfO₂, and TiO₂ Ultrathin Films T2 - Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry, vol. 3.1 N2 - We study the electronic structure of ultrathin Al₂O₃, HfO₂, and TiO₂ ALD films by resonant photoelectron spectroscopy. We identify intrinsic defects which are responsible for the active sites in interface reactions, for the incorporation of intrinsic charges, and for the formation of local dipole momenta. All of these features determine the surface potentials and the reactivity of the surface of the atomic layer deposition coated systems. We give examples of charges and dipoles in Al₂O₃, on a study of the surface potentials in HfO₂, and relate the intrinsic defects in TiO₂ to their electrochemical relevance. KW - Atomic layer deposition (ALD) KW - Resonant photoelectron spectroscopy (resPES) KW - Band scheme KW - Interface potential KW - Intrinsic charges KW - Intrinsic defects KW - Partial density of states (pDOS) KW - Exciton KW - Polaron KW - Ligand-to-metal charge transfer KW - Aluminium oxide (Al₂O₃) KW - Hafnium oxide (HfO₂) KW - Titanium Oxide (TiO₂) Y1 - 2018 SN - 978-0-12-809739-7 SN - 978-0-12-814984-3 U6 - https://doi.org/10.1016/B978-0-12-409547-2.14119-8 SP - 162 EP - 171 PB - Elsevier CY - Oxford ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Janowitz, Christoph T1 - Ionicity of ZnO - a key system for transparent conductive oxides T2 - epl : a letters journal exploring the frontiers of physics N2 - The electronic structure of ZnO is dominated by coexisting electron and ionic states/bonds caused by charge polarization and self-trapping phenomena of the valence charges. Their interplay manifests itself in intrinsic electronic defects which have different degree of spatial localization and electronic correlation. The relative abundance of intrinsic defects can be determined by the ionicity factor fi and its value can be derived from three independent experimental procedures in a consistent way. This approach also explains the complex satellite features in the XPS and XAS data. Ionicity and satellite formation are two experimental findings which can be explained consistently in the same context of mixed-atomic valence states and intrinsic electronic defects. KW - Ionicity KW - zinc oxide (ZnO) KW - resonant photoelectron spectroscopy KW - defect states KW - transparent conductive oxide (TCO) Y1 - 2018 U6 - https://doi.org/10.1209/0295-5075/123/27003 SN - 1286-4854 SN - 0295-5075 VL - 123 IS - 2 SP - 27003-p1 EP - 27003-p7 ER - TY - CHAP A1 - Henkel, Karsten A1 - Haeberle, Jörg A1 - Müller, Klaus A1 - Janowitz, Christoph A1 - Schmeißer, Dieter ED - Fornari, Robert T1 - Preparation, properties and electronic structure of SnO₂ T2 - Single Crystals of Electronic Materials N2 - This chapter reports about tin oxide (SnO₂), a material which belongs to the transparent conducting oxide family and is best characterized by its high conductivity, high carrier mobility, and the ability to form p-type conductivity. We correlate these properties in terms of localized intrinsic electronic defect states which are resolved by resonant photoelectron spectroscopy measurements. We describe SnO₂ in terms of an inhomogeneous, mixed-ionic-covalent semiconductor in which these intrinsic electronic defects state are stabilized. KW - electronic structure KW - tin oxide (SnO₂) KW - resonant photoelectron spectroscopy KW - intrinsic defect states Y1 - 2018 SN - 978-0-08-102096-8 SN - 978-0-08-102097-5 SP - 547 EP - 572 PB - Elsevier, Woodhead Publishing CY - Duxford ER - TY - GEN A1 - Maity, Kuntal A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Natural Sugar-Assisted, Chemically Reinforced, Highly Durable Piezoorganic Nanogenerator with Superior Power Density for Self-Powered Wearable Electronics T2 - ACS Applied Materials & Interfaces N2 - Natural piezoelectric materials are of increasing interest, particularly for applications in biocompatible, implantable, and flexible electronic devices. In this paper, we introduce a cost-effective, easily available natural piezoelectric material, that is, sugar in the field of wearable piezoelectric nanogenerators (PNGs) where low electrical output, biocompatibility, and performance durability are still critical issues. We report on a high-performance piezoorganic nanogenerator (PONG) based on the hybridization of sugar-encapsulated polyvinylidenefluoride (PVDF) nanofiber webs (SGNFW). We explore the crucial role of single-crystal sugar having a fascinating structure along with the synergistic enhancement of piezoelectricity during nanoconfinement of sugar-interfaced macromolecular PVDF chains. As a consequence, the SGNFW-based PONG exhibits outstanding electricity generation capability (e.g.,∼100 V under 10 kPa human finger impact and maximum power density of 33 mW/m2) in combination with sensitivity to abundantly available different mechanical sources (such as wind flow, vibration, personal electronics, and acoustic vibration). Consequently, it opens up suitability in multifunctional self-powered wearable sensor designs for realistic implementation. In addition, commercially available capacitors are charged up effectively by the PONG because of its rapid energy storage capability. The high performance of the PONG not only offers“battery-free”energy generation (several portable units of light-emitting diodes and a liquid crystal display screen are powered up without using external storage) but also promises its use in wireless signal transmitting systems, which widens the potential in personal health care monitoring. Furthermore, owing to the geometrical stress confinement effect, the PONG is proven to be a highly durable power-generating device validated by stability test over 10 weeks. Therefore, the organic nanogenerator would be a convenient solution for portable personal electronic devices that are expected to operate in a self-powered manner. KW - natural piezoelectric material KW - sugar KW - PVDF KW - organic piezoelectric nanogenerator KW - high performance and durability KW - self-powered electronics Y1 - 2018 U6 - https://doi.org/10.1021/acsami.8b15320 SN - 1944-8244 SN - 1944-8252 VL - 10 SP - 44018 EP - 44032 ER - TY - GEN A1 - Biswas, Anirban A1 - Garain, Samiran A1 - Maity, Kuntal A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Influence of In situ Synthesized Bismuth Oxide Nanostructures in Self-poled PVDF-based Nanogenerator for Mechanical Energy Harvesting Application T2 - Polymer Composites N2 - A self-poled piezoelectric nanogenerator (NG) based on bismuth oxide (Bi2O3) nanostructures (BNS)-doped poly(vinylidene fluoride) (PVDF) is demonstrated. The in-situ formation of BNS incorporated in the PVDF matrix is realized through a simple solution casting technique that favors the nucleation and stabilization of 99.6% of the electroactive phase in PVDF (i.e., beta/gamma-phases). The enhancement of the output voltage (3.6 V) and current (2.4mA) of the NG based on a nonelectrically poled BNS containing PVDF composite film is achieved and demonstrated by simple repeated human finger imparting. The improvement of the output performance is influenced by the generation of the electroactive polar beta-phase in PVDF, due to the electrostatic interactions between the –CH2–/–CF2– dipoles of PVDF and the surface charge of the BNS. The NGs are able to charge up capacitors demonstrating that the power generation from such a hybrid device structure can be utilized for powering various portable devices. KW - Nanogenerators KW - energy harvesting KW - PVDF KW - bismuth oxide KW - Field-emission scanning electron microscopy (FESEM) KW - X-ray photoelectron spectroscopy (XPS) KW - X-ray diffraction (XRD) KW - Fourier Transform Infrared Spectroscopy (FTIR) Y1 - 2019 U6 - https://doi.org/10.1002/pc.24628 SN - 0272-8397 SN - 1548-0569 VL - 40 IS - S1 SP - E265 EP - E274 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Tarnawska, Lidia Lupina A1 - Wilker, Viola A1 - Kus, Peter A1 - Pożarowska, Emilia A1 - Garain, Samiran A1 - Rouissi, Zied A1 - Schmeißer, Dieter T1 - Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources T2 - Journal of Vacuum Science and Technology A N2 - A comparative study of thin aluminum nitride (AlN) films deposited by plasma-enhanced atomic layer deposition in the SENTECH SI ALD LL system applying either a direct inductively coupled plasma (ICP) or an indirect capacitively coupled plasma (CCP) source is presented. The films prepared with the ICP source (based on a planar triple spiral antenna) exhibit improved properties concerning the growth rate per cycle, total cycle duration, homogeneity, refractive index, fixed and mobile electrical charges, and residual oxygen content compared to the CCP source, where the comparison is based on the applied plasma power of 200 W. The increase of the plasma power to 600 W in the ICP process significantly reduces the residual oxygen content and enhances the electrical breakdown field. The AlN layers grown under these conditions, with a growth rate per cycle of 1.54 Å/cycle, contain residual oxygen and carbon concentrations of about 10% and 4%, respectively, and possess a refractive index of 2.07 (at 632.8 nm). KW - Plamsa-enhanced atomic layer deposition (PEALD) KW - inductively coupled KW - capacitively coupled KW - plamsa source KW - ellipsometry KW - X-ray photoelectron spectroscopy (XPS) KW - X-ray diffraction (XRD) KW - Field emission scanning electron microscopy (FESEM) KW - capacitance-voltage (CV) KW - atomic force microscopy Y1 - 2019 U6 - https://doi.org/10.1116/1.5079628 SN - 0734-2101 SN - 1520-8559 VL - 37 IS - 2 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Pożarowska, Emilia A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Flege, Jan Ingo T1 - Depth profiling of PEALD-AlN films based on Al2p XPS peak decomposition T2 - Verhandlungen der DPG N2 - AlN has remarkable properties (wide band gap, low electrical and thermal conductivity, high dielectric constant, piezoelectricity) and is attractive for (opto)electronic and sensor applications. However, high oxygen content within nitride films is always a critical issue due to the thermodynamically favorable oxidation against nitridation resulting in deteriorated materials properties. In order to clarify whether the oxidation is a surface-limited or a bulk process elemental depth profiling is essential. In this work XPS in combination with Ar+ sputtering is applied to carry out depth profiling of AlN films prepared by plasma-enhanced atomic layer deposition using different parameters (plasma source, power and pulse duration). Particularly, the Al2p core levels are analyzed where the signals are decomposed into four components, representing weaker contributions of pure AlN and aluminum oxide phases as well as stronger signals of mixed oxygen-rich and nitrogen-rich phases. After sputtering (providing access to the deeper part of the film) the pure AlN phase content increases while the pure aluminum oxide content stays relatively constant. These issues are discussed with regard to the preparation parameters employed and accompanying XRD and electrical measurements. KW - X-Ray photoelectron spectroscopy (XPS) KW - peak decomposition KW - plasma enhanced atomic layer deposition (PEALD) KW - aluminium nitride (AlN) Y1 - 2019 UR - https://www.dpg-verhandlungen.de/year/2019/conference/regensburg/part/ds/session/14/contribution/25 SN - 0420-0195 SP - 157 EP - 157 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Roy, Krittish A1 - Ghosh, Sujoy Kumar A1 - Sultana, Ayesha A1 - Garain, Samiran A1 - Xie, Mengying A1 - Bowen, Christopher Rhys A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - A Self-Powered Wearable Pressure Sensor and Pyroelectric Breathing Sensor Based on GO Interfaced PVDF Nanofibers T2 - ACS Applied Nano Materials N2 - This paper reports a self-powered,flexible, piezo- and pyro-electric hybrid nanogenerator (NG) device that can be fixed on different locations of human skin for detecting static and dynamic pressure variations and can also monitor temperature fluctuations during the respiration process. An efficient and cost-effective fabrication strategy has been developed to create electrospun poly(vinylidene fluoride) (PVDF)/graphene oxide (GO) nanofibers, which are used to create a highly sensitive wearable pressure sensor and pyroelectric breathing sensor. The sensor can accurately and rapidly detect pressures as low as 10 Pa with a high sensitivity (4.3 V/kPa), a key performance indicator for wearable sensors. Importantly, the sensor exhibits a high sensitivity to bending and stretching by finger, wrist, and elbow. The pressure sensor is also highly sensitive to vocal vibrations when attached to the human throat. The device can generate a maximum output power density of∼6.2 mW/m2 when subjected to a compressive stress, which enhances its range of applications. Moreover, it is demonstrated that doping with GO improves the pyroelectric energy harvesting and sensing performance of the device under repeated temperature fluctuations. The PVDF/GO-based nanogenerator has a maximum pyroelectric output power density of∼1.2 nW/m2 and can sense temperature changes during respiration, which makes it promising as a pyroelectric breathing sensor. It is demonstrated that processing of the PVDF-GO self-powered multifunctional pressure and pyroelectric breathing sensor can be up-scaled for fabricating compact and high-performance electronic skins for application in health monitoring, motion detection, and portable electronics. KW - piezo- and pyro-electric hybrid nanogenerator KW - poly(vinylidenefluoride) (PVDF)/graphene oxide (GO) nanofibers KW - wearable pressure sensor KW - breathing sensor Y1 - 2019 U6 - https://doi.org/10.1021/acsanm.9b00033 SN - 2574-0970 VL - 2 IS - 4 SP - 2013 EP - 2025 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Pożarowska, Emilia A1 - Kegelmann, Lukas A1 - Tsud, Nataliya A1 - Kot, Małgorzata T1 - Point Defect-Mediated Interface Formation and Appearance of a Cooper Minimum for AlOₓ Atomic-Layer-Deposited Films on CH₃NH₃PbI₃ T2 - The Journal of Physical Chemistry. C N2 - We report on the interaction of CH₃NH₃PbI₃ substrates with AlOx films prepared by atomic layer deposition at room temperature. We use synchrotron radiation-based photoemission spectroscopy and study the Pb 4f, I 3d, and Al 2p core levels as well as the corresponding valence band states (Pb 5d and O 2p). A Cooper minimum is observed for both the Pb 5d and O 2p states, and it indicates that the bonding at the interface must be covalent. We focus on the electronic properties of the substrate and its interface and identify a delicate charge balance between polaronic and excitonic states in MAPI and AlOₓ. The perovskite vacancy sites, identified by changes in the core-level intensities, mediate the charge balance and covalent interaction. KW - Resonant photoelectron spectroscopy KW - Al₂O₃-CH₃NH₃PbI₃ interaction KW - Cooper minimum KW - point defects in CH₃NH₃PbI₃ KW - electronic structure of CH₃NH₃PbI₃ Y1 - 2019 U6 - https://doi.org/10.1021/acs.jpcc.9b05282 SN - 1932-7447 SN - 1932-7455 VL - 123 IS - 38 SP - 23352 EP - 23360 ER -