TY - GEN A1 - Morales, Carlos A1 - Tschammer, Rudi A1 - Pożarowska, Emilia A1 - Kosto, Julia A1 - Villar‐Garcia, Ignacio J. A1 - Pérez‐Dieste, Virginia A1 - Favaro, Marco A1 - Starr, David E. A1 - Kapuścik, Paulina A1 - Mazur, Michał A1 - Wojcieszak, Damian A1 - Domaradzki, Jarosław A1 - Alvarado, Carlos A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Hydrogen sensing via heterolytic H₂ activation at room temperature by atomic layer deposited ceria T2 - ChemSusChem : chemistry, sustainability, energy, materials N2 - Ultrathin atomic layer deposited ceria films (<20 nm) are capable of H2 heterolytic activation at room temperature, undergoing a significant reduction regardless of the absolute pressure, as measured under in‐situ conditions by near ambient pressure X‐ray photoelectron spectroscopy. ALD‐ceria can gradually reduce as a function of H2 concentration under H2/O2 environments, especially for diluted mixtures below 10 %. At room temperature, this reduction is limited to the surface region, where the hydroxylation of the ceria surface induces a charge transfer towards the ceria matrix, reducing Ce4+ cations to Ce3+. Thus, ALD‐ceria replicates the expected sensing mechanism of metal oxides at low temperatures without using any noble metal decorating the oxide surface to enhance H2 dissociation. The intrinsic defects of the ALD deposit seem to play a crucial role since the post‐annealing process capable of healing these defects leads to decreased film reactivity. The sensing behavior was successfully demonstrated in sensor test structures by resistance changes towards low concentrations of H2 at low operating temperatures without using noble metals. These promising results call for combining ALD‐ceria with more conductive metal oxides, taking advantage of the charge transfer at the interface and thus modifying the depletion layer formed at the heterojunction. KW - Atomic Layer Deposition KW - Ceria KW - Hydrogen Sensing KW - X-Ray photoelectron spectroscopy KW - Raman spectroscopy KW - Resitive sensor Y1 - 2025 U6 - https://doi.org/10.1002/cssc.202402342 SN - 1864-5631 VL - 18 IS - 13 SP - 1 EP - 13 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Morales, Carlos A1 - Tschammer, Rudi A1 - Guttmann, Dominic A1 - Chavarin, Carlos Alvarado A1 - Ruffert, Christine A1 - Henkel, Karsten A1 - Wenger, Christian A1 - Flege, Jan Ingo T1 - Bottom-up strategy to develop ultrathin active layers by atomic layer deposition for room temperature hydrogen sensors compatible with CMOS technology T2 - MikroSystemTechnik Kongress 2025 : Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveränität : proceedings : 27.-29. Oktober 2025, Duisburg Y1 - 2025 SN - 978-3-8007-6614-7 SN - 978-3-8007-6615-4 SP - 71ff. PB - VDE VERLAG GmbH CY - Berlin ER - TY - GEN A1 - Kao, Ming-Chao A1 - Schewe, Lukas Paul A1 - Akhtar, Arub A1 - Vlad, Alina A1 - Keller, Thomas F. A1 - Henkel, Karsten A1 - Anooz, Saud Bin A1 - Popp, Andreas A1 - Galazka, Zbigniew A1 - Flege, Jan Ingo A1 - Stierle, Andreas A1 - Vonk, Vedran T1 - Surface termination of β-Ga₂O₃(100) as-cleaved single crystals T2 - Applied physics letters N2 - The surface of β-Ga₂O₃ single crystals cleaved along their (100) plane is investigated using surface x-ray diffraction and atomic force microscopy. The results show the surface to consist of a single, so-called B-termination, which means that the crystal cleaves at planes formed by edge-sharing oxygen octahedra, thereby breaking the longest and weakest Ga–O bonds. Refinement of the atomic positions results in small displacements from the bulk structure, at most approximately 0.01 Å. Atomic force microscopy suggests that relatively large terraces form together with steps of half the a-axis length of approximately 0.6 nm, which means that terraces have the same atomic termination, related by the crystal symmetry. These results are important as a fundamental property of β-Ga₂O₃ when processed or used in various semiconductor applications. KW - X-ray KW - Gallium oxide Y1 - 2026 U6 - https://doi.org/10.1063/5.0309937 SN - 0003-6951 VL - 128 IS - 7 SP - 1 EP - 5 PB - AIP Publishing CY - Melville, NY ER -