TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Pożarowska, Emilia A1 - Kegelmann, Lukas A1 - Tsud, Nataliya A1 - Kot, Małgorzata T1 - Point Defect-Mediated Interface Formation and Appearance of a Cooper Minimum for AlOₓ Atomic-Layer-Deposited Films on CH₃NH₃PbI₃ T2 - The Journal of Physical Chemistry. C N2 - We report on the interaction of CH₃NH₃PbI₃ substrates with AlOx films prepared by atomic layer deposition at room temperature. We use synchrotron radiation-based photoemission spectroscopy and study the Pb 4f, I 3d, and Al 2p core levels as well as the corresponding valence band states (Pb 5d and O 2p). A Cooper minimum is observed for both the Pb 5d and O 2p states, and it indicates that the bonding at the interface must be covalent. We focus on the electronic properties of the substrate and its interface and identify a delicate charge balance between polaronic and excitonic states in MAPI and AlOₓ. The perovskite vacancy sites, identified by changes in the core-level intensities, mediate the charge balance and covalent interaction. KW - Resonant photoelectron spectroscopy KW - Al₂O₃-CH₃NH₃PbI₃ interaction KW - Cooper minimum KW - point defects in CH₃NH₃PbI₃ KW - electronic structure of CH₃NH₃PbI₃ Y1 - 2019 U6 - https://doi.org/10.1021/acs.jpcc.9b05282 SN - 1932-7447 SN - 1932-7455 VL - 123 IS - 38 SP - 23352 EP - 23360 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Kegelmann, Lukas A1 - Albrecht, Steve A1 - Tsud, Nataliya A1 - Kús, Peter A1 - Matolinová, Iva A1 - Schmeißer, Dieter T1 - Al2O3-Atomic Layer Deposited Films on CH3NH3PbI3 : Intrinsic Defects and Passivation Mechanisms T2 - Energy Technology , The Journal of Physical Chemistry C N2 - The initial interaction of atomic layer deposited films of Al2O3 at room temperature on CH3NH3PbI3 (MAPI) films is studied. Synchrotron radiation–based photoelectron spectroscopy is applied to analyze the initial changes in the Al-derived features by comparing samples with different Al2O3 film thicknesses. It is found that polarons and excitons, both intrinsic defects of Al2O3, play a key role in the interface formation. The polaronic states uptake a charge from the MAPI substrate. This charge is transferred to and stabilized in the excitonic state of Al2O3 which is assigned to predominately tetrahedral coordinated Al sites. This charge transfer is initiated by vacancies present in the MAPI substrate and stabilizes a covalent bonding at the Al2O3–MAPI interface but also causes a roughening of the interface which may lead to the formation of grain boundaries. On top of the rough interface, 2D Al2O3 clusters with an increasing number of octahedrally coordinated Al—O bonds grow, and with increasing Al2O3 coverage, they introduce self-healing of the structural defects. KW - charge donation and transfer cycles KW - covalent interfaces KW - defect monitoring KW - model of Al2O3–CH3NH3PbI3 interactions KW - resonant photoelectron spectroscopy Y1 - 2019 U6 - https://doi.org/10.1002/ente.201900975 SN - 2194-4288 SN - 2194-4296 VL - 7 IS - 11 ER - TY - GEN A1 - Naumann, Franziska A1 - Reck, Johanna A1 - Gargouri, Hassan A1 - Gruska, Bernd A1 - Blümich, Adrian A1 - Mahmoodinezhad, Ali A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - In situ real-time and ex situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition T2 - Journal of Vacuum Science and Technology B N2 - In situ real-time ellipsometry (irtE) with a very high time resolution of 24 ms was applied to monitor the inductively coupled plasma enhanced atomic layer deposition (ALD) process of Al₂O₃ thin films to precisely resolve each step of the ALD process and its complete cycle. The influence of plasma power, plasma pulse duration, and deposition temperature on the film growth characteristics was investigated. Ex situ ellipsometry [UV-VIS-NIR-SE (ultraviolet-visible-nearinfrared-spectroscopic ellipsometry) and IR-SE (infrared spectroscopic ellipsometry)] and x-ray photoelectron spectroscopy revealed the bulk properties (thickness, refractive index, chemical composition, and carbon incorporation) of the films, which together with the in situ results are compared to those of the films prepared by thermal ALD (T-ALD). The ICPEALD (inductively coupled plasma enhanced ALD) films were deposited at substrate temperatures between 80 and 250 °C and the role of plasma power (50–300 W) and its pulse duration (1–20 s) was investigated at 250 °C. The reference T-ALD layers were prepared at 200 °C. The ICPEALD process of Al₂O₃ shows an increased growth rate, and the produced films exhibit higher carbon contaminations than the T-ALD Al₂O₃ films. Plasma pulse times of up to 15 s further increase the content of carbon and CH species; at the same time, the refractive index decreases. The optical properties of ICPEALD deposited Al₂O₃ films are comparable with those of the T-ALD films for low plasma power and short plasma pulse durations. For the ICPEALD films, UV absorption is found and it is dependent on the deposition parameters. irtE resolves process effects that correlate with the bulk properties of Al₂O₃, such as impurities and oxygen deficiencies. KW - Plamsa enhanced atomic layer deposition (PEALD) KW - spectroscopic ellipsometry KW - X-ray photoelectron spectroscopy KW - real-time monitoring KW - aluminum oxide (Al₂O₃) Y1 - 2020 U6 - https://doi.org/10.1116/1.5122797 SN - 0734-211X SN - 1071-1023 SN - 2166-2746 SN - 2166-2754 VL - 38 IS - 1 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Janowitz, Christoph A1 - Naumann, Franziska A1 - Plate, Paul A1 - Gargouri, Hassan A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Flege, Jan Ingo T1 - Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition T2 - Journal of Vacuum Science and Technology A N2 - Gallium oxide (Ga2O3) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) applying a capacitively coupled plasma source where trimethylgallium (TMGa) as the gallium precursor and oxygen (O2) plasma were used in a substrate temperature (Ts)in the range of 80–200 °C. TMGa exhibits high vapor pressure and therefore facilitates deposition at lower substrate temperatures. The Ga2O3 films were characterized by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), and capacitance-voltage (C-V) measurements. The SE data show linear thickness evolution with a growth rate of ∼0.66 Å per cycle and inhomogeneity of ≤2% for all samples. The refractive index of the Ga2O3 thin films is 1.86 ± 0.01 (at 632.8 nm) and independent of temperature, whereas the bandgap slightly decreases from 4.68 eV at Ts of 80 °C to 4.57 eV at 200 °C. XPS analysis revealed ideal stoichiometric gallium to oxygen ratios of 2:3 for the Ga2O3 layers with the lowest carbon contribution of ∼10% for the sample prepared at 150 °C. The permittivity of the layers is 9.7 ± 0.2 (at 10 kHz). In addition, fixed and mobile oxide charge densities of 2–4E12 and 1–2E12 cm−2, respectively, were observed in the C-V characteristics. Moreover, the Ga2O3 films show breakdown fields in the range of 2.2–2.7 MV/cm. Excellent optical and electrical material properties are maintained even at low substrate temperatures as low as 80 °C. Hence, the TMGa/O2 PEALD process is suitable for electronic and optoelectronic applications where low-temperature growth is required. KW - Plamsa enhanced atomic layer deposition (PEALD) KW - low-temperature growth KW - gallium oxide (Ga2O3) KW - x-ray photoelectron spectroscopy KW - spectroscopic ellipsometry KW - capacitance voltage measurements Y1 - 2020 U6 - https://doi.org/10.1116/1.5134800 SN - 0734-2101 SN - 1520-8559 VL - 38 IS - 2 ER - TY - GEN A1 - Maity, Kuntal A1 - Garain, Samiran A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Self-Powered Human-Health Monitoring through Aligned PVDFNanofibers Interfaced Skin-Interactive Piezoelectric Sensor T2 - ACS Applied Polymer Materials N2 - Flexible and wearable e-skin sensors are attracting a great interest for their smart sensing applications in next-generation electronics. However, implant ability, sensitivity, and biosignal detection capability in a self-powered manner are the prime concerns in embedded devices. In particular, electrode compatibility and imperishability have become challenging issues in wearable sensors due to the poor compatibility and fragileness of metal electrodes. In this context, we report on a skin-interactive metal-free spongy electrode in a piezoelectric sensor where highly aligned poly(vinylidenefluoride) (PVDF) nanofibers (NFs) arrays are introduced as the piezoelectric active component and conducting polyaniline- (PANI-) coated PVDF (PANI−PVDF) NFs mats served as flexible electrodes. Notably, a 99% yield of piezoelectric phases of the aligned PVDF arrays is the key factor to exhibit promising mechano-sensitivity (0.8 V/kPa) performance that in turn helps in human-health monitoring. The sensor shows excellent mechanical to electrical energy conversion that enable to sense human finger touch (10 V under 10 kPa) with energy conversion efficiency of 53%. Most importantly, due to the compatible electrodes excellent mechanical stability has been found showing negligible degradation over 12,000 periodic cycles. Furthermore, under mechanical stimuli, it is also possible to charge up a capacitor (1μF) to 4 V within 60 s confirming the possibility to use the device as a self-powered piezo-organic-e-skin sensor (POESS). This type of structural design enables to trace elusive movement of muscles and the operation in several conditions such as bending, compression and stretching. We demonstrated various human gestures monitoring, such as wrist bending, neck stretching, and arm compressions, throat movements during drinking water, coughing actions, and swallowing. In addition, diverse specific phonation recognition, heart-pulse measurement and its respective short-time Fourier transform (STFT) analysis indicate an efficient and convenient way of monitoring human-health status particularly in hospital-free mode. KW - e-skin sensor KW - piezoelectric nanofibers KW - PVDF KW - flexible electrode KW - health-care monitoring KW - self-powered electronics Y1 - 2020 U6 - https://doi.org/10.1021/acsapm.9b00846 SN - 2637-6105 VL - 2 IS - 2 SP - 862 EP - 878 ER - TY - GEN A1 - Ghosh, Sujoy Kumar A1 - Sinha, Tridib Kumar A1 - Xie, Mengying A1 - Bowen, Christopher Rhys A1 - Garain, Samiran A1 - Mahanty, Biswajit A1 - Roy, Krittish A1 - Henkel, Karsten A1 - Schmeißer, Dieter A1 - Kim, Jin Kuk A1 - Mandal, Dipankar T1 - Temperature–Pressure Hybrid Sensing All-Organic Stretchable Energy Harvester T2 - ACS Applied Electronic Materials N2 - The design and development of intrinsically stretchable all-organic self-powered sensors concurrently perceiving temperature and pressure remain a challenge but deliver an exciting platform to realize environmentally friendly wearable electronics. In this approach, a biomimetic all-organic stretchable energy harvester is designed by a xylitol-added poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS/Xyl) film as a compatible overlay electrode with polyaniline-reinforced one-dimensional aligned poly(vinylidene fluoride) hybrid electroactive soft nanowires. The gradient of elastic modulus between the electrode and the active nanowire component enables the all-organic device to manifest excellent power-generating performance under external temperature fluctuation (∼3 μW/m2 under ΔT ∼ 92 K) and mechanical force (∼31 μW/cm2 at 30 N). Importantly, the device renders simultaneous energy scavenging of temperature and pressure changes under pressing and stretching conditions (∼20%). The excellent mechanosensitivity (∼100 mV/N), fast response time (∼1 ms), outstanding mechanical and thermal stability, and good temperature resolution <10 K enable the harvester to act as an epidermal sensor, which simultaneously detects and discriminates both subtle pressure and thermal deviations exposed to an epidermis surface. The real-time recording and wireless transferring of physiological signals to a smartphone indicate an effective way to realize remote healthcare monitoring for early intervention. KW - all-organic KW - piezoelectric KW - pyroelectric KW - energy harvester KW - sensor KW - healthcare monitoring Y1 - 2021 U6 - https://doi.org/10.1021/acsaelm.0c00816 SN - 2637-6113 VL - 3 IS - 1 SP - 248 EP - 259 ER - TY - GEN A1 - Janowitz, Christoph A1 - Mahmoodinezhad, Ali A1 - Naumann, Franziska A1 - Plate, Paul A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - XPS and UPS investigation of an ALD prepared Al2O3/ZnO heterojunction T2 - Verhandlungen der DPG - SurfaceScience21 N2 - The band alignment of two large band gap oxides was studied by a combination of XPS and UPS using consecutive sputter steps to unravel the electronic structure and elemental composition of each layer and the interface region. An Al2O3/ZnO heterointerface (10 nm Al2O3 on 59 nm ZnO) was grown on top of a Si single crystal substrate by consecutive thermal and plasma-assisted atomic layer deposition (ALD) respectively. The valence band maximum of Al2O3 was found to be 1.1 eV below that of ZnO, the conduction band minimum 2.3 eV above, resulting in a type-I staggered heterojunction. A reduction of ZnO to elemental Zn in the interface region was detected by the apparent shoulder of the Zn 2p and 2s core levels and by the Zn LMM Auger. This suggests an ALD interface formation mechanism different from previous models identified for other heterointerfaces. KW - X-ray photoelectron spectroscopy KW - ultraviolet photoelectron spectroscopy KW - atomic layer deposition KW - large bandgap materials KW - band offsets Y1 - 2021 UR - https://www.dpg-verhandlungen.de/year/2021/conference/surfacescience/part/o/session/74/contribution/4 VL - 2021 PB - Deutsche Physikalische Gesellschaft e.V. CY - Bad Honnef ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Meyer, Robert A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Flege, Jan Ingo T1 - Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma T2 - Verhandlungen der DPG - SurfaceScience21 N2 - Indium oxide thin films were deposited on Si (100) by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium (TMIn) and oxygen plasma (O2) in a low-temperature range of 80 to 200 °C. The In2O3 layers were characterized by in-situ spectroscopic ellipsometry (SE), ex-situ X-ray photoelectron spectroscopy (XPS) and electrical measurements. The SE data show a growth rate of 0.56 Å/cycle within the ALD window (100 to 150 °C) with a thickness inhomogeneity of ≤1.2%. In addition, the highest refractive index is 2.07 (at 632.8 nm) for the layer grown at 150 °C, and the films exhibit indirect and direct band gaps of 2.8±0.1 eV and 3.3±0.2 eV, respectively. XPS characterization indicates no carbon incorporation and a temperature-dependent off-stoichiometry of the layers. The chemical analysis of the In 3d and O 1s core levels confirms the formation of In-O bonds and suggests the additional presence of hydroxyl groups and defects. With increasing temperature, the contribution of OH groups and defects decreases whereas that of In-O bonds increases. Notably, higher growth temperatures result in an indium rich phase within the layers. KW - Indium oxide KW - Plasma enhanced atomic layer deposition KW - Spectroscopic ellipsometry KW - X-ray photoelectron spectroscopy Y1 - 2021 UR - https://www.dpg-verhandlungen.de/year/2021/conference/surfacescience/part/o/session/74/contribution/8 VL - 2021 PB - Deutsche Physikalische Gesellschaft e.V. CY - Bad Honnef ER - TY - GEN A1 - Morales, Carlos A1 - Mahmoodinezhad, Ali A1 - Schubert, Andreas Markus A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Functional ultra-thin oxide films deposited by atomic layer deposition on structured substrates T2 - Verhandlungen der DPG - SurfaceScience21 N2 - In the last decades, atomic layer deposition (ALD) has gained prominence in the materials and surface science communities owing to its high potential for integration as a scalable process in microelectronics. ALD's largest strengths are its well-controlled layer-by-layer deposition and growth conformity on 3D structures. Yet, the ALD technique is also well known to lead to amorphous and defective, non-stoichiometric thin films, resulting in modified materials properties that may even preferentially be used in certain applications. To study these issues, we have developed an in-situ ALD reactor attached to an X-ray photoelectron spectroscopy (XPS) system, capable of switching between both pump and flow-type operation. This novel tool allows to cover the entire range of compounds and recipes used in ALD, thus clarifying the role of such defects at different deposition stages, growth conditions and film/substrate interfaces. To exemplify these sorts of studies, we show the deposition of Al2O3 5-10 nm films on nanostructured Si, and their use as substrates for functional CeOx ALD deposits. KW - Atomic layer deposition KW - sensors KW - structured substrates KW - in-situ X-ray photoelectron spectroscopy Y1 - 2021 UR - https://www.dpg-verhandlungen.de/year/2021/conference/surfacescience/part/o/session/74/contribution/5 VL - 2021 PB - Deutsche Physikalische Gesellschaft e.V. CY - Bad Honnef ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Meyer, Robert A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Zöllner, Marvin Hartwig A1 - Wenger, Christian A1 - Flege, Jan Ingo T1 - Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma T2 - Journal of Vacuum Science and Technology A N2 - Indium oxide (InxOy) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium and oxygen plasma in a low-temperature range of 80–200 °C. The optical properties, chemical composition, crystallographic structure, and electrical characteristics of these layers were investigated by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), as well as current-voltage and capacitance-voltage measurements. The SE results yielded a nearly constant growth rate of 0.56 Å per cycle and a thickness inhomogeneity of ≤1.2% across 4-in. substrates in the temperature range of 100–150 °C. The refractive index (at 632.8 nm) was found to be 2.07 for the films deposited at 150 °C. The PEALD-InxOy layers exhibit a direct (3.3 ± 0.2 eV) and an indirect (2.8 ± 0.1 eV) bandgap with an uptrend for both with increasing substrate temperature. Based on XPS characterization, all InxOy samples are free of carbon impurities and show a temperature-dependent off-stoichiometry indicating oxygen vacancies. XRD diffraction patterns demonstrate an onset of crystallization at 150 °C. Consistent with the optical, XPS, and XRD data, the films deposited at ≥150 °C possess higher electrical conductivity. Our findings prove that a low-temperature PEALD process of InxOy is feasible and promising for a high-quality thin-film deposition without chemical impurities on thermally fragile substrates. KW - Indium oxide KW - Plasma-enhanced atomic layer deposition KW - X-ray photoelectron spectroscopy KW - Ellipsometry KW - X-ray diffraction KW - Electrical properties Y1 - 2021 U6 - https://doi.org/10.1116/6.0001375 SN - 0734-2101 SN - 1520-8559 VL - 39 IS - 6 ER - TY - GEN A1 - Janowitz, Christoph A1 - Mahmoodinezhad, Ali A1 - Kot, Małgorzata A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Zöllner, Marvin Hartwig A1 - Bärwolf, Florian A1 - Stolarek, David A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation T2 - Dalton Transactions N2 - An Al2O3/ZnO heterojunction was grown on a Si single crystal substrate by subsequent thermal and plasma-assisted atomic layer deposition (ALD) in situ. The band offsets of the heterointerface were then studied by consecutive removal of the layers by argon sputtering, followed by in situ X-ray photoelectron spectroscopy. The valence band maximum and conduction band minimum of Al2O3 are found to be 1.1 eV below and 2.3 eV above those of ZnO, resulting in a type-I staggered heterojunction. An apparent reduction of ZnO to elemental Zn in the interface region was detected in the Zn 2p core level and Zn L3MM Auger spectra. This suggests an interface formation different from previous models. The reduction of ZnO to Zn in the interface region accompanied by the creation of oxygen vacancies in ZnO results in an upward band bending at the interface. Therefore, this study suggests that interfacial properties such as the band bending as well as the valence and conduction band offsets should be in situ controllable to a certain extent by careful selection of the process parameters. KW - ALD heterojunction KW - band alignement KW - ZnO KW - Al2O3 KW - interface properties Y1 - 2022 U6 - https://doi.org/10.1039/D1DT04008A SN - 1477-9234 SN - 1477-9226 VL - 51 SP - 9291 EP - 9301 ER -