TY - GEN A1 - Bobzin, Kirsten A1 - Bagcivan, Nazlim A1 - Theiß, Sebastian A1 - Trieschmann, Jan A1 - Brugnara, Ricardo Henrique A1 - Preissing, Sven A1 - Hecimovic, Ante T1 - Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties T2 - Journal of Vacuum Science & Technology A Y1 - 2014 U6 - https://doi.org/10.1116/1.4865917 SN - 1520-8559 VL - 32 IS - 2 SP - 021513 ER -