TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, R. A1 - Schenk, Harald T1 - Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897717-1 EP - 897717-9 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Tulea, C. A1 - Lenenbach, A. A1 - Schenk, Harald T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897705-1 EP - 897705-11 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schenk, Harald A1 - Tortschanoff, Andreas T1 - Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-1-4799-1512-5 SP - 861605-1 EP - 861605-6 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Schenk, Harald A1 - Tulea, C. A1 - Lenenbach, A. T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan N2 - We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW. Y1 - 2013 SN - 978-1-4799-1512-5 SP - 83 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, Richard A1 - Schenk, Harald T1 - Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011114-1 EP - 011114-10 ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.909817 SP - 82520C-1 EP - 82520C-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Grahmann, Jan A1 - Wildenhain, Michael A1 - Grashoff, Thomas A1 - Gerwig, Christian A1 - Dallmann, Hans-Georg A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.910671 SN - 978-0-8194-8930-2 IS - 1. Auflage SP - 825205-1 EP - 825205-9 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ER -