TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - CHAP A1 - Wagner, J. A1 - Ostendorf, Ralf A1 - Grahmann, Jan A1 - Merten, A. A1 - Hugger, S. A1 - Jarvis, J.-P. A1 - Fuchs, F. A1 - Boscovic, D. A1 - Schenk, Harald ED - Razeghi, Manijeh T1 - Widely tunable quantum cascade lasers for spectroscopic sensing T2 - Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-460-8 SP - 937012-1 EP - 937012-6 PB - SPIE CY - Bellingham, Wash. ER - TY - PAT A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Rattunde, Marcel T1 - Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers) Y1 - 2015 ER - TY - CHAP A1 - Bleh, D. A1 - Ostendorf, Ralf A1 - Merten, A. A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Kunzer, M. A1 - Schmidt, R. A1 - Wagner, J. T1 - Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components T2 - International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy Y1 - 2014 UR - http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a SP - 1 EP - 2 ER - TY - GEN A1 - Grahmann, Jan A1 - Merten, André A1 - Ostendorf, Ralf A1 - Fontenot, M. A1 - Bleh, Daniela A1 - Schenk, Harald A1 - Wagner, Hans-Joachim T1 - Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897708-1 EP - 897708-11 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Grahmann, Jan A1 - Wildenhain, Michael A1 - Grashoff, Thomas A1 - Gerwig, Christian A1 - Dallmann, Hans-Georg A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.910671 SN - 978-0-8194-8930-2 IS - 1. Auflage SP - 825205-1 EP - 825205-9 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ER - TY - CHAP A1 - Schenk, Harald A1 - Wagner, Michael A1 - Grahmann, Jan A1 - Merten, André ED - Kye, Jongwook ED - Owa, Soichi T1 - Advances in MOEMS technologies for high quality imaging systems T2 - Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States N2 - An overview of advances in MOEMS devices and technologies for high quality imaging systems is provided. A particular focus is laid on recent technological further developments possibly opening gateways to unprecedented device and system functionality by e. g.: increase of pixel count towards higher parallel operation, decrease of the mirror pitch in large arrays towards applications like high-performance holography, novel technologies for higher operation bandwidth, increase of aperture size for scanning applications like LIDAR, integration of high reflection coatings for processing of multi Watt laser radiation for marking and engraving, and phased arrays for high speed laser beam steering. Y1 - 2018 SN - 978-1-5106-1666-0 SN - 978-1-5106-1667-7 U6 - https://doi.org/10.1117/12.2297399 PB - SPIE CY - Bellingham, Washington ER - TY - PAT A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Schenk, Harald A1 - Rattunde, Marcel T1 - MEMS basiertes Durchstimmen von Lasern Y1 - 2014 ER - TY - CHAP A1 - Drabe, Christian A1 - Kallweit, David A1 - Dreyhaupt, Andre A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Davis, Wyatt T1 - Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.910203 SP - 825209-1 EP - 825209-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER -