TY - GEN A1 - Kolanek, Krzysztof A1 - Hermann, Peter A1 - Dudek, Piotr T. A1 - Gotszalk, Teodor A1 - Chumakov, Dmytro A1 - Weisheit, Martin A1 - Hecker, Michael A1 - Zschech, Ehrenfried T1 - Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon-germanium thin films T2 - Thin Solid Films KW - oxidation KW - microscope KW - measurements KW - thin films Y1 - 2010 SN - 0040-6090 VL - 518 IS - 12 SP - 3267 EP - 3272 ER -