TY - GEN A1 - Gertig, Max A1 - Morales, Carlos A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - In situ X-ray photoelectron spectroscopy study of atomic layer deposited ceria on SiO2: substrate influence on the reaction mechanism during the early stages of growth T2 - Verhandlungen der DPG N2 - Atomic layer deposition (ALD) is known to produce amorphous and defect-rich films in a layer-by-layer fashion, which can potentially give rise to unexpected material properties. In particular, ultrathin films (few monolayers) will show the highest complexity, as the substrate-material interaction will play a major role during deposition. Therefore, it is crucial to understand the early stages of growth of the ALD process to control and potentially tailor this interfacial interaction. Applying a surface science approach combined with complementary ex-situ characterization, we have studied by in-situ X-ray photoelectron spectroscopy (XPS) the early stages of ceria (CeOx) growth on SiO2 substrates deposited by thermal-ALD using Ce(thd)4/O3. Interestingly, an initial mixture of Ce3+ and Ce4+ was observed, although only Ce4+ may be expected considering the used precursor and oxidant. This fact, together with a deviation from the ideal layer-by-layer growth and a higher growth rate during the first cycles, indicates a significant influence of the substrate of the ALD reaction mechanism as well as a correlation between morphology and ceria oxidation state. KW - Atomic layer deposition (ALD) KW - X-ray photoelectron spectroscopy (XPS) KW - in-situ KW - ceria Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/o/session/67/contribution/7 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -