TY - GEN A1 - Tetzner, Henriette A1 - Fischer, Inga Anita A1 - Skibitzki, Oliver A1 - Mirza, M. M. A1 - Manganelli, Constanza Lucia A1 - Luongo, G. A1 - Spirito, Davide A1 - Douglas, J. P. A1 - De Seta, Monica A1 - Capellini, Giovanni T1 - Current leakage mechanisms related to threading dislocations in Ge-rich SiGe heterostructures grown on Si(001) T2 - Applied Physics Letters Y1 - 2021 U6 - https://doi.org/10.1063/5.0064477 SN - 1077-3118 SN - 0003-6951 VL - 119 IS - 15 ER - TY - GEN A1 - Lukosius, Mindaugas A1 - Lukose, RasuolÄ— A1 - Lisker, Marco A1 - Luongo, G. A1 - Elviretti, M. A1 - Mai, Andreas A1 - Wenger, Christian T1 - Graphene Research in 200 mm CMOS Pilot Line T2 - 45th Jubilee International Convention on Information, Communication and Electronic Technology (MIPRO), 2022 N2 - Due to the unique electronic structures, graphene and other 2D Materials are considered as materials which can enable and extend the functionalities and performance in a large variety of applications, among them in microelectronics. At this point, the investigation and preparation of graphene devices in conditions resembling as close as possible the Si technology environment is of highest importance.Towards these goals, this paper focuses on the full spectra of graphene research aspects in 200mm pilot line. We investigated different process module developments such as CMOS compatible growth of high quality graphene on germanium and its growth mechanisms, transfer related challenges on target substrates, patterning, passivation and various concepts of contacting of graphene on a full 200 mm wafers. Finally, we fabricated proof-of-concept test structures e.g. TLM, Hall bars and capacitor structures to prove the feasibility of graphene processing in the pilot line of IHP. KW - Graphene KW - CMOS Y1 - 2022 SN - 978-953-233-103-5 SN - 978-953-233-102-8 SN - 978-1-6654-8434-3 U6 - https://doi.org/10.23919/MIPRO55190.2022.9803362 SN - 2623-8764 SN - 1847-3938 SP - 113 EP - 117 ER -