TY - GEN A1 - Langa, Sergiu A1 - Drabe, Christian A1 - Kunath, Christian A1 - Dreyhaupt, André A1 - Schenk, Harald T1 - Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2003525 SP - 86140F-1 EP - 86140F-8 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Drabe, Christian A1 - Klose, Thomas A1 - Jung, Denis T1 - Micromechanical device with tilted electrodes Y1 - 2012 ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - CHAP A1 - Drabe, Christian A1 - Kallweit, David A1 - Dreyhaupt, Andre A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Davis, Wyatt T1 - Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.910203 SP - 825209-1 EP - 825209-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER -