TY - GEN A1 - Böhme, O. A1 - Lloyd Spetz, Anita A1 - Lundström, Ingemar A1 - Schmeißer, Dieter T1 - Nanoparticles as the Active Element of High-Temperature Metal-Insulator-Silicon Carbide Gas Sensors T2 - Advanced Materials Y1 - 2001 SN - 1521-4095 SN - 0935-9648 VL - 13 IS - 8 SP - 597 EP - 601 ER - TY - GEN A1 - Gürek, A. G. A1 - Appel, Günter A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - Synthesis of dihydroxy silicon phthalocyanine tetrasulfonic acid and poly-µ-oxo silicon phthalocyanine tetrasulfonic acid T2 - Journal of Porphyrins and Phthalocyanines Y1 - 2001 SN - 1099-1409 SN - 1088-4246 VL - 5 IS - 10 SP - 751 EP - 757 ER - TY - GEN A1 - Henkel, Karsten A1 - Oprea, A. A1 - Paloumpa, Ioanna A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Kamieth, P. T1 - Selective polypyrrole electrodes for quartz microbalances : NO2 and gas flux sensitivities T2 - Sensors and Actuators : B, Chemical 76(2001)1-3 Y1 - 2001 SN - 0925-4005 VL - 76 IS - 1-3 SP - 124 EP - 129 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Yfantis, Alexandros D. A1 - Batchelor, David R. A1 - Appel, Günter A1 - Schmeißer, Dieter T1 - A Spectro-Microscopic Approach for Thin Film Analysis Grain Boundaries in mc-Si and Sn/SnO2 Nano Particles T2 - Microchimica Acta Y1 - 2001 SN - 1436-5073 SN - 0026-3672 VL - 136 IS - 3-4 SP - 109 EP - 113 ER - TY - GEN A1 - Lewerenz, Hans-Joachim A1 - Aggour, Mohammed A1 - Murrell, Chris A1 - Kanis, M. A1 - Jungblut, H. A1 - Jakubowicz, J. A1 - Cox, P. A. A1 - Campbell, S. A. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Initial stages of structure formation on silicon electrodes investigated by photoelectron spectroscopy using synchrotron radiation and in-situ atomic force microscopy T2 - Journal of the Electrochemical Society N2 - The surface condition of electrochemically H-terminated Si is compared with the situation at the first photocurrent maximum in dilute acidic ammonium fluoride solution where the divalent dissolution converts into the four-valence process. The first high spectral-resolution photoelectron spectroscopy data using synchrotron radiation of electrochemically hydrogenated Si are presented. A combined electrochemistry/ultrahigh vacuum surface analysis system, attached to the U 49/2 beamline at the synchrotron Bessy II, is used for photoelectron spectroscopy (PES) of the electrochemically conditioned samples. We analyze the Si 2p, O 1s, and F 1s core levels. A comparison of a density functional theory calculation of the reaction sequence, proposed in the dissolution model of Gerischer and co-workers, with the PES results supports this model. The anodized sample is characterized by a residual H coverage of 0.35 monolayers evidenced by a surface core level shift, Si-OH and Si-Fx species, F-, and a higher oxidized Si species. SiO2 is not found. Even on very well H-terminated surfaces, we find residual Si-OH complexes, fluoride and water. In situ atomic force microscopy shows a roughening with a root mean square roughness parameter of 2.6 nm. %A92003 The Electrochemical Society. All rights reserved. Y1 - 2003 SN - 1945-7111 VL - 150 IS - 3 SP - E185 EP - E189 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Roters, G. A1 - Nenyei, Z. T1 - Non-destructive probing of interfacial oxidation and nitridation states at RTA Si-oxides T2 - Thin Solid Films N2 - The quality of the SiO2/Si interface is of crucial importance in the development and performance of sub 0.1 small mu, Greekm technologies. The knowledge of the chemical composition of the interface is an important piece of information in the preparation of ultra-thin oxides and high-k dielectrics, in order to maintain a high-quality interface and channel mobility. Here we report on investigations of 2 nm oxide layers formed by a RTP process under various gas mixtures containing N2O and NH3 at different concentrations. We studied the SiO2/Si(001) interface by a non-destructive depth profiling using Synchrotron radiation photoelectron spectroscopy. We determine the thickness of the oxide layer, the relative content and chemical state of nitrogen within the oxide, the thickness of the interface layer, and the relative abundance of Si intermediate oxides within. In all systems we find the thickness of the intermediate layer to be approximately 0.17 nm. The intermediate layer contains Si atoms in the oxidation states +1, +2 and +3 with similar relative abundance. Nitrogen is found predominantly close to the intermediate layer forming Si---N as well as Si---N---O bonds. Within the oxide there are only spurious nitrogen content with predominately Si---N---O bonds. Our method is able to detect a nitrogen content within the intermediate layer as low as approximately 5%. KW - Silicon KW - Oxynitride KW - N20 KW - NH3 KW - Photoelectron spectroscopy KW - Ultrathin oxide Y1 - 2003 SN - 0040-6090 VL - 428 IS - 1-2 SP - 216 EP - 222 ER - TY - GEN A1 - Müller, Klaus A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - PEEM and my-NEXAFS of Cu-In-S2-surfaces T2 - Thin Solid Films N2 - Polycrystalline CuInS2 samples are an ideal system for photoemission electron microscope studies. The polycrystalline grains have a diameter of approximately 5 small mu, Greekm and the system is expected to be highly inhomogeneous because of the existence of many sub-phases. We used a recently established procedure to reproducibly obtain stoichiometric CuInS2-surfaces and follow the changes in the morphology, the elemental inhomogeneous distribution, and the development of the electronic structure upon its preparation. We find that the individual grains trend to coagulate, the surface composition becomes more homogeneous, and identify characteristic features of the unoccupied DOS. KW - CuInS2 films KW - Annealing-process KW - PEEM KW - small mu KW - NEXAFS Y1 - 2003 SN - 0040-6090 VL - 431-432 SP - 307 EP - 311 ER - TY - GEN A1 - Schmeißer, Dieter T1 - Valence states of poly(3-hexyl-thiophene) as probed by photoelectron spectra at resonant excitation T2 - Synthetic Metals N2 - Photoelectron spectroscopy employing synchrotron radiation is applied to learn about the electronic structure of regio-regular poly(3-hexyl-thiophene) (P3hT). We study the valence band photoelectron spectra around the carbon 1s threshold. This technique is equivalent to resonant excitation of core electrons into empty valence states. We probe the properties of these carriers in the conduction band and also learn about valence band states involved in the carbon (K L L) Auger transitions. The data give evidence that monomeric orbital energies are dominating in such processes. We conclude that poly(3-hexyl-thiophene) is a polymer with a rather short conjugation length. KW - Resonant photoelectron spectroscopy KW - Semi-conducting polymers KW - Organic field effect Y1 - 2003 SN - 0379-6779 VL - 138 IS - 1-2 SP - 135 EP - 140 ER - TY - GEN A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Carbon-plot-microstructuring for all-polymer-transistors T2 - Synthetic Metals N2 - This contribution describes the use of a low-cost technology to produce organic microstructures for electronically applications. With a computer driven plotter, substrates like printing foil and colloidal graphite (diluted in water) for the electrodes, we realised channel lengths of 20±10 microm. Compared with transistor devices, fabricated using conventional photolithographic methods and the same semiconducting material, this technique is a hopeful approach to produce microelectronic structures that are low-cost and all-organic. KW - Ten micrometer carbon-plot KW - Organic field-effect-transistors KW - Low-cost-technique Y1 - 2003 SN - 0379-6779 VL - 138 IS - 1-2 SP - 271 EP - 273 ER - TY - GEN A1 - Riess, W. A1 - Schmeißer, Dieter T1 - Organic Materials for Device Applications - Preface T2 - Synthetic Metals Y1 - 2003 SN - 0379-6779 VL - 138 IS - 1–2 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Pressel, Klaus A1 - Yamamoto, Yuji A1 - Tillack, Bernd A1 - Krüger, D. T1 - Ge instabilities near interfaces in Si-SiGe-Si heterostructures T2 - Materials Science & Engineering B N2 - Compositional characterization of interfaces in Si-cap/SixGe1-x/Si heterostructures is an important topic in SiGe based advanced microelectronics and in quantum wells. Extremely high depth resolution is required to detect and optimize near-interface compositional gradients which are crucial for high circuit performance. We report on non-destructive, high-resolution, near-interface depth profiling using SR photoelectron spectroscopy at an undulator beamline. We measured the Ge content at the SixGe1-x interface towards the native SiO2 layer and investigated the influence of additional (1nm and 2nm) Si capping layers (Si-cap). For the uncapped samples we found near the oxide/ SiGe interface region a strong mixing of Ge-oxides and SiOx. This indicates a high instability of the Ge atoms at those interfaces while silicon capped (1nm, 2nm) SixGe1-x films are more stable. We detect sharp Ge concentration gradients within the first 1nm at the Si/SixGe1-x interface. These results open new possibilities for Ge profile optimization in Si-cap/SixGe1-x/Si heterostructures. In the Ge3d spectra we differentiate the Ge atoms to occupy three different lattice sites and are able to follow their relative occupation within the Ge gradient. KW - SiGe KW - Depth profiling KW - Interfaces KW - XPS Y1 - 2003 SN - 0921-5107 SN - 1873-4944 VL - 101 IS - 1-3 SP - 208 EP - 211 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - The Pr2O3 / Si (001) interface studied by synchrotron radiation photo-electron spectroscopy T2 - Solid State Electronics N2 - Pr2O3 is currently under consideration as a potential replacement for SiO2 as the gate-dielectric material for sub-0.1micro m complementary metal-oxide-semiconductor (CMOS) technology. We studied the Pr2O3/Si(0 0 1) interface by a non-destructive depth profiling using synchrotron radiation photoelectron spectroscopy. Our data suggests that there is no silicide formation at the interface. Based on reported results, a chemical reactive interface exists, consisting of a mixed Si-Pr oxide such as (Pr2O3)x(SiO2)1?x, i.e. as a silicate phase with variable silicon content. This pseudo-binary alloy at the interface offers large flexibility toward successful integration of Pr2O3 into future CMOS technologies. KW - High-k dielectric material KW - Pr2O3 KW - Interface KW - Silicate Y1 - 2003 SN - 0038-1101 VL - 47 IS - 10 SP - 1607 EP - 1611 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Irmscher, Klaus A1 - Wagner, Gerd T1 - Photoelectron spectra of Al dopants in 4H-SiC T2 - Materials Science & Engineering B N2 - Al-doped 4H-SiC epitaxial layers were grown in a hot-wall chemical vapor deposition (CVD) system on commercial 4H-SiC substrates (CREE). The incorporation of Aluminum has been studied in the concentration range from 2*1014cm-3 up to 3*1020cm-3. Epitaxial layers with doping concentration NA-ND> 1019cm-3 were studied by HV-TEM and synchrotron radiation investigations. In the concentration range from 1*1019cm-3 to 3*1020 cm-3, measured by SIMS and Hall investigations, no Aluminum precipitation were detected in the grown layers. For SiC samples with an Al concentration of 1020cm-3 we have been able to detect the Al2p photoemission signal. The Al2p signal is recorded through the oxide layer (thickness of about 0.4nm), it has a main contribution at a binding energy of 73eV which corresponds to the energy typical for elemental Al0. In spectra excited with higher photon energies the sampled photoelectrons originate from deeper layers. In these data we notice an additional shoulder in the Al2p signal at around 71eV. The evidence of two contributions is attributed to the fact that Al is incorporated at different lattice sites. As the latter data represent more bulk like properties we argue that Al in the bulk SiC occupies both, substitutional lattice sites and interstitial sites while in the surface near regions Al is found only at substitutional lattice sites. KW - Photoelectron KW - Spectra KW - 4H-SiC Y1 - 2003 SN - 0921-5107 SN - 1873-4944 VL - 102 IS - 1-3 SP - 284 EP - 288 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Stability and electronic properties of silicates in the system SiO2 - Pr2O3 - Si(001) T2 - Journal of Physics: Condensed Matter N2 - Pr2O3 is one of the most promising hetero-oxides that are the candidates of choice to replace SiO2 as the gate dielectric material for sub-0.1 micrometer CMOS technology. In order to enable process integration, however, hetero-oxides require substantial characterization. In particular, the basic interaction mechanisms at the interface to the silicon substrate are the key issues. A solid knowledge of these mechanisms is required to address reliability arguments. The challenges in material science are to understand the chemical bonding of the hetero-oxides and Si on a microscopic scale. We report on the specific variations in the electronic structure which are evident in the valence band features around resonant excitation at the Pr 4d threshold. We also determine the valance band discontinuities at the Pr2O3/Si(001) interface and follow the changes in the surface potentials to develop a band scheme, a prerequisite to understanding the properties of charge transport across that interface. Y1 - 2004 SN - 1361-648X VL - 16 IS - 2 SP - 153 EP - 160 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim A1 - Dabrowski, Jarek Marek T1 - Silicate Layer Formation at the Pr2O3 / Si(001) Interfaces T2 - Applied Physics Letters N2 - We studied Pr2O3/Si(001) interfaces by synchrotron radiation photoelectron spectroscopy and by ab initio calculations. We show that the interface formed during molecular-beam epitaxy under the oxygen partial pressure above 1%D710-8 mbar consists of a mixed Si-Pr oxide, such as (Pr2O3)(SiO)x(SiO2)y. Neither an interfacial SiO2 nor an interfacial silicide is formed. The silicate formation is driven by a low energy of O in a PrOSi bond and by the strain in the subsurface SiOx layer. We expect that this natural interfacial Pr silicate will facilitate the integration of the high-k dielectric Pr2O3 into future complementary metal-oxide-semiconductor technologies. Y1 - 2004 SN - 1077-3118 VL - 85 IS - 1 SP - 88 EP - 90 ER - TY - GEN A1 - Lewerenz, Hans-Joachim A1 - Murrell, Chris A1 - Jakubowicz, J. A1 - Aggour, Mohammed A1 - Kanis, M. A1 - Campbell, S. A. A1 - Cox, P. A. A1 - Hoffmann, Patrick A1 - Jungblut, H. A1 - Schmeißer, Dieter T1 - High Resolution Surface analysis of Si Roughenning in Dilute Ammonium Fluoride Solution T2 - Journal of Electroanalytical Chemistry N2 - The initial stages of porous Si formation on Si(111) in dilute ammonium fluoride solution are analysed by photoelectron spectroscopy using synchrotron radiation (SRPES). The PES results in the por-Si formation regime partly support a recent dissolution model. The contribution from the Si 2p surface core level shift shows that 0.35 ML of the surface is still H-terminated after interruption of the conditioning process at the first photocurrent maximum. Two signals shifted in binding energy by 0.8 and 1 eV, respectively, are attributed to reaction intermediates expected from the proposed reaction mechanism and from theoretical calculations using density functional theory (DFT). A distinct roughening is found in in-situ AFM measurements, with a calculated RMS roughness parameter of 2.6 nm. KW - Porous Si KW - transistors KW - Electropolishing KW - Photoelectron spectroscopy KW - AFM KW - Synchrotron radiation Y1 - 2003 SN - 1873-2569 VL - 540 SP - 3 EP - 6 ER - TY - GEN A1 - Appel, Günter A1 - Ade, H. A1 - Gürek, A. G. A1 - Stadler, S. A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - Orientation studies of Si-Phthalocyanines sulfonic acids cast on SiOx substrates T2 - Applied Physics / A N2 - Layers of dihydroxy silicon phthalocyanine tetrasulfonic acid and oligo-7-oxo silicon phthalocyanine tetrasulfonic acid were prepared by solution-casting methods. The purity of the material was checked by X-ray photoemission spectroscopy. The orientation of the molecules in respect to the substrate plane was investigated by angle-dependent near-edge X-ray absorption fine-structure spectroscopy. The morphology was characterized by atomic force microscopy. Most samples exhibited a significant orientation that was accompanied by crystalline structures; others had no orientation at all with a dominant amorphous morphology. This behavior indicates that several preparation parameters affect the crystallinity and the orientation of the phthalocyanines. Y1 - 2003 U6 - https://doi.org/10.1007/s003390201320 SN - 1432-0630 VL - 76 IS - 2 SP - 177 EP - 182 ER - TY - GEN A1 - Müller, Klaus A1 - Goryachko, Andriy A1 - Burkov, Yevgen A1 - Schwiertz, Carola A1 - Ratzke, Markus A1 - Köble, J. A1 - Reif, Jürgen A1 - Schmeißer, Dieter T1 - Scanning Kelvin Probe Microscopy and Photoemission electron microscopy of organic source-drain structures T2 - Synthetic Metals N2 - n order to optimize organic field effect transistors (OFETs), the characterisation of active-layer surfaces in terms of their roughness, chemical composition and distribution of surface potentials is important. We report on high-resolution microscopic mapping of organic source-drain structures with P3HT as the semiconductor by scanning Kelvin probe microscopy (SKPM) and photoemission electron microscopy (PEEM). It was shown that PEEM is able to characterise the surface morphology (roughness), the chemical homogeneity and the composition of organic structures. The two-dimensional mapping of surface potentials by SKPM with applied source-drain voltages is shown to be an important ingredient of OFETs failure mode analysis. KW - Photoemission electron microscopy (PEEM) KW - Scanning Kelvin probe microscopy (SKPM) KW - OFET Y1 - 2004 SN - 0379-6779 VL - 146 IS - 3 SP - 377 EP - 382 ER - TY - GEN A1 - Müssig, Hans-Joachim A1 - Dabrowski, Jarek Marek A1 - Wenger, Christian A1 - Lupina, Grzegorz A1 - Sorge, Roland A1 - Formanek, Peter A1 - Zaumseil, Peter A1 - Schmeißer, Dieter T1 - Ultrathin Dielectric Films Grown by Solid Phase Reaction of Pr with SiO2 T2 - MRS Proceedings Y1 - 2004 SN - 1946-4274 VL - 811 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Pr4f occupancy and VB/CB band offsets of Pr2O3 at the interface to Si(001) and SiC(0001) surfaces T2 - MRS Proceedings Y1 - 2004 SN - 1946-4274 VL - 811 ER -