TY - CHAP A1 - Jung, Denis A1 - Sandner, Thilo A1 - Kallweit, David A1 - Schenk, Harald T1 - Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.906690 SN - 978-0-8194-8930-2 SP - 82520U-1 EP - 82520U-10 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Drabe, Christian A1 - Kallweit, David A1 - Dreyhaupt, Andre A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Davis, Wyatt T1 - Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.910203 SP - 825209-1 EP - 825209-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER -