TY - GEN A1 - Capista, Daniele A1 - Lukose, Rasuole A1 - Majnoon, Farnaz A1 - Lisker, Marco A1 - Wenger, Christian A1 - Lukosius, Mindaugas T1 - Optimization of the metal deposition process for the accurate estimation of Low Metal-Graphene Contact-Resistance T2 - 47th MIPRO ICT and Electronics Convention (MIPRO), 20-24 May 2024, Opatija, Croatia Y1 - 2024 SN - 979-8-3503-8250-1 SN - 979-8-3503-8249-5 U6 - https://doi.org/10.1109/MIPRO60963.2024.10569895 SN - 2623-8764 ER - TY - GEN A1 - Lukosius, Mindaugas A1 - Lukose, Rasuolė A1 - Dubey, P. K. A1 - Raju, A. I. A1 - Capista, Daniele A1 - Lisker, Marco A1 - Mai, A. A1 - Wenger, Christian T1 - Graphene for photonic applications T2 - 2024 47th MIPRO ICT and Electronics Convention (MIPRO) N2 - Integrating graphene into Silicon Complementary Metal-Oxide-Semiconductor (CMOS) technology for photonic applications holds immense promise, but it encounters challenges in establishing large-scale graphene processes. These challenges encompass growth through techniques like Chemical Vapor Deposition (CVD), transfer, encapsulation, and contact formation within a routine 200mm wafer pilot line typically utilized for integrated circuit fabrication. This study is dedicated to exploring various facets of graphene research within a 200 mm pilot line, with a focus on overcoming challenges through the fabrication of proof-of-concept photonic graphene-based devices. The synthesis of graphene targeted epi-Ge(100)/Si(100) substrates, grown within the IHP pilot line, showcasing the potential for high-quality graphene deposition across 200mm wafers. Alternatively, employing different orientations such as (110) has been explored to enhance graphene mobility, achieving a remarkable mobility of 2300 cm 2 /Vs at present. The study systematically investigates graphene quality, thickness, and homogeneity utilizing techniques such as Raman spectroscopy, Atomic Force Microscopy (AFM), and Scanning Electron Microscopy (SEM). Additionally, simulations and fabrication of the graphene ring modulators have been conducted at both the component and device levels, incorporating realistic graphene properties. These results indicate a modulation depth of 1.6 dB/μm and a 3dB bandwidth of 7 GHz, showcasing the potential of graphene-based photonic devices for high-speed communication applications. KW - Graphene Y1 - 2024 SN - 979-8-3503-8250-1 SN - 979-8-3503-8249-5 U6 - https://doi.org/10.1109/MIPRO60963.2024.10569652 SN - 2623-8764 SP - 1614 EP - 1618 PB - IEEE ER - TY - GEN A1 - Capista, Daniele A1 - Lukose, Rasuole A1 - Majnoon, Farnaz A1 - Lisker, Marco A1 - Wenger, Christian A1 - Lukosius, Mindaugas T1 - Study on the metal -graphene contact resistance achieved with one -dimensional contact architecture T2 - IEEE Nanotechnology Materials and Devices Conference (NMDC 2023), Paestum, Italy, 22-25 October 2023 N2 - Graphene has always been considered as one of the materials with the greatest potential for the realization of improved microelectronic and photonic devices. But to actually reach its full potential in Si CMOS technology, graphene -based devices need to overcome different challenges. They do not only need to have better performances than standard devices, but they also need to be compatible with the production of standard Si based devices. To address the first challenge the main route requires the optimization of the contact resistance, that highly reduces the devices performance, while the second challenges requires the integration of graphene inside the standard production lines used for microelectronic. In this work we used an 8” wafer pilot -line to realize our devices and we studied the behavior of the contact resistance between metal and graphene obtained by one -dimensional contact architecture between the two materials. The contact resistance has been measured by means of Transmission Line Method (TLM) with several contact patterning. KW - Graphene Y1 - 2023 SN - 979-8-3503-3546-0 U6 - https://doi.org/10.1109/NMDC57951.2023.10343775 SP - 118 EP - 119 PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - GEN A1 - Lukosius, Mindaugas A1 - Lukose, Rasuolė A1 - Lisker, Marco A1 - Dubey, P. K. A1 - Raju, A. I. A1 - Capista, Daniele A1 - Majnoon, Farnaz A1 - Mai, A. A1 - Wenger, Christian T1 - Developments of Graphene devices in 200 mm CMOS pilot line T2 - Proc. Nanotechnology Materials and Devices Conference (NMDC 2023),Paestum, Italy, 22-25 October 2023 N2 - Due to the unique electronic band structure, graphene has opened great potential to extend the functionality of a large variety of devices. Despite the significant progress in the fabrication of various graphene based microelectronic devices, the integration of graphene devices still lack the stability and compatibility with Si-technology processes. Therefore, the investigation and preparation of graphene devices in conditions resembling as close as possible the Si technology environment is of highest importance. This study aims to explore various aspects of graphene research on a 200mm pilot line, with a focus on simulations and fabrication of graphene modulator. To be more precise, it includes design and fabrication of the layouts, necessary mask sets, creation of the flows, fabrication, and measurements of the Gr modulators on 200 mm wafers. KW - Graphene Y1 - 2023 SN - 979-8-3503-3546-0 U6 - https://doi.org/10.1109/NMDC57951.2023.10343569 SP - 505 EP - 506 PB - Institute of Electrical and Electronics Engineers (IEEE) ER -