TY - GEN A1 - Schmeißer, Dieter A1 - Pressel, Klaus A1 - Yamamoto, Yuji A1 - Tillack, Bernd A1 - Krüger, D. T1 - Ge instabilities near interfaces in Si-SiGe-Si heterostructures T2 - Materials Science & Engineering B N2 - Compositional characterization of interfaces in Si-cap/SixGe1-x/Si heterostructures is an important topic in SiGe based advanced microelectronics and in quantum wells. Extremely high depth resolution is required to detect and optimize near-interface compositional gradients which are crucial for high circuit performance. We report on non-destructive, high-resolution, near-interface depth profiling using SR photoelectron spectroscopy at an undulator beamline. We measured the Ge content at the SixGe1-x interface towards the native SiO2 layer and investigated the influence of additional (1nm and 2nm) Si capping layers (Si-cap). For the uncapped samples we found near the oxide/ SiGe interface region a strong mixing of Ge-oxides and SiOx. This indicates a high instability of the Ge atoms at those interfaces while silicon capped (1nm, 2nm) SixGe1-x films are more stable. We detect sharp Ge concentration gradients within the first 1nm at the Si/SixGe1-x interface. These results open new possibilities for Ge profile optimization in Si-cap/SixGe1-x/Si heterostructures. In the Ge3d spectra we differentiate the Ge atoms to occupy three different lattice sites and are able to follow their relative occupation within the Ge gradient. KW - SiGe KW - Depth profiling KW - Interfaces KW - XPS Y1 - 2003 SN - 0921-5107 SN - 1873-4944 VL - 101 IS - 1-3 SP - 208 EP - 211 ER - TY - CHAP A1 - Chao, Chen-Xiang A1 - Bestle, Dieter A1 - Krüger, D. A1 - Meissner, Bernd T1 - Increasing the tooth root capacity of symmetric and asymmetric gears by optimizing the tooth root fillet shape T2 - International Gear Conference 2018, Lyon, 27.-29.08.2018, vol. 1 N2 - The international standard ISO 6336-3 defines a calculation method for the tooth root capacity of standard gears with basic rack profile according to ISO 53. However, the results of this method may become too optimistic for non-standard gears with custom root fillets, large pressure angles or asymmetric teeth, since the effect of general mean stresses on the local tooth root strength are neglected. Therefore, a more generic calculation method is suggested, which considers the mean stress influence by utilizing the Haigh diagram. Both approaches are then used as basis of root fillet shape optimizations. A comparison of results demonstrates significant differences in the safety assessment and the resulting root geometry. Y1 - 2018 SN - 978-1-911033-42-4 SP - 531 EP - 541 PB - Chartridge Books Oxford CY - Oxford ER - TY - GEN A1 - Reip, A. A1 - Haring, B. A1 - Sibold, C. A1 - Stohwasser, Ralf A1 - Bautz, Ekkehard K. F. A1 - Darai, Gholamreza A1 - Meisel, H. A1 - Krüger, D. H. T1 - Coding strategy of the S and M genomic segments of a hantavirus representing a new subtype of the Puumala serotype T2 - Archives of Virology Y1 - 1995 U6 - https://doi.org/10.1007/BF01322689 SN - 0304-8608 SN - 1432-8798 VL - 141 IS - 11 SP - 2011 EP - 2026 ER -