TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Konarski, Piotr A1 - Cwil, M. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation KW - ultrashallow KW - oxynitride Y1 - 2008 ER - TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Konarski, Piotr A1 - Cwil, M. T1 - Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor Y1 - 2006 ER -