TY - GEN A1 - Alberton Corrêa, Silma A1 - Brizzi, Simone A1 - Schmeißer, Dieter T1 - Spectroscopic investigation of the electronic structure of thin atomic layer deposition HfO2 films T2 - Journal of Vacuum Science & Technology A N2 - The electronic structure of HfO2 thin films is investigated employing resonant photoelectron spectroscopy (resPES). The detailed analysis of the O1s resonance profile enables the determination of the partial density of states for the valence and the conduction bands as well as the electronic band gap to be 6.2 eV. The position of the charge neutrality level is evaluated. Thereby, it is demonstrated that the resPES data are able to combine information both for the valence as well as for the conduction band states. In addition, evidences for intrinsic in-gap states attributed to polaronic and charge transfer states are given. Electronic charges within the atomic layer deposition-HfO2films are identified, pointing out that the amount of charges is essential to determine the accurate position of the surface potentials. KW - resonant photoelectron spectroscopy KW - hafnium oxide KW - atomic layer deposition KW - partial density of states KW - electronic band gap Y1 - 2016 U6 - https://doi.org/10.1116/1.4935338 SN - 0734-2101 SN - 1520-8559 VL - 34 IS - 1 SP - 01A117-1 EP - 01A117-8 ER - TY - GEN A1 - Pitthan, E. A1 - dos Reis, R. A1 - Alberton Corrêa, Silma A1 - Schmeißer, Dieter A1 - Boudinov, H. I. A1 - Stedile, F. C. T1 - Influence of CO annealing in metal-oxide-semiconductor capacitors with SiO2 films thermally grown on Si and on SiC T2 - Journal of Applied Physics N2 - Understanding the influence of SiC reaction with CO, a by-product of SiC thermal oxidation, is a key point to elucidate the origin of electrical defects in SiC metal-oxide-semiconductor (MOS) devices. In this work, the effects on electrical, structural, and chemical properties of SiO2/Si and SiO2/SiC structures submitted to CO annealing were investigated. It was observed that long annealing times resulted in the incorporation of carbon from CO in the Si substrate, followed by deterioration of the SiO2/Si interface, and its crystallization as SiC. Besides, this incorporated carbon remained in the Si surface (previous SiO2/Si region) after removal of the silicon dioxide film by HF etching. In the SiC case, an even more defective surface region was observed due to the CO interaction. All MOS capacitors formed using both semiconductor materials presented higher leakage current and generation of positive effective charge after CO annealings. Such results suggest that the negative fixed charge, typically observed in SiO2/SiC structures, is not originated from the interaction of the CO by-product, formed during SiC oxidation, with the SiO2/SiC interfacial region. KW - metal-oxide-semiconductor KW - silicon KW - silicon carbide KW - CO annealing Y1 - 2016 U6 - https://doi.org/10.1063/1.4939836 SN - 0021-8979 SN - 1089-7550 IS - 119 SP - 025307-1 EP - 025307-6 ER - TY - GEN A1 - Corrêa, Silma Alberton A1 - Brizzi, Simone A1 - Schmeißer, Dieter T1 - Depicting the Electronic Structure of HfO₂ Films by Spectroscopic Techniques T2 - ECS Transactions N2 - The electronic structure of HfO₂ films was investigated. The partial density of states for the valence and the conduction bands was determined by the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. The positions of valence band maximum and conduction band minimum, the excitation range for the polaronic states and the range of charge transfer band were found to be not influenced by the preparation conditions. The band gap was determined to be 6.2 eV and the energy of the charge neutrality level (referred to vacuum level) was determined as 4.7 eV. The Fermi level position was observed to vary about 1.2 eV depending on the preparation conditions, which indicates the presence of charges within the films. KW - HfO₂ KW - resonant photoelectron spectroscopy (resPES) KW - electronic structure KW - partial density of states KW - charge neutrality level Y1 - 2016 U6 - https://doi.org/10.1149/07506.0145ecst SN - 1938-6737 SN - 1938-5862 VL - 75 IS - 6 SP - 145 EP - 153 ER -