TY - PAT A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Elektrostatisch auslenkbares mikromechanisches Bauelement Y1 - 2014 ER - TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms10078 SN - 2041-1723 IS - 6 SP - 10078 ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER - TY - GEN A1 - Kolkovsky, Vladimir A1 - Stübner, R. A1 - Langa, Sergiu A1 - Wende, U. A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique T2 - Solid-State Electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.sse.2016.06.005 SN - 0038-1101 VL - 123 SP - 89 EP - 95 ER - TY - GEN A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - A novel electrostatic actuator class T2 - Procedia Engineering Y1 - 2016 U6 - https://doi.org/10.1016/j.proeng.2016.11.454 SN - 1877-7058 VL - 168 SP - 1533 EP - 1536 ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A novel electrostatic micro-actuator class and its application potential for optical MEMS T2 - 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings Y1 - 2016 SN - 978-1-5090-1036-3 U6 - https://doi.org/10.1109/OMN.2016.7565867 SP - Tu 3.11-1 EP - Tu 3.11-2 PB - IEEE CY - Piscataway, NJ ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Langa, Sergiu A1 - Kaiser, Bert T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T2 - MEMS transducer for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2015 ER - TY - CHAP A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Stolz, Michael A1 - Arscott, S. A1 - Conrad, Holger A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatic bending actuators with liquid filled nanometer scale gap T2 - MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017 Y1 - 2017 UR - http://ieeexplore.ieee.org/document/7863369/ SN - 978-1-5090-5078-9 SN - 978-1-5090-5079-6 SP - 175 EP - 178 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A contribution to the expansion of the applicability of electrostatic forces in micro transducers T2 - MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States Y1 - 2017 SN - 978-1-5106-0674-6 SN - 978-1-5106-0673-9 U6 - https://doi.org/10.1117/12.2249575 PB - SPIE CY - Bellingham, Washington, USA ER - TY - GEN A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive T2 - Microsystem Technologies Y1 - 2017 U6 - https://doi.org/10.1007/s00542-017-3360-6 SN - 1432-1858 VL - 23 IS - 1 SP - 5697 EP - 5708 ER - TY - GEN A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically driven in-plane silicon micropump for modular configuration T2 - Micromachines N2 - In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina. KW - micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS Y1 - 2018 U6 - https://doi.org/10.3390/mi9040190 SN - 2072-666X VL - 9 IS - 4 ER - TY - CHAP A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schenk, Harald T1 - CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators T2 - MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017 Y1 - 2017 SN - 978-3-8007-4491-6 SP - 219 EP - 222 PB - VDE-Verlag CY - Berlin [u.a.] ER - TY - CHAP A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically in-plane driven silicon micropump for modular configuration T2 - Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands Y1 - 2017 UR - http://publica.fraunhofer.de/dokumente/N-477736.html SP - 57 EP - 60 PB - University of Twente CY - Enschede ER - TY - PAT A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Mikromechanical devices with mechanical actuators T1 - Mikromechanische Bauelemente mit mechanischen Aktuatoren Y1 - 2018 ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T1 - MEMS converter for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2018 ER - TY - CHAP A1 - Conrad, Holger A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Schuffenhauer, David A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Schenk, Harald T1 - CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen T2 - Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung für Akustik, 19.-22. März 2018, München Y1 - 2018 SN - 978-3-939296-13-3 SP - 892 EP - 894 PB - Deutsche Gesellschaft für Akustik e.V. (DEGA) CY - Berlin ER - TY - GEN A1 - Stolz, Michael A1 - Mrosk, Andreas A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald T1 - Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen T2 - MikroSystemTechnik-Kongress, Berlin, Germany, 2019 N2 - In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive – NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollständig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei über einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerstörungsfreie optische Methoden präsentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren ermöglicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann. Y1 - 2019 UR - https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html SP - 366 EP - 369 PB - VDE-Verlag ER - TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Hermann A1 - Schuffenhauer, David A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Kolkovsky, Vladimir T1 - MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications T2 - Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30 N2 - Wireless earphones require a tremendous degree of integration: In addition to the electroacoustic transducer at least the power supply and a radio module have to be accommodated, supplemented by several microphones for hands-free applications or for noise reduction, as well as position and bio sensors, memory and CPU. With increasing integration, the pressure on the individual components increases in terms of size, energy efficiency and costs. In the field of microphones, MEMS technology has enjoyed great popularity for almost 10 years, and due to their benefits (size, cost, integration) MEMS microphones have almost completely supersede other microphone technologies in mobile audio devices and opened up new fields of applications. Y1 - 2018 VL - TMT 30 SP - 189 EP - 192 ER - TY - GEN A1 - Spitz, Barbara A1 - Wall, Franziska A1 - Schenk, Hermann A1 - Melnikov, Anton A1 - Ehrig, Lutz A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald A1 - Pufe, Wolfram T1 - Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren T2 - MikroSystemTechnik-Kongress, Berlin, Germany, 2019 N2 - Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity. Y1 - 2019 SP - 54 EP - 57 PB - VDE-Verlag ER - TY - GEN A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Stolz, Michael A1 - Schenk, Hermann A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schimmanz, Klaus A1 - Schuffenhauer, David T1 - Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers T2 - Microsystems and Nanoengineering N2 - MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. Y1 - 2019 U6 - https://doi.org/10.1038/s41378-019-0095-9 SN - 2055-7434 IS - 5 ER -