TY - PAT A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Elektrostatisch auslenkbares mikromechanisches Bauelement Y1 - 2014 ER - TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms10078 SN - 2041-1723 IS - 6 SP - 10078 ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER - TY - GEN A1 - Kolkovsky, Vladimir A1 - Stübner, R. A1 - Langa, Sergiu A1 - Wende, U. A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique T2 - Solid-State Electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.sse.2016.06.005 SN - 0038-1101 VL - 123 SP - 89 EP - 95 ER - TY - GEN A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - A novel electrostatic actuator class T2 - Procedia Engineering Y1 - 2016 U6 - https://doi.org/10.1016/j.proeng.2016.11.454 SN - 1877-7058 VL - 168 SP - 1533 EP - 1536 ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A novel electrostatic micro-actuator class and its application potential for optical MEMS T2 - 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings Y1 - 2016 SN - 978-1-5090-1036-3 U6 - https://doi.org/10.1109/OMN.2016.7565867 SP - Tu 3.11-1 EP - Tu 3.11-2 PB - IEEE CY - Piscataway, NJ ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Langa, Sergiu A1 - Kaiser, Bert T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T2 - MEMS transducer for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2015 ER - TY - CHAP A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Stolz, Michael A1 - Arscott, S. A1 - Conrad, Holger A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatic bending actuators with liquid filled nanometer scale gap T2 - MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017 Y1 - 2017 UR - http://ieeexplore.ieee.org/document/7863369/ SN - 978-1-5090-5078-9 SN - 978-1-5090-5079-6 SP - 175 EP - 178 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A contribution to the expansion of the applicability of electrostatic forces in micro transducers T2 - MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States Y1 - 2017 SN - 978-1-5106-0674-6 SN - 978-1-5106-0673-9 U6 - https://doi.org/10.1117/12.2249575 PB - SPIE CY - Bellingham, Washington, USA ER - TY - GEN A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive T2 - Microsystem Technologies Y1 - 2017 U6 - https://doi.org/10.1007/s00542-017-3360-6 SN - 1432-1858 VL - 23 IS - 1 SP - 5697 EP - 5708 ER -