TY - GEN A1 - Prüfer, Mareike A1 - Wenger, Christian A1 - Bier, Frank F. A1 - Laux, Eva-Maria A1 - Hölzel, Ralph T1 - Activity of AC electrokinetically immobilized horseradish peroxidase T2 - Electrophoresis N2 - Dielectrophoresis(DEP) is an AC electrokinetic effect mainly used to manipulate cells.Smaller particles,like virions,antibodies,enzymes,andevendyemolecules can be immobilized by DEP as well. In principle, it was shown that enzymesare active after immobilization by DEP, but no quantification of the retainedactivity was reported so far. In this study, the activity of the enzyme horseradishperoxidase (HRP) is quantified after immobilization by DEP. For this, HRP is immobilized on regular arrays of titanium nitride ring electrodes of 500 nm diameter and 20 nm widths. The activity of HRP on the electrode chip is measured with a limit of detection of 60 fg HRP by observing the enzymatic turnover of Amplex Red and H2O2 to fluorescent resoruf in by fluorescence microscopy. The initial activity of the permanently immobilized HRP equals up to 45% of the activity that can be expected for an ideal monolayer of HRP molecules on all electrodes of the array. Localization of the immobilizate on the electrodesis accomplished by staining with the fluorescent product of the enzyme reac-tion.The high residual activity of enzymes after AC field induced immobilization shows the method’s suitability for biosensing and research applications. KW - dielectrophoresis KW - immobilization KW - nanoelectrodes Y1 - 2022 U6 - https://doi.org/10.1002/elps.202200073 SN - 1522-2683 VL - 43 IS - 18-19 SP - 1920 EP - 1933 ER - TY - GEN A1 - Franck, Max A1 - Dabrowski, Jaroslaw A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Lukosius, Mindaugas T1 - Towards the Growth of Hexagonal Boron Nitride on Ge(001)/Si Substrates by Chemical Vapor Deposition T2 - Nanomaterials N2 - The growth of hexagonal boron nitride (hBN) on epitaxial Ge(001)/Si substrates via high-vacuum chemical vapor deposition from borazine is investigated for the first time in a systematic manner. The influences of the process pressure and growth temperature in the range of 10−7–10−3 mbar and 900–980 °C, respectively, are evaluated with respect to morphology, growth rate, and crystalline quality of the hBN films. At 900 °C, nanocrystalline hBN films with a lateral crystallite size of ~2–3 nm are obtained and confirmed by high-resolution transmission electron microscopy images. X-ray photoelectron spectroscopy confirms an atomic N:B ratio of 1 ± 0.1. A three-dimensional growth mode is observed by atomic force microscopy. Increasing the process pressure in the reactor mainly affects the growth rate, with only slight effects on crystalline quality and none on the principle growth mode. Growth of hBN at 980 °C increases the average crystallite size and leads to the formation of 3–10 well-oriented, vertically stacked layers of hBN on the Ge surface. Exploratory ab initio density functional theory simulations indicate that hBN edges are saturated by hydrogen, and it is proposed that partial de-saturation by H radicals produced on hot parts of the set-up is responsible for the growth KW - Boron nitride KW - 2d materials KW - Chemical vapour deposition Y1 - 2022 U6 - https://doi.org/10.3390/nano12193260 SN - 2079-4991 VL - 12 IS - 19 ER - TY - GEN A1 - Glukhov, Artem A1 - Lepri, Nicola A1 - Milo, Valerio A1 - Baroni, Andrea A1 - Zambelli, Cristian A1 - Olivo, Piero A1 - Pérez, Eduardo A1 - Wenger, Christian A1 - Ielmini, Daniele T1 - End-to-end modeling of variability-aware neural networks based on resistive-switching memory arrays T2 - Proc. 30th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SoC 2022) N2 - Resistive-switching random access memory (RRAM) is a promising technology that enables advanced applications in the field of in-memory computing (IMC). By operating the memory array in the analogue domain, RRAM-based IMC architectures can dramatically improve the energy efficiency of deep neural networks (DNNs). However, achieving a high inference accuracy is challenged by significant variation of RRAM conductance levels, which can be compensated by (i) advanced programming techniques and (ii) variability-aware training (VAT) algorithms. In both cases, however, detailed knowledge and accurate physics-based statistical models of RRAM are needed to develop programming and VAT methodologies. This work presents an end-to-end approach to the development of highly-accurate IMC circuits with RRAM, encompassing the device modeling, the precise programming algorithm, and the VAT simulations to maximize the DNN classification accuracy in presence of conductance variations. KW - RRAM KW - HfO2 KW - neural network KW - memristive switching Y1 - 2022 U6 - https://doi.org/10.1109/VLSI-SoC54400.2022.9939653 SP - 1 EP - 5 ER - TY - GEN A1 - Wen, Jianan A1 - Baroni, Andrea A1 - Pérez, Eduardo A1 - Ulbricht, Markus A1 - Wenger, Christian A1 - Krstic, Milos T1 - Evaluating Read Disturb Effect on RRAM based AI Accelerator with Multilevel States and Input Voltages T2 - 2022 IEEE International Symposium on Defect and Fault Tolerance in VLSI and Nanotechnology Systems (DFT) N2 - RRAM technology is a promising candidate for implementing efficient AI accelerators with extensive multiply-accumulate operations. By scaling RRAM devices to the synaptic crossbar array, the computations can be realized in situ, avoiding frequent weights transfer between the processing units and memory. Besides, as the computations are conducted in the analog domain with high flexibility, applying multilevel input voltages to the RRAM devices with multilevel conductance states enhances the computational efficiency further. However, several non-idealities existing in emerging RRAM technology may degrade the reliability of the system. In this paper, we measured and investigated the impact of read disturb on RRAM devices with different input voltages, which incurs conductance drifts and introduces errors. The measured data are deployed to simulate the RRAM based AI inference engines with multilevel states. KW - RRAM KW - Multilevel switching KW - AI accelarator Y1 - 2022 SN - 978-1-6654-5938-9 SN - 978-1-6654-5937-2 U6 - https://doi.org/10.1109/DFT56152.2022.9962345 SN - 2765-933X SP - 1 EP - 6 ER - TY - GEN A1 - Pérez, Eduardo A1 - Maldonado, David A1 - Perez-Bosch Quesada, Emilio A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Jimenez-Molinos, Francisco A1 - Wenger, Christian T1 - Parameter Extraction Methods for Assessing Device-to-Device and Cycle-to-Cycle Variability of Memristive Devices at Wafer Scale T2 - IEEE Transactions on Electron Devices N2 - The stochastic nature of the resistive switching (RS) process in memristive devices makes device-to-device (DTD) and cycle-to-cycle (CTC) variabilities relevant magnitudes to be quantified and modeled. To accomplish this aim, robust and reliable parameter extraction methods must be employed. In this work, four different extraction methods were used at the production level (over all the 108 devices integrated on 200-mm wafers manufactured in the IHP 130-nm CMOS technology) in order to obtain the corresponding collection of forming, reset, and set switching voltages. The statistical analysis of the experimental data (mean and standard deviation (SD) values) was plotted by using heat maps, which provide a good summary of the whole data at a glance and, in addition, an easy manner to detect inhomogeneities in the fabrication process. KW - RRAM KW - memristive device KW - cycle-to-cycle variability KW - device-to-device variability Y1 - 2023 U6 - https://doi.org/10.1109/TED.2022.3224886 SN - 0018-9383 VL - 70 IS - 1 SP - 360 EP - 365 ER - TY - GEN A1 - Nitsch, Paul-G. A1 - Ratzke, Markus A1 - Pozarowska, Emilia A1 - Flege, Jan Ingo A1 - Alvarado Chavarin, Carlos A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Deposition of reduced ceria thin films by reactive magnetron sputtering for the development of a resistive gas sensor T2 - Verhandlungen der DPG, Berlin 2024 N2 - The use of cerium oxide for hydrogen sensing is limited by the low electrical conductivity of layers deposited from a ceria target. To increase the electrical conductivity, partially reduced cerium oxide layers were obtained from a metallic cerium target by reactive magnetron sputtering. The proportions of the oxidation states Ce3+, present in reduced species, and Ce4+, present in fully oxidized species, were determined by ex-situ XPS. For electrical characterization, films were deposited on planarized tungsten finger electrodes. IV curves were measured over several days to investigate possible influences of oxygen and humidity on electrical conductivity. The morphological stability of the layers under ambient conditions was investigated by microscopical methods. The XPS results show a significant amount of Ce3+ in the layers. The electrical conductivity of as-grown samples is several orders of magnitude higher than that of samples grown from a ceria target. However, the conductivity decreases over time, indicating an oxidation of the layers. The surface morphology of the samples was found to be changing drastically within days, leading to partial delamination. KW - ceria KW - metalic cerium target KW - electrical conductivity KW - X-ray photoelectron spectroscopy (XPS) KW - oxidation states KW - morphology Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/ds/session/11/contribution/18 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Strobel, Carsten A1 - Alvarado Chavarin, Carlos A1 - Knaut, Martin A1 - Völkel, Sandra A1 - Albert, Matthias A1 - Hiess, Andre A1 - Max, Benjamin A1 - Wenger, Christian A1 - Kirchner, Robert A1 - Mikolajick, Thomas T1 - High Gain Graphene Based Hot Electron Transistor with Record High Saturated Output Current Density T2 - Advanced Electronic Materials N2 - Hot electron transistors (HETs) represent an exciting frontier in semiconductor technology, holding the promise of high-speed and high-frequency electronics. With the exploration of two-dimensional materials such as graphene and new device architectures, HETs are poised to revolutionize the landscape of modern electronics. This study highlights a novel HET structure with a record output current density of 800 A/cm² and a high current gain α, fabricated using a scalable fabrication approach. The HET structure comprises two-dimensional hexagonal boron nitride (hBN) and graphene layers wet transferred to a germanium substrate. The combination of these materials results in exceptional performance, particularly in terms of the highly saturated output current density. The scalable fabrication scheme used to produce the HET opens up opportunities for large-scale manufacturing. This breakthrough in HET technology holds promise for advanced electronic applications, offering high current capabilities in a practical and manufacturable device. KW - Graphene KW - Transistor Y1 - 2024 U6 - https://doi.org/10.1002/aelm.202300624 SN - 2199-160X VL - 10 IS - 2 ER - TY - GEN A1 - Pechmann, Stefan A1 - Pérez, Eduardo A1 - Wenger, Christian A1 - Hagelauer, Amelie T1 - A current mirror Based read circuit design with multi-level capability for resistive switching deviceb T2 - 2024 International Conference on Electronics, Information, and Communication (ICEIC) N2 - This paper presents a read circuit design for resistive memory cells based on current mirrors. The circuit utilizes high-precision current mirrors and reference cells to determine the state of resistive memory using comparators. It offers a high degree in adaptability in terms of both resistance range and number of levels. Special emphasis was put on device protection to prevent accidental programming of the memory during read operations. The realized circuit can resolve eight states with a resolution of up to 1 k Ω, realizing a digitization of the analog memory information. Furthermore, the integration in a complete memory macro is shown. The circuit was realized in a 130 nm-process but can easily be adapted to other processes and resistive memory technologies. KW - RRAM KW - memristive device Y1 - 2024 SN - 979-8-3503-7188-8 U6 - https://doi.org/10.1109/ICEIC61013.2024.10457188 SN - 2767-7699 PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - GEN A1 - Nikiruy, Kristina A1 - Pérez, Eduardo A1 - Baroni, Andrea A1 - Dorai Swamy Reddy, Keerthi A1 - Pechmann, Stefan A1 - Wenger, Christian A1 - Ziegler, Martin T1 - Blooming and pruning: learning from mistakes with memristive synapses T2 - Scientific Reports N2 - AbstractBlooming and pruning is one of the most important developmental mechanisms of the biological brain in the first years of life, enabling it to adapt its network structure to the demands of the environment. The mechanism is thought to be fundamental for the development of cognitive skills. Inspired by this, Chialvo and Bak proposed in 1999 a learning scheme that learns from mistakes by eliminating from the initial surplus of synaptic connections those that lead to an undesirable outcome. Here, this idea is implemented in a neuromorphic circuit scheme using CMOS integrated HfO2-based memristive devices. The implemented two-layer neural network learns in a self-organized manner without positive reinforcement and exploits the inherent variability of the memristive devices. This approach provides hardware, local, and energy-efficient learning. A combined experimental and simulation-based parameter study is presented to find the relevant system and device parameters leading to a compact and robust memristive neuromorphic circuit that can handle association tasks. KW - RRAM KW - Neural network Y1 - 2024 U6 - https://doi.org/10.1038/s41598-024-57660-4 SN - 2045-2322 VL - 14 IS - 1 ER - TY - CHAP A1 - Wen, Jianan A1 - Vargas, Fabian Luis A1 - Zhu, Fukun A1 - Reiser, Daniel A1 - Baroni, Andrea A1 - Fritscher, Markus A1 - Pérez, Eduardo A1 - Reichenbach, Marc A1 - Wenger, Christian A1 - Krstic, Milos T1 - Cycle-Accurate FPGA Emulation of RRAM Crossbar Array: Efficient Device and Variability Modeling with Energy Consumption Assessment T2 - 2024 IEEE 25th Latin American Test Symposium (LATS) N2 - Emerging device technologies such as resistive RAM (RRAM) are increasingly recognized in enhancing system performance, particularly in applications demanding extensive vector-matrix multiplications (VMMs) with high parallelism. However, a significant limitation in current electronics design automation (EDA) tools is their lack of support for rapid prototyping, design space exploration, and the integration of inherent process-dependent device variability into system-level simulations, which is essential for assessing system reliability. To address this gap, we introduce a field-programmable gate array (FPGA) based emulation approach for RRAM crossbars featuring cycle-accurate emulations in real time without relying on complex device models. Our approach is based on pre-generated look-up tables (LUTs) to accurately represent the RRAM device behavior. To efficiently model the device variability at the system level, we propose using the multivariate kernel density estimation (KDE) method to augment the measured RRAM data. The proposed emulator allows precise latency determination for matrix mapping and computation operations. Meanwhile, by coupling with the NeuroSim framework, the corresponding energy consumption can be estimated. In addition to facilitating a range of in-depth system assessments, experimental results suggest a remarkable reduction of emulation time compared to the classic behavioral simulation. KW - RRAM Y1 - 2024 U6 - https://doi.org/10.1109/LATS62223.2024.10534601 PB - IEEE ER -