TY - GEN A1 - Weber, Franziska A1 - Müller, Carsten A1 - Grünberg, Christian A1 - Thiel, Christian A1 - Bahns, Carolin A1 - Brannath, Werner A1 - Dietrich, Freya A1 - Dieter, Valerie A1 - Färber, Francesca A1 - Gellert, Paul A1 - Kloek, Corelien A1 - Kloep, Stephan A1 - Kopkow, Christian A1 - Krauß, Inga A1 - Rasche, Peter A1 - Rothgang, Heinz A1 - Veenhof, Cindy A1 - Vollmar, Horst Christian A1 - Peschke, Dirk T1 - Smartphone-assistiertes Trainings- und Edukationsprogramm für Menschen mit Hüft- und/oder Kniearthrose (SmArt-E): Studienprotokoll für eine multizentrische, randomisierte, kontrollierte Studie T2 - 21. Deutscher Kongress für Versorgungsforschung (DKVF), 05.10. - 07.10.2022, Potsdam Y1 - 2022 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0183-22dkvf2836 ER - TY - GEN A1 - Weber, Franziska A1 - Müller, Carsten A1 - Bahns, Carolin A1 - Kopkow, Christian A1 - Färber, Francesca A1 - Gellert, Paul A1 - Otte, Ina A1 - Vollmar, Horst Christian A1 - Brannath, Werner A1 - Diederich, Freya A1 - Kloep, Stephan A1 - Rothgang, Heinz A1 - Dieter, Valerie A1 - Krauß, Inga A1 - Kloek, Corelien A1 - Veenhof, Cindy A1 - Collisi, Sandra A1 - Repschläger, Ute A1 - Böbinger, Hannes A1 - Grüneberg, Christian A1 - Thiel, Christian A1 - Peschke, Dirk T1 - Smartphone-assisted training with education for patients with hip and/or knee osteoarthritis (SmArt-E): study protocol for a multicentre pragmatic randomized controlled trial T2 - BMC Musculoskeletal Disorders N2 - Hip and knee osteoarthritis are associated with functional limitations, pain and restrictions in quality of life and the ability to work. Furthermore, with growing prevalence, osteoarthritis is increasingly causing (in)direct costs. Guidelines recommend exercise therapy and education as primary treatment strategies. Available options for treatment based on physical activity promotion and lifestyle change are often insufficiently provided and used. In addition, the quality of current exercise programmes often does not meet the changing care needs of older people with comorbidities and exercise adherence is a challenge beyond personal physiotherapy. The main objective of this study is to investigate the short- and long-term (cost-)effectiveness of the SmArt-E programme in people with hip and/or knee osteoarthritis in terms of pain and physical functioning compared to usual care. KW - Arthrose, Knie, Hüfte, Physiotherapie Y1 - 2023 UR - https://bmcmusculoskeletdisord.biomedcentral.com/counter/pdf/10.1186/s12891-023-06255-7.pdf U6 - https://doi.org/10.1186/s12891-023-06255-7 VL - 24 IS - 1 ER - TY - GEN A1 - Kaletta, Udo Christian A1 - Wipf, Christian A1 - Fraschke, Mirko A1 - Wolansky, Dirk A1 - Schubert, Markus Andreas A1 - Schroeder, Thomas A1 - Wenger, Christian T1 - AlN/SiO2/Si3N4/Si(100) based CMOS compatible surface acoustic wave filter with -12.8 dB minimum insertion loss T2 - IEEE Transactions on Electron Devices Y1 - 2015 U6 - https://doi.org/10.1109/TED.2015.2395443 SN - 0018-9383 VL - 62 IS - 3 SP - 764 EP - 768 ER - TY - GEN A1 - Baal, Katharina van A1 - Allfofs, Jana A1 - Ehrenbrusthoff, Katja A1 - Grüneberg, Christian A1 - Hering, Thomas A1 - Kopkow, Christian A1 - Thiel, Christian T1 - Effects of a movement control and tactile acuity training in patients with nonspecific chronic low back pain and control impairment T2 - BMC Musculoskeletal Disorders Y1 - 2020 U6 - https://doi.org/10.1186/s12891-020-03727-y SN - 1471-2474 VL - Vol. 21 ER - TY - GEN A1 - Bertaud, Thomas A1 - Walczyk, Damian A1 - Walczyk, Christian A1 - Kubotsch, S. A1 - Wenger, Christian A1 - Schröder, Thomas A1 - Vallée, Christophe A1 - Gonon, P. A1 - Mannequin, C. A1 - Jousseaume, V. A1 - Grampeix, Helen T1 - Resistive Switching of HfO2-based MIM diodes: Impact of the Top Electrode Materials T2 - Thin Solid Films Y1 - 2012 SN - 0040-6090 VL - 520 IS - 14 SP - 4551 EP - 4555 ER - TY - CHAP A1 - Minhas, Sarfraz Ul-Haque A1 - Juzek, Christian A1 - Berger, Ulrich A1 - Lehmann, Christian ED - Bakhtadze, Natalia ED - Chernyshov, Kirill ED - Dolgui, Alexandre ED - Lototsky, Vladimir T1 - Development of Intelligent Decision Support System Based on Unified Concept for Distributed Manufacturing Planning T2 - 7th IFAC Conference on Manufacturing Modelling, Management, and Control N2 - The optimization processes in production planning often encounter problems due to unavailability of skilled workers in the concerned production departments since the decisions made in uncertain situations rely mainly on the knowledge possessed by the relevant planners. This paper further presents and elaborates the unified web-based knowledge based decision support system concept to automate and reuse implicit knowledge generated during interaction with the dedicated software tools as well as during interaction with real hardware setups in an industrial environment. The unified concept has been devised considering two pilot cases i.e. decision making on eco-efficient decentralized production schemes for manufacturing customized products and decision support for solving problems in ramp-up management process. This paper further discusses the development issues concerning web-based knowledge based decision support system to demonstrate the unified concept. The software modules from both pilot cases are validated considering two pilot cases. KW - Knowledge management in production; Mass customization Y1 - 2013 U6 - https://doi.org/10.3182/20130619-3-RU-3018.00351 SP - 454 EP - 459 ER - TY - GEN A1 - Bertaud, Thomas A1 - Walczyk, Damian A1 - Sowinska, Małgorzata A1 - Wolansky, Dirk A1 - Tillack, Bernd A1 - Schoof, Gunther A1 - Korolevych, R. A1 - Wenger, Christian A1 - Thiess, Sebastian A1 - Schroeder, Thomas A1 - Walczyk, Christian T1 - HfO2-based RRAM for Embedded Nonvolatile Memory: From Materials Science to Integrated 1T1R RRAM Arrays T2 - ECS transactions Y1 - 2012 SN - 1938-6737 VL - 50 IS - 4 SP - 21 EP - 26 ER - TY - GEN A1 - Schubert, Christian A1 - Cordes, Christian T1 - Role Models that make you unhappy: Light Paternalism, Social Learning and Welfare T2 - Journal of Institutional Economics Y1 - 2013 U6 - https://doi.org/10.1017/S1744137413000015 SN - 1744-1382 VL - 9 IS - 2 SP - 131 EP - 159 ER - TY - GEN A1 - Schubert, Christian A1 - Cordes, Christian T1 - Toward a Naturalistic Foundation of the Social Contract T2 - Constitutional Political Economy Y1 - 2007 U6 - https://doi.org/10.1007/s10602-006-9011-z SN - 1572-9966 VL - 18 IS - 1 SP - 35 EP - 62 ER - TY - GEN A1 - Langa, Sergiu A1 - Drabe, Christian A1 - Kunath, Christian A1 - Dreyhaupt, André A1 - Schenk, Harald T1 - Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2003525 SP - 86140F-1 EP - 86140F-8 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - GEN A1 - Wetter, Oliver A1 - Pfister, Christian A1 - Werner, Johannes P. A1 - Zorita, Eduardo A1 - Wagner, Sebastian A1 - Seneviratne, Sonia I. A1 - Herget, Jürgen A1 - Grünewald, Uwe A1 - Luterbacher, Jürg A1 - Alcoforado, Maria João A1 - Barriendos, Mariano A1 - Bieber, Ursula A1 - Brázdil, Rudolf A1 - Burmeister, Karl H. A1 - Camenisch, Chantal A1 - Contino, Antonio A1 - Dobrovolný, Petr A1 - Glaser, Rüdiger A1 - Himmelsbach, Iso A1 - Kiss, Andrea A1 - Kotyza, Oldřich A1 - Labbé, Thomas A1 - Limanówka, Danuta A1 - Litzenburger, Laurent A1 - Nordl, Øyvind A1 - Pribyl, Kathleen A1 - Retsö, Dag A1 - Riemann, Dirk A1 - Rohr, Christian A1 - Siegfried, Werner A1 - Söderberg, Johan A1 - Spring, Jean-Laurent T1 - The year-long unprecedented European heat and drought of 1540 – a worst case T2 - Climatic change N2 - The heat waves of 2003 in Western Europe and 2010 in Russia, commonly labelled as rare climatic anomalies outside of previous experience, are often taken as harbingers of more frequent ex-tremes in the global warming-influenced future. However, a recent reconstruction of spring–summer temperatures for WE resulted in the likelihood of significantly higher temperatures in 1540. In order to check the plausibility of this result we investigated the severity of the 1540 drought by putting forward the argument of the known soil desiccation-temperature feedback. Based on more than 300 first-hand documentary weather report sources originating from an area of 2 to 3 million km2, we show that Europe was affected by an unprecedented 11-month-long Megadrought. The estimated number of precipitation days and precipitation amount for Central and Western Europe in 1540 is significantly lower than the 100-year minima of the in-strumental measurement period for spring, summer and autumn. This result is supported by independent documentary evidence about extremely low river flows and Europe-wide wild-, forestand settlement fires. We found that an event of this severity cannot be simulated by state-of-the-art climate models. Y1 - 2014 UR - http://link.springer.com/article/10.1007%2Fs10584-014-1184-2#page-1 U6 - https://doi.org/10.1007/s10584-014-1184-2 SN - 1573-1480 SN - 0165-0009 VL - 125 IS - 3-4 SP - 349 EP - 363 ER - TY - GEN A1 - Pfister, Christian A1 - Wetter, Oliver A1 - Brázdil, Rudolf A1 - Dobrovolný, Petr A1 - Glaser, Rüdiger A1 - Luterbacher, Jürg A1 - Seneviratne, Sonia I. A1 - Zorita, Eduardo A1 - Alcoforado, Maria João A1 - Barriendos, Mariano A1 - Bieber, Ursula A1 - Burmeister, Karl H. A1 - Camenisch, Chantal A1 - Contino, Antonio A1 - Grünewald, Uwe A1 - Herget, Jürgen A1 - Himmelsbach, Iso A1 - Labbé, Thomas A1 - Limanówka, Danuta A1 - Litzenburger, Laurent A1 - Kiss, Andrea A1 - Kotyza, Oldřich A1 - Nordl, Øyvind A1 - Pribyl, Kathleen A1 - Retsö, Dag A1 - Riemann, Dirk A1 - Rohr, Christian A1 - Siegfried, Werner A1 - Spring, Jean-Laurent A1 - Söderberg, Johan A1 - Wagner, Sebastian A1 - Werner, Johannes P. T1 - Tree-rings and people – different views on the 1540 Megadrought. Reply to Büntgen et al. 2015 T2 - Climatic change Y1 - 2015 U6 - https://doi.org/10.1007/s10584-015-1429-8 SN - 0165-0009 SN - 1573-1480 VL - 131 IS - 2 SP - 191 EP - 198 ER - TY - PAT A1 - Brinkmann, Ralf Peter A1 - Oberrath, Jens A1 - Awakowicz, Peter A1 - Lapke, Martin A1 - Musch, Thomas A1 - Mussenbrock, Thomas A1 - Rolfes, Ilona A1 - Schulz, Christian A1 - Storch, Robert A1 - Styrnoll, Tim A1 - Zietz, Christian T1 - Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma Y1 - 2011 ER - TY - RPRT A1 - Gährs, Swantje A1 - Aretz, Astrid A1 - Flaute, Markus A1 - Oberst, Christian A. A1 - Großmann, Anett A1 - Lutz, Christian A1 - Bargende, Daniel A1 - Hirschl, Bernd A1 - Madlener, Reinhard T1 - Prosumer-Haushalte: Handlungsempfehlungen für eine sozial-ökologische und systemdienliche Förderpolitik N2 - Im Projekt „Prosumer-Haushalte – Private Haushalte als neue Schlüsselakteure einer Transformation des Energiesystems“ wurden Thesen entwickelt, die das Potenzial und die Möglichkeiten von Prosumer-Haushalten unter ökologischen, ökonomischen, sozialen und technischen Aspekten beleuchten. Diese Thesen wurden durch Arbeiten im Rahmen des Projektes geprüft und durch weitere wissenschaftliche Ergebnisse ergänzt. Darauf aufbauend wurden die vorliegenden Handlungsempfehlungen für Rahmenbedingungen entwickelt, die einerseits dabei helfen sollen, das Prosumer-Potenzial zu heben und andererseits den Systemnutzen der Prosumer zu stärken. Dabei können sowohl politische Maßnahmen und Instrumente zur Regulierung eine Rolle spielen als auch Marktmechanismen, die jeweils eine Transformation des Energiesystems herbeiführen bzw. beschleunigen können. Bei der Erarbeitung von Handlungsempfehlungen wurde auch der Konflikt zwischen Klimaschutzzielen und sozialen Zielen deutlich. KW - Prosumer KW - Energiewende KW - Transformation des Energiesystems Y1 - 2016 UR - http://www.prosumer-haushalte.de/data/prohaus/user_upload/Dateien/Prosumer-Haushalte__Handlungsempfehlungen.pdf CY - Aachen, Berlin, Osnabrück ER - TY - RPRT A1 - Schmitt, Randolf A1 - Borck, Christian A1 - Hentschel, Christian A1 - Berger, Ulrich T1 - Lightweight digital shadow concept for batch size one products and modular shopfloors N2 - The Digital Twin is seen as the step towards digitalization in many areas, including the area of manufacturing which is the focus of this paper. However, the frequently application-oriented development of concepts and initial implementations make it difficult to adapt them to other applications. Especially when production deviates from the usual highly automated processes and requires high flexibility, e.g. to allow batch size one. In such a case, the Digital Twin must support modular shopfloors with flexible areas in which different production times and various tools and machines are used. It should also be possible to react promptly to problems in production. Design errors that only become apparent during production must be reported directly. In order to deal with this problem, the paper presents a concept for an abstract representation of a Digital Shadow (DS). The DS combines the disciplines of production planning and control, product lifecycle and layout planning which creates new links and enables further application scenarios. Based on this Digital Shadow, different applications can be realized that provide user-related solutions. For this purpose, a tree structure is used that links information about the product and the production environment which in this case is variable. KW - Digital Shadow KW - Digital Twin KW - Flexible Manufacturing KW - Industry 4.0 KW - SME Y1 - 2020 U6 - https://doi.org/10.26127/BTUOpen-5220 ER - TY - GEN A1 - Pérez, Eduardo A1 - Maldonado, David A1 - Acal, Christian A1 - Ruiz-Castro, Juan Eloy A1 - Aguilera, Ana María A1 - Jimenez-Molinos, Francisco A1 - Roldan, Juan Bautista A1 - Wenger, Christian T1 - Advanced Temperature Dependent Statistical Analysis of Forming Voltage Distributions for Three Different HfO2-Based RRAM Technologies T2 - Solid State Electronics N2 - In this work, voltage distributions of forming operations are analyzed by using an advanced statistical approach based on phase-type distributions (PHD). The experimental data were collected from batches of 128 HfO2-based RRAM devices integrated in 4-kbit arrays. Three di erent switching oxides, namely, polycrystalline HfO2, amorphous HfO2, and Al-doped HfO2, were tested in the temperature range from -40 to 150 oC. The variability of forming voltages has been usually studied by using the Weibull distribution (WD). However, the performance of the PHD analysis demonstrated its ability to better model this crucial operation. The capacity of the PHD to reproduce the experimental data has been validated by means of the Kolmogorov-Smirnov test, while the WD failed in many of the cases studied. In addition, PHD allows to extract information about intermediate probabilistic states that occur in the forming process and the transition probabilities between them; in this manner, we can deepen on the conductive lament formation physics. In particular, the number of intermediate states can be related to the device variability. KW - RRAM KW - HfO2 Y1 - 2021 SN - 0038-1101 SN - 1879-2405 VL - 176 ER - TY - GEN A1 - Borck, Christian A1 - Schmitt, Randolf A1 - Berger, Ulrich A1 - Hentschel, Christian ED - Andersen, Ann-Louise ED - Andersen, Rasmus ED - Brunoe, Thomas Ditlev ED - Stoettrup Schioenning Larsen, Maria ED - Nielsen, Kjeld ED - Napoleone, Alessia ED - Kjeldgaard, Stefan T1 - Development of a IIoT Platform for Industrial Imaging Sensors T2 - Towards Sustainable Customization: Bridging Smart Products and Manufacturing Systems. Proceedings of the 8th Changeable, Agile, Reconfigurable and Virtual Production Conference (CARV2021) and the 10th World Mass Customization & Personalization Conference (MCPC2021), Aalborg, Denmark, October/November 2021 N2 - In the industry, connecting machines and tools - also known as the industrial Internet of things (IIoT) - is an essential part of the digital transformation of a company. The aim is to increase the efficiency and predictability of complex processes. In manual and semi-automatic processes, imaging sensors can help to monitor conditions, gives automated feedbacks to a central system, and e.g. provide current information for a digital twin. However, when imaging sensors are integrated into established IIoT platforms, they quickly reach their system limits due to the multidimensionality and high update and data rates. This paper presents a software platform that enables decoupled automated image processing through the abstraction and contextualization of the sensor technology and its data as well as a plugin architecture. Analogous to edge computing, partial processing can already be performed close to the sensor node to condensate data and reduce network loads and latencies. Thereby, all these approaches increase the longevity, flexibility and scalability of multi-sensor systems and associated processing algorithms. Based on the generic structure of the sensor network, the user is provided with an intuitive user interface that is based on IIoT platforms and enables the integration of their processing pipelines even for non-experts, despite the high complexity of the data. Y1 - 2021 SN - 978-3-030-90699-3 SN - 978-3-030-90702-0 U6 - https://doi.org/10.1007/978-3-030-90700-6_37 SP - 330 EP - 338 PB - Springer CY - Cham ER - TY - RPRT A1 - Thonicke, Kirsten A1 - Rahner, Eva A1 - Arneth, Almut A1 - Bartkowski, Bartosz A1 - Bonn, Aletta A1 - Döhler, Christian A1 - Finger, Robert A1 - Freitag, Jens A1 - Grosch, Rita A1 - Grossart, Hans-Peter A1 - Grützmacher, Kim A1 - Hartman Scholz, Amber A1 - Häuser, Christoph A1 - Hickler, Thomas A1 - Hölker, Franz A1 - Jähnig, Sonja C. A1 - Jeschke, Jonathan A1 - Kassen, Rees A1 - Kastner, Thomas A1 - Kramer-Schadt, Stephanie A1 - Krug, Cornelia A1 - Lakner, Sebastian A1 - Loft, Lasse A1 - Matzdorf, Bettina A1 - Meakins, Felicity A1 - De Meester, Luc A1 - Monaghan, Michael T. A1 - Müller, Daniel A1 - Overmann, Jörg A1 - Quaas, Martin A1 - Radchuk, Viktoriia A1 - Reyer, Christopher A1 - Roos, Christian A1 - Scholz, Imme A1 - Schroer, Sibylle A1 - Sioen, Giles Bruno A1 - Sommer, Simone A1 - Sommerwerk, Nike A1 - Tockner, Klement A1 - Turk, Zachary A1 - Warner, Barbara A1 - Wätzold, Frank A1 - Wende, Wolfgang A1 - Veenstra, Tonjes A1 - Voort, Hein van de T1 - 10 Must-Knows aus der Biodiversitätsforschung Y1 - 2022 U6 - https://doi.org/10.5281/zenodo.6257476 PB - Potsdam-Institut für Klimafolgenforschung e.V. (PIK) CY - Potsdam ER - TY - GEN A1 - Mai, Christian A1 - Marschmeyer, Steffen A1 - Peczek, Anna A1 - Kroh, Aleksandra A1 - Jose, Josmy A1 - Reiter, Sebastian A1 - Fischer, Inga Anita A1 - Wenger, Christian A1 - Mai, Andreas T1 - Integration Aspects of Plasmonic TiN-based Nano-Hole-Arrays on Ge Photodetectorsin a 200mm Wafer CMOS Compatible Silicon Technology T2 - ECS Transactions N2 - In this work we present the progress in regard to the integration of a surface plasmon resonance refractive index sensor into a CMOS compatible 200 mm wafer silicon-based technology. Our approach pursues the combination of germanium photodetectors with metallic nanohole arrays. The paper is focused on the technology development to fabricate large area photodetectors based on a modern design concept. In a first iteration we achieved a leakage current density of 82 mA/cm2 at reverse bias of 0.5 V and a maximum optical responsivity of 0.103 A/W measured with TE polarized light at λ = 1310 nm and a reversed bias of 1 V. For the realization of nanohole arrays we used thin Titanium nitride (TiN) layers deposited by a sputtering process. We were able to produce very homogenous TiN layers with a thickness deviation of around 10 % and RMS of 1.413 nm for 150 nm thick TiN layers. KW - plasmonics KW - nanohole array KW - germanium detector Y1 - 2022 U6 - https://doi.org/10.1149/10904.0035ecst SN - 1938-5862 VL - 109 IS - 4 SP - 35 EP - 46 ER - TY - CHAP A1 - Borck, Christian A1 - Schmitt, Randolf A1 - Berger, Ulrich A1 - Hentschel, Christian T1 - IIoT and Smart Sensors in Human-Centered Manufacturing T2 - The Future of Smart Production for SMEs N2 - Borck et al. evaluate the challenges and opportunities of Industrial Internet of Things (IIoT) and smart sensors in human-centered manufacturing. Particularly in small and medium-sized manufacturing with fewer machines and smart tools, it is significantly more difficult to automate processes and get the required information from the shop floor. Therefore, they give proven recommendations for the use of sensors based on a set of frequently occurring tasks in assembly, maintenance and logistics to achieve the support of smart data models in the context of Industry 4.0. “IIoT and smart sensors in human-centered manufacturing” concludes with concrete sample scenarios and describe the challenges and one solution using smart sensors and data models. Y1 - 2022 SN - 978-3-031-15427-0 SN - 978-3-031-15428-7 U6 - https://doi.org/10.1007/978-3-031-15428-7_18 SP - 213 EP - 224 PB - Springer Nature Switzerland AG CY - Schweiz ER - TY - GEN A1 - Reiter, Sebastian A1 - Sengül, Akant A1 - Mai, Christian A1 - Spirito, Davide A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - On-chip refractive index sensors based on plasmonic TiN Nanohole Arrays T2 - 2024 IEEE Silicon Photonics Conference (SiPhotonics) Y1 - 2024 SN - 979-8-3503-9404-7 SN - 979-8-3503-9405-4 U6 - https://doi.org/10.1109/SiPhotonics60897.2024.10544048 SN - 1949-209X ER - TY - GEN A1 - Jose, Josmy A1 - Mai, Christian A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Integration concept of plasmonic TiN nanohole arrays in a 200 mm BiCMOS Si technology for refractive index sensor applications T2 - iCCC2024 - iCampµs Cottbus Conference Y1 - 2024 U6 - https://doi.org/10.5162/iCCC2024/7.2 SP - 96 EP - 99 ER - TY - GEN A1 - Mai, Christian A1 - Peczek, Anna A1 - Kroh, Aleksandra A1 - Jose, Josmy A1 - Reiter, Sebastian A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Towards a CMOS compatible refractive index sensor: cointegration of TiN nanohole arrays and Ge photodetectors in a 200 mm wafer silicon technology T2 - Optics Express N2 - In this work, we present the monolithic integration of a TiN nanohole array and a Ge photodetector towards a CMOS compatible fabrication of a refractive index sensor in a 200 mm wafer silicon technology. We developed a technology process that enables fabrication with high yields of around 90%. Ge photodetectors with a Ge layer thickness of 450 nm and an area of 1600 µm2 (40 µm x 40 µm) show dark current densities of around 129 mA/cm2 and responsivities of 0.114 A/W measured by top illumination (TE polarization; λ = 1310 nm; angle of incidence = 14 °) at a reverse bias of 1 V. Nanohole arrays were structured in a 150 nm thick TiN layer. They were integrated into the back end of line and placed spatially close to the Ge photodetectors. After the metallization, passivation, and pad opening, the nanohole arrays were released with the help of an amorphous silicon stop layer. A significant impact of the TiN nanohole arrays on the optical behavior of the photodetector could be proven on the wafer level. Photocurrent measurements by top illumination confirm a strong dependence of optical properties on the polarization of the incident light and the nanohole array design. We demonstrate very stable photocurrents on the wafer level with a standard deviation of σ < 6%. KW - plasmonics KW - sensor KW - nano hole array Y1 - 2024 U6 - https://doi.org/10.1364/OE.530081 SN - 1094-4087 VL - 32 IS - 17 SP - 29099 EP - 29111 PB - Optica Publishing Group ER -