TY - CHAP A1 - Ho, Min-Chieh A1 - Hoffmann, Maik A1 - Unger, Alexander A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Khuri-Yakub, Butrus T. T1 - CMUTs in Permanent Contact Operation for High Output Pressure T2 - Proceedings, ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems and ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels Y1 - 2015 SN - 978-0-7918-5690-1 U6 - https://doi.org/10.1115/IPACK2015-48733 PB - ASME CY - New York, NY ER -