TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Eremin, Denis A1 - Brinkmann, Ralf Peter A1 - Schulze, Julian A1 - Schuengel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Peter A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas T2 - Physics of Plasmas Y1 - 2016 U6 - https://doi.org/10.1063/1.4953432 SN - 1070-664X SN - 1089-7674 VL - 23 IS - 6 SP - 063514 ER - TY - GEN A1 - Eremin, Denis A1 - Bienholz, Stefan A1 - Szeremley, Daniel A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Awakowicz, Peter A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter T1 - On the Physics of a Large CCP Discharge T2 - Plasma Sources Science and Technology Y1 - 2016 U6 - https://doi.org/10.1088/0963-0252/25/2/025020 SN - 1361-6595 SN - 0963-0252 VL - 25 IS - 2 SP - 025020 ER - TY - PAT A1 - Brinkmann, Ralf Peter A1 - Oberrath, Jens A1 - Awakowicz, Peter A1 - Lapke, Martin A1 - Musch, Thomas A1 - Mussenbrock, Thomas A1 - Rolfes, Ilona A1 - Schulz, Christian A1 - Storch, Robert A1 - Styrnoll, Tim A1 - Zietz, Christian T1 - Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma Y1 - 2011 ER - TY - CHAP A1 - Szeremley, Daniel A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Eremin, Denis A1 - Mitschker, Felix A1 - Steves, Simon A1 - Awakowicz, Peter A1 - Kushner, Mark T1 - Numerical simulations of a microwave driven low pressure plasma T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534377 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Kirchheim, Dennis A1 - Wilski, Stefan A1 - Jaritz, Montgomery A1 - Mitschker, Felix A1 - Oberberg, Moritz A1 - Trieschmann, Jan A1 - Banko, Lars A1 - Brochhagen, Markus A1 - Schreckenberg, Rabea A1 - Hopmann, Christian A1 - Böke, Marc A1 - Benedikt, Jan A1 - Arcos, Teresa de los A1 - Grundmeier, Guido A1 - Grochla, Dario A1 - Ludwig, Alfred A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Awakowicz, Peter A1 - Dahlmann, Rainer T1 - Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD T2 - Journal of Coatings Technology and Research Y1 - 2018 U6 - https://doi.org/10.1007/s11998-018-0138-4 SN - 1547-0091 SN - 1935-3804 VL - 16 IS - 2 SP - 573 EP - 583 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Brinkmann, Ralf Peter A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges T2 - Plasma Sources Science and Technology Y1 - 2015 U6 - https://doi.org/10.1088/0963-0252/24/2/024002 SN - 0963-0252 SN - 1361-6595 VL - 24 IS - 2 SP - 024002 ER - TY - GEN A1 - Gallian, Sara A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Hitchon, William N. G. T1 - Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4905943 SN - 1089-7550 SN - 0021-8979 VL - 117 IS - 2 SP - 023305 ER - TY - PAT A1 - Heil, Brian George A1 - Czarnetzki, Uwe A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Method for Controlling Ion Energy in Radio Frequency Plasma Y1 - 2013 ER - TY - GEN A1 - Kemaneci, Efe A1 - Booth, Jean-Paul A1 - Chabert, Pascal A1 - Dijk, Jan van A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter T1 - A Computational Analysis of the Vibrational Quanta of Molecular Oxygen in Low Pressure Stationary and Transient Radio-Frequency Oxygen Plasmas T2 - Plasma Sources Science and Technology Y1 - 2016 U6 - https://doi.org/10.1088/0963-0252/25/2/025025 SN - 1361-6595 SN - 0963-0252 VL - 25 IS - 2 SP - 025025 ER - TY - CHAP A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Brinkmann, Ralf Peter A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Confinement of highly energetic electron beams in low pressure capacitive discharges T2 - Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey Y1 - 2015 SN - 978-1-4799-6974-6 U6 - https://doi.org/10.1109/PLASMA.2015.7179545 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Gallian, Sara A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Hitchon, William N. G. A1 - Brinkmann, Ralf Peter T1 - Analytic model of the energy distribution for energetic electrons in HiPIMS T2 - 2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey Y1 - 2015 SN - 978-1-4799-6974-6 U6 - https://doi.org/10.1109/PLASMA.2015.7179892 PB - IEEE CY - Piscataway, NJ ER -