TY - GEN A1 - Schirrmann, Christian A1 - Costache, Florenta Adriana A1 - Bornhorst, Kirstin A1 - Pawlik, Boscij A1 - Rieck, Andreas A1 - Schenk, Harald T1 - Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator T2 - Procedia Engineering N2 - A large deflection polymer bending actuator was employed in the design of an integrated micro-lens with electrically adjustable focal length. This micro-lens consisted of micro-fluidic chambers bonded together and sealed by an elastomeric lens membrane to which the polymer actuator has been attached. For focal length optimization, the chambers could be filled with fluids of different refractive indices. The multilayered actuator of radial shape and the variable micro-lens chip design were optimized using 2D FEM simulations. Fabrication steps included bonding of polymer actuator stack with the elastomeric lens membrane on a micro-machined silicon wafer. For a tunable micro-lens with 3 mm aperture, a tuning range in optical power between 0 and more than 15 dpt was achieved. Y1 - 2014 SN - 1877-7058 N1 - Eurosensors XXVIII - The 28th European Conference on Solid-State Transducers 2014 IS - 87 SP - 1553 EP - 1556 ER - TY - PAT A1 - Costache, Florenta Adriana A1 - Schenk, Harald A1 - Bornhorst, Kirstin A1 - Schirrmann, Christian T1 - Fluidic Variable Focal length optical Lens and Method of Manufacturing the same Y1 - 2012 ER -