TY - GEN A1 - Berger, Birk A1 - Brandt, Steven A1 - Franek, James A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Mussenbrock, Thomas A1 - Schulze, Julian T1 - Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4937403 SN - 1089-7550 SN - 0021-8979 VL - 118 IS - 22 SP - 223302 ER - TY - CHAP A1 - Berger, Birk A1 - Brandt, Steven A1 - Franek, James A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Schulze, Julian A1 - Mussenbrock, Thomas A1 - Bruneau, Bastien A1 - Johnson, Erik A1 - Lafleur, Trevor A1 - Booth, Jean-Paul A1 - O'Connell, Deborah A1 - Gans, Timo A1 - Korolov, Ihor A1 - Derzsi, Aranka A1 - Donkó, Zoltán T1 - Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4 T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534353 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Berger, Birk A1 - Steinberger, Thomas A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Schulze, Julian T1 - Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase T2 - Applied Physics Letters Y1 - 2017 U6 - https://doi.org/10.1063/1.5000144 SN - 1077-3118 VL - 111 IS - 20 ER - TY - GEN A1 - Berger, Birk A1 - You, Kwangho A1 - Lee, Hyo-Chang A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Schulze, Julian T1 - Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aaefc7 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 12 ER - TY - GEN A1 - Liu, Yue A1 - Trieschmann, Jan A1 - Berger, Birk A1 - Schulze, Julian A1 - Mussenbrock, Thomas T1 - Non-Linear Effects and Electron Heating Dynamics in Radio-Frequency Capacitively Coupled Plasmas with a Non-Uniform Transverse Magnetic Field T2 - Physics of Plasmas Y1 - 2021 U6 - https://doi.org/10.1063/5.0045947 SN - 1089-7674 VL - 28 IS - 5 ER -