TY - GEN A1 - Eremin, Denis A1 - Bienholz, Stefan A1 - Szeremley, Daniel A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Awakowicz, Peter A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter T1 - On the Physics of a Large CCP Discharge T2 - Plasma Sources Science and Technology Y1 - 2016 U6 - https://doi.org/10.1088/0963-0252/25/2/025020 SN - 1361-6595 SN - 0963-0252 VL - 25 IS - 2 SP - 025020 ER - TY - CHAP A1 - Szeremley, Daniel A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Eremin, Denis A1 - Mitschker, Felix A1 - Steves, Simon A1 - Awakowicz, Peter A1 - Kushner, Mark T1 - Numerical simulations of a microwave driven low pressure plasma T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534377 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Kirchheim, Dennis A1 - Wilski, Stefan A1 - Jaritz, Montgomery A1 - Mitschker, Felix A1 - Oberberg, Moritz A1 - Trieschmann, Jan A1 - Banko, Lars A1 - Brochhagen, Markus A1 - Schreckenberg, Rabea A1 - Hopmann, Christian A1 - Böke, Marc A1 - Benedikt, Jan A1 - Arcos, Teresa de los A1 - Grundmeier, Guido A1 - Grochla, Dario A1 - Ludwig, Alfred A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter A1 - Awakowicz, Peter A1 - Dahlmann, Rainer T1 - Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD T2 - Journal of Coatings Technology and Research Y1 - 2018 U6 - https://doi.org/10.1007/s11998-018-0138-4 SN - 1547-0091 SN - 1935-3804 VL - 16 IS - 2 SP - 573 EP - 583 ER - TY - PAT A1 - Brinkmann, Ralf Peter A1 - Oberrath, Jens A1 - Awakowicz, Peter A1 - Lapke, Martin A1 - Musch, Thomas A1 - Mussenbrock, Thomas A1 - Rolfes, Ilona A1 - Schulz, Christian A1 - Storch, Robert A1 - Styrnoll, Tim A1 - Zietz, Christian T1 - Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma Y1 - 2011 ER - TY - GEN A1 - Daksha, Manaswi A1 - Derzsi, Aranka A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Donkó, Zoltán A1 - Schulze, Julian T1 - The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs T2 - Plasma Sources Science and Technology Y1 - 2017 U6 - https://doi.org/10.1088/1361-6595/aa7c88 SN - 1361-6595 SN - 0963-0252 VL - 26 IS - 8 SP - 085006 ER - TY - GEN A1 - Berger, Birk A1 - Steinberger, Thomas A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Schulze, Julian T1 - Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase T2 - Applied Physics Letters Y1 - 2017 U6 - https://doi.org/10.1063/1.5000144 SN - 1077-3118 VL - 111 IS - 20 ER - TY - GEN A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Bibinov, Nikita A1 - Awakowicz, Peter A1 - Mráz, Stanislav A1 - Schneider, Jochen M. A1 - Mussenbrock, Thomas T1 - Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aac23e VL - 27 IS - 5 ER - TY - GEN A1 - Berger, Birk A1 - You, Kwangho A1 - Lee, Hyo-Chang A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Schulze, Julian T1 - Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aaefc7 SN - 1361-6595 SN - 0963-0252 VL - 27 IS - 12 ER -