TY - GEN A1 - Kittler, Martin A1 - Arguirov, Tzanimir V. A1 - Fischer, Annette A1 - Seifert, Winfried T1 - Silicon-based Light Emission after Ion Implantation Y1 - 2005 ER - TY - GEN A1 - Orlov, Valeri A1 - Richter, Hans A1 - Fischer, Annette A1 - Reif, Jürgen A1 - Müller, T. A1 - Wahlich, R. T1 - Mechanical Properties of nitrogen-doped CZ silicon crystals T2 - Materials Science in Semiconductor Processing 5 Y1 - 2002 SN - 1369-8001 VL - 5 IS - 4-5 SP - 403 EP - 407 ER -