TY - RPRT A1 - Hollweg, Heinz-Dieter A1 - Böhm, Uwe A1 - Fast, Irina A1 - Hennemuth, Barbara A1 - Keuler, Klaus A1 - Keup-Thiel, Elke A1 - Lautenschlager, Michael A1 - Legutke, Stephanie A1 - Radtke, Kai A1 - Rockel, Burkhardt A1 - Schubert, Martina A1 - Will, Andreas A1 - Woldt, Michael A1 - Wunram, Claudia T1 - Ensemble Simulations over Europe with the Regional Climate Model CLM forced with IPCC AR4 Global Scenarios N2 - Regional climate projections have been performed for Europe with the climate version CLM (version 3.1) of the 'Lokal-Modell' (LM) of the German Meteorological Service. CLM has been forced with output of the ECHAM5/MPIOM global climate model of the Max Planck Institute for Meteorology, which contributed to the fourth climate assessment report (AR4) of the International Panel on Climate Change (IPCC). The results of the global model for the IPCC A1B and B1 scenarios as well as the reconstruction of the last four decades of the 20th century (20C3M) for the AR4 are dynamically scaled down to the CLM grid cell size of about 18×18 km2. Climatological parameters including all model variables and additional quantities characterising the climate are available from the World Data Centre for Climate database run by the German climate service group Model and Data. They can be accessed by the general public at no costs with the help of M and D. In particular, the 'Service Group Adaptation' (SGA) has been established at M and D to assist adaptation projects funded by the German Federal Ministry of Education and Research (BMBF) giving advice on the interpretation of the CLM model results. Y1 - 2008 UR - https://cera-www.dkrz.de/WDCC/ui/cerasearch/entry?acronym=MaD_TeReport_No03 U6 - https://doi.org/10.2312/WDCC/MaD_TeReport_No03 PB - Max-Planck-Institut für Meteorologie CY - Hamburg ER - TY - GEN A1 - Franck, Max A1 - Dabrowski, Jaroslaw A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Lukosius, Mindaugas T1 - Towards the Growth of Hexagonal Boron Nitride on Ge(001)/Si Substrates by Chemical Vapor Deposition T2 - Nanomaterials N2 - The growth of hexagonal boron nitride (hBN) on epitaxial Ge(001)/Si substrates via high-vacuum chemical vapor deposition from borazine is investigated for the first time in a systematic manner. The influences of the process pressure and growth temperature in the range of 10−7–10−3 mbar and 900–980 °C, respectively, are evaluated with respect to morphology, growth rate, and crystalline quality of the hBN films. At 900 °C, nanocrystalline hBN films with a lateral crystallite size of ~2–3 nm are obtained and confirmed by high-resolution transmission electron microscopy images. X-ray photoelectron spectroscopy confirms an atomic N:B ratio of 1 ± 0.1. A three-dimensional growth mode is observed by atomic force microscopy. Increasing the process pressure in the reactor mainly affects the growth rate, with only slight effects on crystalline quality and none on the principle growth mode. Growth of hBN at 980 °C increases the average crystallite size and leads to the formation of 3–10 well-oriented, vertically stacked layers of hBN on the Ge surface. Exploratory ab initio density functional theory simulations indicate that hBN edges are saturated by hydrogen, and it is proposed that partial de-saturation by H radicals produced on hot parts of the set-up is responsible for the growth KW - Boron nitride KW - 2d materials KW - Chemical vapour deposition Y1 - 2022 U6 - https://doi.org/10.3390/nano12193260 SN - 2079-4991 VL - 12 IS - 19 ER - TY - GEN A1 - Weißhaupt, David A1 - Sürgers, Christoph A1 - Bloos, Dominik A1 - Funk, Hannes Simon A1 - Oehme, Michael A1 - Fischer, Gerda A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - van Slageren, Joris A1 - Fischer, Inga Anita A1 - Schulze, Jörg T1 - Lateral Mn5Ge3 spin-valve in contact with a high-mobility Ge two-dimensional hole gas T2 - Semiconductor Science and Technology N2 - Abstract Ge two-dimensional hole gases (2DHG) in strained modulation-doped quantum-wells represent a promising material platform for future spintronic applications due to their excellent spin transport properties and the theoretical possibility of efficient spin manipulation. Due to the continuous development of epitaxial growth recipes extreme high hole mobilities and low effective masses can be achieved, promising an efficient spin transport. Furthermore, the Ge 2DHG can be integrated in the well-established industrial complementary metal-oxide-semiconductor (CMOS) devices technology. However, efficient electrical spin injection into a Ge 2DHG—an essential prerequisite for the realization of spintronic devices—has not yet been demonstrated. In this work, we report the fabrication and low-temperature magnetoresistance (MR) measurements of a laterally structured Mn5Ge3/Ge 2DHG/ Mn5Ge3 device. The ferromagnetic Mn5Ge3 contacts are grown directly into the Ge quantum well by means of an interdiffusion process with a spacing of approximately 130 nm, forming a direct electrical contact between the ferromagnetic metal and the Ge 2DHG. Here, we report for the first time a clear MR signal for temperatures below 13 K possibly arising from successful spin injection into the high mobility Ge 2DHG. The results represent a step forward toward the realization of CMOS compatible spintronic devices based on a 2DHG. KW - two-dimensional hole gas Y1 - 2024 U6 - https://doi.org/10.1088/1361-6641/ad8d06 SN - 0268-1242 VL - 39 IS - 12 SP - 1 EP - 10 PB - IOP Publishing ER - TY - GEN A1 - Hayat, Ahsan A1 - Ratzke, Markus A1 - Alvarado Chavarin, Carlos A1 - Zöllner, Marvin Hartwig A1 - Corley-Wiciak, Agnieszka Anna A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Structural and morphological properties of CeO2 films deposited by radio frequency magnetron sputtering for back-end-of-line integration T2 - Thin Solid Films Y1 - 2024 U6 - https://doi.org/10.1016/j.tsf.2024.140547 SN - 0040-6090 VL - 807 ER - TY - GEN A1 - Fritscher, Markus A1 - Uhlmann, Max A1 - Ostrovskyy, Philip A1 - Reiser, Daniel A1 - Chen, Junchao A1 - Schubert, Andreas A1 - Schulze, Carsten A1 - Kahmen, Gerhard A1 - Fey, Dietmar A1 - Reichenbach, Marc A1 - Krstic, Milos A1 - Wenger, Christian T1 - Area-efficient digital design using RRAM-CMOS standard cells T2 - 2024 IEEE Computer Society Annual Symposium on VLSI (ISVLSI) N2 - Extending the scalability of digital integrated circuits through novel device concepts is an attractive option. Among these concepts, resistive random access memory (RRAM) devices allow fast and nonvolatile operation. However, building large memristive systems is still challenging since large analog circuits have to be designed and integrated. In this paper, we propose a novel solution - the implementation of digital standard cells by the means of RRAM devices. While this methodology is universal, with applications ranging from few-device-circuits to large macroblocks, we demonstrate it for a 2T2R-cell. The benefits of using RRAM devices are demonstrated by implementing a NAND standard cell merely consuming the area of two transistors. This cell is about 25 % smaller than the equivalent CMOS NAND in the same technology. We use these cells to implement a half adder, beating the area of the equivalent CMOS implementation using more sophisticates gates by 15 %. Lastly, we fully integrate this novel standard cell into a digital standard cell library and perform a synthesis and layout of a RISC-V CPU core. KW - RRAM Y1 - 2024 SN - 979-8-3503-5411-9 SN - 979-8-3503-5412-6 U6 - https://doi.org/10.1109/ISVLSI61997.2024.00026 SN - 2159-3477 VL - 18 SP - 81 EP - 87 PB - IEEE ER - TY - GEN A1 - Reiter, Sebastian A1 - Han, Weijia A1 - Mai, Christian A1 - Spirito, Davide A1 - Jose, Josmy A1 - Zöllner, Marvin Hartwig A1 - Fursenko, Oksana A1 - Schubert, Markus Andreas A1 - Stemmler, Ivo A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Titanium Nitride Plasmonic Nanohole Arrays for CMOS-compatible integrated refractive index sensing: influence of layer thickness on optical properties T2 - Plasmonics Y1 - 2023 U6 - https://doi.org/10.1007/s11468-023-01810-3 SN - 1557-1963 SP - 1 EP - 13 ER - TY - GEN A1 - Hayat, Ahsan A1 - Spirito, Davide A1 - Corley-Wiciak, Agnieszka Anna A1 - Schubert, Markus Andreas A1 - Masood, Maria A1 - Reichmann, Felix A1 - Ratzke, Markus A1 - Capellini, Giovanni A1 - Fischer, Inga Anita T1 - MBE-based growth of Sn-rich quantum wells and dots at low Sn deposition rates T2 - Materials Science in Semiconductor Processing Y1 - 2023 U6 - https://doi.org/10.1016/j.mssp.2023.107693 SN - 1873-4081 VL - 165 ER - TY - GEN A1 - Uhlmann, Max A1 - Pérez-Bosch Quesada, Emilio A1 - Fritscher, Markus A1 - Pérez, Eduardo A1 - Schubert, Markus Andreas A1 - Reichenbach, Marc A1 - Ostrovskyy, Philip A1 - Wenger, Christian A1 - Kahmen, Gerhard T1 - One-Transistor-Multiple-RRAM Cells for Energy-Efficient In-Memory Computing T2 - 21st IEEE Interregional NEWCAS Conference (NEWCAS) N2 - The use of resistive random-access memory (RRAM) for in-memory computing (IMC) architectures has significantly improved the energy-efficiency of artificial neural networks (ANN) over the past years. Current RRAM-technologies are physically limited to a defined unambiguously distinguishable number of stable states and a maximum resistive value and are compatible with present complementary metal-oxide semiconductor (CMOS)-technologies. In this work, we improved the accuracy of current ANN models by using increased weight resolutions of memristive devices, combining two or more in-series RRAM cells, integrated in the back end of line (BEOL) of the CMOS process. Based on system level simulations, 1T2R devices were fabricated in IHP's 130nm SiGe:BiCMOS technology node, demonstrating an increased number of states. We achieved an increase in weight resolution from 3 bit in ITIR cells to 6.5 bit in our 1T2R cell. The experimental data of 1T2R devices gives indications for the performance and energy-efficiency improvement in ITNR arrays for ANN applications. KW - RRAM KW - In-Memory Computing Y1 - 2023 SN - 979-8-3503-0024-6 SN - 979-8-3503-0025-3 U6 - https://doi.org/10.1109/NEWCAS57931.2023.10198073 SN - 2474-9672 SN - 2472-467X PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - GEN A1 - Morales, Carlos A1 - Mahmoodinezhad, Ali A1 - Tschammer, Rudi A1 - Kosto, Yuliia A1 - Alvarado Chavarin, Carlos A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates T2 - Inorganics N2 - This work presents a new ultra-high vacuum cluster tool to perform systematic studies of the early growth stages of atomic layer deposited (ALD) ultrathin films following a surface science approach. By combining operando (spectroscopic ellipsometry and quadrupole mass spectrometry) and in situ (X-ray photoelectron spectroscopy) characterization techniques, the cluster allows us to follow the evolution of substrate, film, and reaction intermediates as a function of the total number of ALD cycles, as well as perform a constant diagnosis and evaluation of the ALD process, detecting possible malfunctions that could affect the growth, reproducibility, and conclusions derived from data analysis. The homemade ALD reactor allows the use of multiple precursors and oxidants and its operation under pump and flow-type modes. To illustrate our experimental approach, we revisit the well-known thermal ALD growth of Al2O3 using trimethylaluminum and water. We deeply discuss the role of the metallic Ti thin film substrate at room temperature and 200 °C, highlighting the differences between the heterodeposition (<10 cycles) and the homodeposition (>10 cycles) growth regimes at both conditions. This surface science approach will benefit our understanding of the ALD process, paving the way toward more efficient and controllable manufacturing processes. KW - Atomic layer deposition (ALD) KW - in-situ KW - operando KW - X-ray photoelectron spectroscopy KW - ellipsometry KW - quadrupol mass spectrometry (QMS) Y1 - 2023 U6 - https://doi.org/10.3390/inorganics11120477 SN - 2304-6740 VL - 11 IS - 12 ER - TY - GEN A1 - Perez-Bosch Quesada, Emilio A1 - Rizzi, Tommaso A1 - Gupta, Aditya A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Schubert, Andreas A1 - Pechmann, Stefan A1 - Jia, Ruolan A1 - Uhlmann, Max A1 - Hagelauer, Amelie A1 - Wenger, Christian A1 - Pérez, Eduardo T1 - Multi-Level Programming on Radiation-Hard 1T1R Memristive Devices for In-Memory Computing T2 - 14th Spanish Conference on Electron Devices (CDE 2023), Valencia, Spain, 06-08 June 2023 N2 - This work presents a quasi-static electrical characterization of 1-transistor-1-resistor memristive structures designed following hardness-by-design techniques integrated in the CMOS fabrication process to assure multi-level capabilities in harsh radiation environments. Modulating the gate voltage of the enclosed layout transistor connected in series with the memristive device, it was possible to achieve excellent switching capabilities from a single high resistance state to a total of eight different low resistance states (more than 3 bits). Thus, the fabricated devices are suitable for their integration in larger in-memory computing systems and in multi-level memory applications. Index Terms—radiation-hard, hardness-by-design, memristive devices, Enclosed Layout Transistor, in-memory computing KW - RRAM Y1 - 2023 SN - 979-8-3503-0240-0 U6 - https://doi.org/10.1109/CDE58627.2023.10339525 PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - GEN A1 - Franck, Max A1 - Dabrowski, Jarek A1 - Schubert, Markus Andreas A1 - Vignaud, Dominique A1 - Achehboune, Mohamed A1 - Colomer, Jean‐François A1 - Henrard, Luc A1 - Wenger, Christian A1 - Lukosius, Mindaugas T1 - Investigating Impacts of Local Pressure and Temperature on CVD Growth of Hexagonal Boron Nitride on Ge(001)/Si T2 - Advanced Materials Interfaces N2 - AbstractThe chemical vapor deposition (CVD) growth of hexagonal boron nitride (hBN) on Ge substrates is a promising pathway to high‐quality hBN thin films without metal contaminations for microelectronic applications, but the effect of CVD process parameters on the hBN properties is not well understood yet. The influence of local changes in pressure and temperature due to different reactor configurations on the structure and quality of hBN films grown on Ge(001)/Si is studied. Injection of the borazine precursor close to the sample surface results in an inhomogeneous film thickness, attributed to an inhomogeneous pressure distribution at the surface, as shown by computational fluid dynamics simulations. The additional formation of nanocrystalline islands is attributed to unfavorable gas phase reactions due to the radiative heating of the injector. Both issues are mitigated by increasing the injector‐sample distance, leading to an 86% reduction in pressure variability on the sample surface and a 200 °C reduction in precursor temperature. The resulting hBN films exhibit no nanocrystalline islands, improved thickness homogeneity, and high crystalline quality (Raman FWHM = 23 cm−1). This is competitive with hBN films grown on other non‐metal substrates but achieved at lower temperature and with a low thickness of only a few nanometers. KW - Boron Nitride KW - 2D material Y1 - 2025 U6 - https://doi.org/10.1002/admi.202400467 SN - 2196-7350 VL - 12 IS - 1 PB - Wiley ER - TY - GEN A1 - Morales, Carlos A1 - Gertig, Max A1 - Kot, Małgorzata A1 - Alvarado, Carlos A1 - Schubert, Markus Andreas A1 - Zoellner, Marvin Hartwig A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - In situ X‐ray photoelectron spectroscopy study of atomic layer deposited cerium oxide on SiO₂ : substrate influence on the reaction mechanism during the early stages of growth T2 - Advanced materials interfaces N2 - Thermal atomic layer deposition (ALD) of cerium oxide using commercial Ce(thd)4 precursor and O3 on SiO2 substrates is studied employing in‐situ X‐ray photoelectron spectroscopy (XPS). The system presents a complex growth behavior determined by the change in the reaction mechanism when the precursor interacts with the substrate or the cerium oxide surface. During the first growth stage, non‐ALD side reactions promoted by the substrate affect the growth per cycle, the amount of carbon residue on the surface, and the oxidation degree of cerium oxide. On the contrary, the second growth stage is characterized by a constant growth per cycle in good agreement with the literature, low carbon residues, and almost fully oxidized cerium oxide films. This distinction between two growth regimes is not unique to the CeOx/SiO2 system but can be generalized to other metal oxide substrates. Furthermore, the film growth deviates from the ideal layer‐by‐layer mode, forming micrometric inhomogeneous and defective flakes that eventually coalesce for deposit thicknesses above 10 nm. The ALD‐cerium oxide films present less order and a higher density of defects than films grown by physical vapor deposition techniques, likely affecting their reactivity in oxidizing and reducing conditions. KW - Atomic Layer Deposition (ALD) KW - Cerium oxide KW - In-situ X-ray Photoelectron spectroscopy (in-situ XPS) KW - Growth model KW - Substrate influence Y1 - 2025 U6 - https://doi.org/10.1002/admi.202400537 SN - 2196-7350 VL - 12 IS - 5 SP - 1 EP - 13 PB - Wiley CY - Weinheim ER - TY - GEN A1 - Kalra, Amanpreet A1 - Alvarado Chavarin, Carlos A1 - Nitsch, Paul-Gregor A1 - Tschammer, Rudi A1 - Flege, Jan Ingo A1 - Ratzke, Markus A1 - Zoellner, Marvin Hartwig A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Deposition of CeOₓ/SnOₓ-based thin films via RF magnetron sputtering for resistive gas sensing applications T2 - Physica B, Condensed matter N2 - Cerium oxide-tin oxide (CeOx/SnOx) thin films with varying Sn content were deposited using RF magnetron sputtering and investigated for hydrogen sensing applications. Structural, compositional, and morphological properties were characterized using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy (EDX). Gas sensing measurements showed effective hydrogen detection at room temperature, with the sensitivity strongly influenced by Sn content and oxygen vacancy concentration. Higher Sn concentration enhanced the sensing response, which was correlated with microstructural features obtained from AFM and EDX, as well as with the presence of Ce3+ and Ce4+ oxidation states identified by XPS. This study highlights the potential of CeOx/SnOx thin films for possible back-end-of-line integration and provides proof-of-principle for room-temperature hydrogen sensing. KW - RF magnetron sputtering KW - CeOx/SnOx thin film KW - Room temperature KW - Hydrogen sensing Y1 - 2026 U6 - https://doi.org/10.1016/j.physb.2025.418098 SN - 0921-4526 VL - 723 SP - 1 EP - 7 PB - Elsevier BV CY - Amsterdam ER -