TY - GEN A1 - Morales, Carlos A1 - Mahmoodinezhad, Ali A1 - Tschammer, Rudi A1 - Kosto, Yuliia A1 - Alvarado Chavarin, Carlos A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates T2 - Inorganics N2 - This work presents a new ultra-high vacuum cluster tool to perform systematic studies of the early growth stages of atomic layer deposited (ALD) ultrathin films following a surface science approach. By combining operando (spectroscopic ellipsometry and quadrupole mass spectrometry) and in situ (X-ray photoelectron spectroscopy) characterization techniques, the cluster allows us to follow the evolution of substrate, film, and reaction intermediates as a function of the total number of ALD cycles, as well as perform a constant diagnosis and evaluation of the ALD process, detecting possible malfunctions that could affect the growth, reproducibility, and conclusions derived from data analysis. The homemade ALD reactor allows the use of multiple precursors and oxidants and its operation under pump and flow-type modes. To illustrate our experimental approach, we revisit the well-known thermal ALD growth of Al2O3 using trimethylaluminum and water. We deeply discuss the role of the metallic Ti thin film substrate at room temperature and 200 °C, highlighting the differences between the heterodeposition (<10 cycles) and the homodeposition (>10 cycles) growth regimes at both conditions. This surface science approach will benefit our understanding of the ALD process, paving the way toward more efficient and controllable manufacturing processes. KW - Atomic layer deposition (ALD) KW - in-situ KW - operando KW - X-ray photoelectron spectroscopy KW - ellipsometry KW - quadrupol mass spectrometry (QMS) Y1 - 2023 U6 - https://doi.org/10.3390/inorganics11120477 SN - 2304-6740 VL - 11 IS - 12 ER - TY - GEN A1 - Strobel, Carsten A1 - Alvarado Chavarin, Carlos A1 - Völkel, Sandra A1 - Jahn, Andreas A1 - Hiess, Andre A1 - Knaut, Martin A1 - Albert, Matthias A1 - Wenger, Christian A1 - Steinke, Olaff A1 - Stephan, Ulf A1 - Röhlecke, Sören A1 - Mikolajick, Thomas T1 - Enhanced Electrical Properties of Optimized Vertical Graphene-Base Hot Electron Transistors T2 - ACS Applied Electronic Materials N2 - The arrival of high-mobility two-dimensional materials like graphene leads to the renaissance of former vertical semiconductor–metal–semiconductor (SMS) hot electron transistors. Because of the monolayer thickness of graphene, improved SMS transistors with a semimetallic graphene-base electrode are now feasible for high-frequency applications. In this study we report about a device that consists of amorphous silicon, graphene, and crystalline silicon. For the first time, this device is fabricated by a four-mask lithography process which leads to significant improvements in the device performance. A strongly increased common-emitter current gain of 2% could be achieved while the on–off ratio improved to 1.6 × 105, which is already higher than predicted theoretically. This could be mainly attributed to better interface characteristics and decreased lateral dimensions of the devices. A cutoff frequency of approximately 26 MHz could be forecasted based on the DC measurements of the device. KW - Graphene KW - Transistor Y1 - 2023 U6 - https://doi.org/10.1021/acsaelm.2c01725 SN - 2637-6113 VL - 5 IS - 3 SP - 1670 EP - 1675 ER - TY - GEN A1 - Strobel, Carsten A1 - Alvarado Chavarin, Carlos A1 - Wenger, Christian A1 - Albert, Matthias A1 - Mikolajick, Thomas T1 - Vertical Graphene-Based Transistors for Power Electronics, Optoelectronics and Radio-Frequency Applications T2 - IEEE Nanotechnology Materials and Devices Conference (NMDC), Paestum, Italy, 22-25 October 2023 N2 - The combination of two-dimensional materials, such as graphene, with established thin films offers great opportunities for enabling next-generation vertical transistors for various applications. This paper gives a brief overview about different vertical transistor concepts using twodimensional materials proposed so far, e.g. the hot electron transistor and the Barristor. With the arrival of twodimensional materials, the hot electron transistor also experienced a revival with predicted cut-off frequencies in the THz range. The Barristor overcomes the weak current saturation of lateral graphene field-effect transistors and high on-off ratios up to 107 were demonstrated, which are suitable parameters for logic applications. By combining a semiconductor-graphene-semiconductor design of the simplest hot electron transistor with the Barristor operating principle a new device, called graphene adjustable-barriers transistor, can be realized. This new device concept provides the potential for RF, power electronics, and optoelectronic applications. KW - Graphene Y1 - 2023 SN - 979-8-3503-3546-0 SN - 979-8-3503-3547-7 U6 - https://doi.org/10.1109/NMDC57951.2023.10344102 SN - 2473-0718 SP - 196 EP - 201 PB - Institute of Electrical and Electronics Engineers (IEEE) ER -