TY - CHAP A1 - Grahmann, Jan A1 - Wildenhain, Michael A1 - Grashoff, Thomas A1 - Gerwig, Christian A1 - Dallmann, Hans-Georg A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.910671 SN - 978-0-8194-8930-2 IS - 1. Auflage SP - 825205-1 EP - 825205-9 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - PAT A1 - Klose, Thomas A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Y1 - 2012 ER -