TY - GEN A1 - Layes, Vincent A1 - Monje, Sascha A1 - Corbella, Carles A1 - Trieschmann, Jan A1 - Arcos, Teresa de los A1 - Keudell, Achim von T1 - Species transport on the target during high power impulse magnetron sputtering T2 - Applied Physics Letters Y1 - 2017 U6 - https://doi.org/10.1063/1.4976999 SN - 1077-3118 VL - 110 IS - 8 ER -