<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>6364</id>
    <completedYear/>
    <publishedYear>2006</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2011-11-18</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor</title>
    <enrichment key="UBICOIdent">007393</enrichment>
    <enrichment key="UBICOquelle">Meeting Abstracts-Electrochemical Society 502(2006)531, 1091-8213</enrichment>
    <author>
      <firstName>Tomasz</firstName>
      <lastName>Bieniek</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Romuald B.</firstName>
      <lastName>Beck</lastName>
    </author>
    <author>
      <firstName>Andrzej</firstName>
      <lastName>Jakubowski</lastName>
    </author>
    <author>
      <firstName>Patrick</firstName>
      <lastName>Hoffmann</lastName>
    </author>
    <author>
      <firstName>Dieter</firstName>
      <lastName>Schmeißer</lastName>
    </author>
    <author>
      <firstName>Piotr</firstName>
      <lastName>Konarski</lastName>
    </author>
    <author>
      <firstName>M.</firstName>
      <lastName>Cwil</lastName>
    </author>
    <collection role="old_institute" number="01005">LS Angewandte Physik / Sensorik</collection>
    <collection role="institutes" number="1503">FG Angewandte Physik und Halbleiterspektroskopie</collection>
  </doc>
</export-example>
