<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>5056</id>
    <completedYear/>
    <publishedYear>2009</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2011-02-11</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects</title>
    <identifier type="url">http://link.aip.org/link/?APCPCS/1143/20/1</identifier>
    <enrichment key="UBICOIdent">005895</enrichment>
    <enrichment key="UBICOquelle">AIP conference proceedings 1143(2009)1, S. 20-30, 1551-7616</enrichment>
    <author>
      <firstName>S.</firstName>
      <lastName>Heim</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Daniel</firstName>
      <lastName>Friedrich</lastName>
    </author>
    <author>
      <firstName>P.</firstName>
      <lastName>Guttmann</lastName>
    </author>
    <author>
      <firstName>S.</firstName>
      <lastName>Rehbein</lastName>
    </author>
    <author>
      <firstName>Dmytro</firstName>
      <lastName>Chumakov</lastName>
    </author>
    <author>
      <firstName>Y.</firstName>
      <lastName>Ritz</lastName>
    </author>
    <author>
      <firstName>G.</firstName>
      <lastName>Schneider</lastName>
    </author>
    <author>
      <firstName>Dieter</firstName>
      <lastName>Schmeißer</lastName>
    </author>
    <author>
      <firstName>Ehrenfried</firstName>
      <lastName>Zschech</lastName>
    </author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>x-ray</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Microscopy</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Interconnects</value>
    </subject>
    <collection role="old_institute" number="01005">LS Angewandte Physik / Sensorik</collection>
    <collection role="institutes" number="1503">FG Angewandte Physik und Halbleiterspektroskopie</collection>
  </doc>
</export-example>
