<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>3284</id>
    <completedYear/>
    <publishedYear>2006</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>doctoralthesis</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2007-04-23</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Auf Tantal-Silizium basierende Diffusionsbarrieren zur Verkapselung funktionaler Bauelemente</title>
    <identifier type="urn">urn:nbn:de:kobv:co1-opus-10</identifier>
    <enrichment key="UBICOIdent">003958</enrichment>
    <author>
      <firstName>Henning</firstName>
      <lastName>Heuer</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Tantal</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Solarzelle</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Verkapselung</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Diffusionsbarrieren</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Flexible Solarzellen</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Tantal-Silizium</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Dünne Schichten</value>
    </subject>
    <collection role="old_institute" number="03034">LS Mikroelektronik</collection>
    <collection role="institutes" number="1106">FG Mikroelektronik</collection>
  </doc>
</export-example>
